Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 162, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø12, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø10, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -66, Air Consumption Flow Rate(l/min): 196, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø12, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø10, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 196, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø12, Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: Ø10, Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6, Operating Temperature

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: S (-89 kPa), SUP: 10 (One-touch Fitting ø10), VAC: 12 (One-touch Fitting ø12)

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: L (-48 kPa), SUP: 10 (One-touch Fitting ø10), VAC: 12 (One-touch Fitting ø12)

Nozzle Diameter: 18 (ø1.8mm), Vacuum Pressure: S (-89 kPa), SUP: 10 (One-touch Fitting ø10), VAC: 12 (One-touch Fitting ø12)

Size: 1, Thread: M Thread, Rc(PT), Port Size: 1, Accessory: None, Attachment: w/o Attachment, Option 1: 0.2MPa + Metal Bowl, Option 2: -, Option 3: -

Specification: Clean Series, Relief Type w/Specially Treated Sliding Parts, Bearing Type: Ball Bushing Bearing, Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Specification: Clean Series, Relief Type w/Specially Treated Sliding Parts, Bearing Type: Ball Bushing Bearing, Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber bumper at both ends, Specification: Clean series (relief type sliding

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Type: [Fitting] Pipe/Plug, Fitting Type: Other shapes, Body Material: [PBT Resin] PBT, Application: Clean environment, Shape: [Others] Sputtering Cover, Compatible Fluid: Water / Air, Applicable Fitting Size (mm): 12, Release button color: White

Type: [Fitting] One-Touch / Pipe, Fitting Type: Socket and reducer, Tube Size 1(φ): 8, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Stem Shape: [Others] Others, Compatible Fluid: Water / Air, Applicable Fitting Size (mm): 12, Number of Connection Tubes(piece): 1, Color: White, Specification:

Type: [Fitting] One-Touch Coupling, Fitting Type: Union with different diameters, Tube Size 1(φ): 10, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Tube Reducing Union Shape: [Unequal Dia.

Type: [Fitting] One-Touch Coupling, Fitting Type: Union with different diameters, Tube Size 1(φ): 10, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Packing, Material of O-Ring: [NBR] Standard (NBR), Tube to Tube Reducing Union Shape: [Unequal Dia. Union Y] Unequal Dia.

Specification: 12 (Clean Series, Relief Type (w/Specially Treated Sliding Parts), Bearing: L (Ball Bushing Bearing), Bore Size: 6mm, Stroke: 10mm

Specification: 12 (Clean Series, Relief Type (w/Specially Treated Sliding Parts), Bearing: L (Ball Bushing Bearing), Bore Size: 10mm, Stroke: 10mm

Specification: 12 (Clean Series, Relief Type w/Specially Treated Sliding Parts), Bearing Type: L (Ball Bushing Bearing), Bore Size: 15mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm

Specification: 12 (Clean Series, Relief Type w/Specially Treated Sliding Parts), Bearing Type: L (Ball Bushing Bearing), Bore Size: 6mm, Port Type: M5x0.8: 6-20mm Bore; Rc: 25-32mm Bore, Stroke: 10mm