5 Port Solenoid Valve Series SV1000/2000/3000/4000

L Dimension n: Stations L n 2 148 137.5 119.3 14.5 5 185.5 175 150.8 17.5 6 185.5 175 161.3 12 7 198 187.5 171.8 13 8 210.5 200 182.3 14 9 223 212.5 192.8 15 10 235.5 225 203.3 16 11 248 237.5 213.8 17 12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300 287.3 11.5 4 173 162.5 140.3 16.5 3 160.5 150

Air Cylinder

(18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 Bore size NA S TA TB ZZ Bore size TC TD TE TF TG 20 24 69 (77) 11 11 106 (114) 25 29 69 (77) 11 11 111 (119) 32 35.5 71 (79) 11 10 (11) 113 (121) 40 44 78 (87) 12 10 (12) 130 (139) 50 55 90 (102) 13 12 (13) 150 (162) 63 69 90 (102) 13 12 (13) 150 (162) 80 86 108 (122) 182 (196

M-E05-1-LQ1

4 4-11 LQ1-4N11 LQ1-4B11 4-13 LQ1-4N13 LQ1-4B13 4-13 LQ1-4N13 LQ1-4B13 LQ1T4A-R6 4 3-07 LQ1-3N07 LQ1-3B07 5-13 LQ1-5N13 LQ1-5B13 5-13 LQ1-5N13 LQ1-5B13 LQ1T4A-R7 4 4-11 LQ1-4N11 LQ1-4B11 4-11 LQ1-4N11 LQ1-4B11 4-13 LQ1-4N13 LQ1-4B13 LQ1T4A-R8 4 3-07 LQ1-3N07 LQ1-3B07 3-07 LQ1-3N07 LQ1-3B07 5-13 LQ1-5N13 LQ1-5B13 LQ1T4A-R10 4 2-07 LQ1-2N07 LQ1-2B07 4-13 LQ1-4N13 LQ1-4B13 2-07 LQ1-2N07 LQ1-

CL

#2 (#2+#11) , #3 (#1+#3+#11) , #4 (#1+#4+#11) , #5 (#1+#5+#11) , #6 (#6+#11+#13) , #7 (#7+#11+#13) , #8 (#1+#8+#11) , #9 , #10 Rubber bumper basic style Air cushion basic style Axial direction foot style Front flange style Rear flange stye Front trunnion style Rear trunnion style Clevis style Accessory Rod boot Bore size Bore size Bore size Bore size Bore size Bore size Bore size Bore size

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

AC Servo Motor Driver

11 13.

Air Cylinder Series MB

11 11 13 13 13 14 14 15 9 9 10 11 11 11 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BAL 5.5 5.5 7 7.5 6.5 5.5 D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 DD-G39/K39 D-P4DWL 9 9 10 11 11 11 -X 4 4 4 4.5 4 4.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Gasket Round head combination screw 7 8 Rc (PT) SY5000-11-14 SY7000-11-13 SY3000-11-25 SY9000-11-2 SY9000-18-2 (M3 x 42) NBR For mounting valves (Flat nickel plated) G (PF) NPTF N NPT M3 x 26 M4 x 31 SY3000-23-4 (M2 x 21) T F 1.2-31 Base Mounted Type How to Order Pilot Valve Assemblies How to Order Connector Assemblies Q 5 G SY114 30 4A SY100 DC: 30 A SY100 Without lead wire: Indicator light

Combination Cylinder

11 14 17 17 30 24 26 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M30 X 1.5 M30 X 1.5 M36 X 1.5 27 30 31 37 40 35 35 39 84 90 98 116 126 98 98 106 60 70 86 102 116 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 22 19 22 8 0 0 0 0 3.1-58 Lock-up

CQ2

11 13.5 17.5 21.0 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5 20.5 24 B 16.5 22 24.5 23.5 32 34.5 A 11 15 13 15.5 19.5 23 B 15.5 21 23.5 22.5 31 33.5 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 9 12 12 12 13.5 17.5 15.5 18 22 25.5 B 14.5 15 17.5

LEC-OM02704CN

LEC-MR-J3BAT 19X(10)Y(11)Z(12) 200410SERIAL 4X 13 13 13 13.4 UVW 600VEP(2PNCT) 8 UL/C-UL(CSA)UL60 30m (1) U L 1 U L 2 V V L 3 ( ) W W L 11 L 1 2 B1 B 2 N C C P (2) CN1 CC-Link ((3)) BU BV BW OHS1 OHS 2 .

Air Cylinder

26 8 20 0 0.033 13 10.5 8 41 5 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 8 10 32 32 52 36 25 22 19.5 17 32 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 9 10 40 40 60 40 32 22 19.5 17 32 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 9 10 40 40 60 40 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 10 11 53 53 77 44.5

Air Cylinder NCA1 Series

3 1/2 4.25 1/2 1 1/2 3 13/16 R ADD STROKE ET F G J K BORE E EB EE(NPT) EL EO ES LB P SE 6.44 5 7/8 3 1/4 7 3/8 2 1/32 3/4 2 1 1/2 9/16 8 8 1/2 11/16 3/4 1 1/8 5/8 2 1/4 7.92 7 1/8 4 1/8 9 2 11/16 3/4 2 1/4 2 11/16 10 10 5/8 13/16 1 1 5/16 5/8 2 3/4 9.40 7 5/8 4 5/8 9 1/2 10.90 8 7/8 5 1/2 11 1/8 3 5/16 3/4 2 1/4 2 11/16 3 13/16 3/4 2 3/4 2 1/4 3/4 12 12 3/4 13/16 1 1 5/16 5/8 3 1/2 14 14

NCA1

3 1/2 4.25 1/2 1 1/2 3 13/16 R ADD STROKE ET F G J K BORE E EB EE(NPT) EL EO ES LB P SE 6.44 5 7/8 3 1/4 7 3/8 2 1/32 3/4 2 1 1/2 9/16 8 8 1/2 11/16 3/4 1 1/8 5/8 2 1/4 7.92 7 1/8 4 1/8 9 2 11/16 3/4 2 1/4 2 11/16 10 10 5/8 13/16 1 1 5/16 5/8 2 3/4 9.40 7 5/8 4 5/8 9 1/2 10.90 8 7/8 5 1/2 11 1/8 3 5/16 3/4 2 1/4 2 11/16 3 13/16 3/4 2 3/4 2 1/4 3/4 12 12 3/4 13/16 1 1 5/16 5/8 3 1/2 14 14

CM2

SCM220A, #11, #5 SCM220A, #11, #5, #19 CM2G25SCM225A, #11 SCM225A, #11, #5 SCM225A, #11, #5, #19 CM2G32SCM232A, #11 SCM232A, #11, #5 SCM232A, #11, #5, #19 CM2G40SCM240A, #11 SCM240A, #11, #5 SCM240A, #11, #5, #19 1.4-42 Series CM2 Single Clevis (C) CM2C Bore size Stroke S T (mm) N P Bore U E CD I RR A NA CI K AL NN CX L B1 D MM F G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 13

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

11 13.

Table of Contents

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

0.4

F kit P. 25 P kit P. 27 T kit P. 29 L kit P. 31 M kit P. 33 Station 6 SOL.B Double check block VVQ1000-FPG-SOL.A 8 21 Station 7 SOL.B 9 10 22 SOL.A 23 24 11 Station 8 SOL.B 12 25 13 COM. 13 to CYL port Connector terminal no.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13