Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ZPY Pad dia.

Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ) ZPY Pad dia.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

2/3 Port Valve for Various

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

Vacuum Regulator

NPN open collector 1 output, Lead wire with connector (Length 2 m) PNP open collector 1 output , Lead wire with connector (Length 2 m) NPN open collector 2 outputs, Lead wire with connector (Length 2 m) PNP open collector 2 outputs, Lead wire with connector (Length 2 m) Digital pressure switch specifications ZSE30A-01-N-ML ZSE30A-01-P-ML ZSE30A-01-A-ML ZSE30A-01-B-ML 1 to 3 are assembled

AC Servo Motor Driver (CC-Link Type ）

m] (28.7[lb in]) U U Mounting screw CNP3 CNP3 V V Screw size:M5 Tightening torque:3.24[Nm] W W 11 3 11.

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

AC Servo Motor Driver (CC-Link Type ）

Servo amplifier Servo motor Driver M U V W U V W 3) The earth terminal of the servo motor is connected to the PE terminal of the driver. Servo amplifier Servo motor Driver M 4) P1-P2 (For 11kW or more, P1-P) should be connected.

LEC-OM07605CN

V DOCOM DOCOM RA RA (FR-BIF) (UVW)(UVW) U U U U V V M V M V W W W W U,V,WCN2 3 2 3. 3.1 (L1L2L3) ALM() () U,V,WCN2 SSCNET/HAA EM2EM1 AC200V240VL1L3LECSS-S LECSS-SLECSS2-T ON(MCCB) 3 3 3

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

JXCx-OMT0023

Servo motor Driver Driver Servo motor Servo amplifier Servo amplifier U U U U V V M V M V W W W W Do not connect AC power supply directly to the servo motor. Otherwise, a fault may occur. Install a surge absorbing diode on the DC relay designed for control output signal in the specified direction.

AIR COMBINATION

(with color zone) 0.2 MPa setting G36-4-01-L G46-4-01-L Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] Square Note2) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] embedded type 0.2 MPa setting Option NPN output Wiring bottom entry ISE35-N-25-MLAISE35-N-25-M (Switch body only)] Note 3 NPN output Wiring top entry ISE35-R-25-MLAISE35-R-25-M (Switch body only)] Note 3 Digital

0.4

Property 65 or less Cable length (L) Conductor resistance /km, 20C AXT100-MC26-015 AXT100-MC26-030 AXT100-MC26-050 1.5 m 3 m 5 m Cable 25-core x 24AWG 10 Voltage limit V, 1 min, AC 1000 Insulation resistance M/km, 20C 5 or more Cannot be used for transfer wiring.

Membrane Air Dryer

M> V> When dry clean air is required. When dry clean air and pressure control are required.

LEC-OM02904

UVW)(UV W) U U V V M W W (UVW) M U V W U V W PE M P1-P2(11k~12KWP1-P) P1 P2 4 3 4 (C) 200V3.5kW CNP2P-D PC (11.2) (2) (a) DO CN1ON/OFF (b) CN3DC24V (c) CN3SDDOCOM CN3 DOCOM SD 4.1.3 (1) (a) (b) (10.4) (c) (2) 4 4 4 4.2 (1) b01(1) (25) ON 3000r/min (2) 5 No.

Compact Vacuum Unit

0.457 0.457 0.402 0.571 V V (inch) (n1) x 0.402 L n 1 2 L1 L2 1.14 0.85 1.54 1.25 3 1.94 1.65 4 2.35 2.06 5 2.75 2.46 6 3.15 2.86 7 3.55 3.26 8 3.95 3.66 9 4.35 4.06 10 4.76 4.46 11 5.16 4.87 12 5.56 5.27 Refer to page 14 for the dimensions for the various vacuum (V) ports. 01 M5 ZB3 L(O)-P 0 1 1 3 K1 Q1 ZZB-S M5 Air pressure SUP Vacuum pressure SUP (PV) port 2 x 1/8, M5 thread depth 0.197

Clean Room Rodless Cylinder Series CYP ø15, ø32

V Y7PV Y7P IC circuit 3-wire (PNP) Y59B Y69B 12 V 2-wire Relay, PLC Solid state switch 24 V Y7NW Y7NWV 3-wire (NPN) Grommet Yes 5 V , 12 V Diagnostic indication (2-color indication) IC circuit Y7PWV Y7PW 3-wire (PNP) Y7BWV Y7BW 12 V 2-wire Lead wire length symbols: 0.5 m Nil (Example) Y69B 3 m L Y69BL 5 m Z Y69BZ Auto switches marked with a symbol are produced upon receipt of order.