ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

Ｖ cylinder

Wear ring number Wear ring number 40 C1A040-07-305B 50 C1A050-07-306B 63 C1A063-07-307B 80 C1A080-07-308B 100 C1A100-07-309B C a u t i o n The seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year. 3-3-2. Storage of seals C a u t i o n Store seals in sealed packaging such as polyethylene bag and place it in a box.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

B B B B B 65.4 4-Rc(PT)1/8 (P, R port) Manual override 2n-M3 X 0.5 (A, B port) Depress and turn to operate and lock override.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Parts (b) Lever Description Note C4: A, B port One-touch fitting for 4 C6: A, B port One-touch fitting for 6 No.

AC Servo Motor Driver (CC-Link Type ）

to [F], [b] to [f]).

AC Servo Motor Driver (CC-Link Type ）

to [F], [b] to [f]).

V100

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

Swivels

A B Wrench Flats Dia.

Valve Single Unit

connector (M): SX7 20-MC8 C10 C8 C10 128.6 300 141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Bracket Nil B None With bracket Refer to the table (4) if a bracket is ordered separately.

High Power Cylinder:

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

A B A B A B A B t y r w u t y With reducer With flow rate adjustment With bypass i PB PA i A B A B Description Material Parts list No.

212

Applicable model LVR20 LVR40 LVR50 06 6 x 4 LVR20 LVR40 LVR50 07 1/4" x 5/32" 12 12 x 10 11 3/8" x 1/4" 19 19 x 16 13 1/2" x 3/8" 19 3/4" x 5/8" : Basic size : With reducer 07 LVR 2 0 T Tube extensions Body class Pilot port thread type Symbol Type Nil Rc N NPT Symbol Body class 2 2 4 4 Tubing size Tube extensions Metric size Inch size Symbol Tubing size Applicable model Symbol Tubing O.D.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

One-touch fitting N3 Inch 5/32" One-touch fitting N7 1/4" One-touch fitting BM Bellows type with groove UM Flat type with groove ZL ZH Pad material N NBR (Black) S Silicone rubber (White) U Urethane rubber (Brown) F FKM (Black) Mounting ZH Ejector/ Nozzle nominal size [mm] Symbol Type Thread Size A Metric size ZH -X267 Male thread M8 B M10 C Female thread M8 D M10 E Inch size 07 Nozzle:

Direct Solenoid

NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

REC

7 1 NBR Rod seal B PRY-8 PRY-10 PRY-12 PRY-14 !8 1 NBR Piston seal NLP-20A NLP-25-19A NLP-32A NLP-40A !9 2 NBR Cushion seal P-10AE P-12E P-16E P-18E @0 1 Resin Wear ring CM-20-07-301A CM-025-07-302A CM-032-07-304A C1A040-07-305A @1 1 NBR Piston gasket 5.79 X 1.02 6.50 X 1.0 8.50 X 1.0 10.4 X 1.0 @2 2 NBR Holder gasket 17.1 X 1.6 22.1 X 1.6 27.6 X 2.4 SO-031-4 @3 Operation Principles 1.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-01 AS221F-U01-03 AS221F-U01-05 AS221F-U01-07 AS221F-U01-09 AS221F-U02-03 AS221F-U02-05 AS221F-U02-07 AS221F-U02-09 AS221F-U02-11 AS321F-U02-07 AS321F-U02-09 AS321F-U02-11 AS321F-U03-07 AS321F-U03-09 AS321F-U03-11 AS421F-U04-11 AS421F-U04-13 1 8" 5 32" 20.8 21.1 23.1 23.9 25.3 23.3 24.9 25.2 27.2 33.9 27.8 29.5 31.8 27.8 29.5 31.8 33.6 35.2 7.8 8.9 11.4 13.2 15.2 8.9