Magnet: D (Built-in), Mounting: A [Double End Tapped [ø32 - ø50]], Bore Size: Ø63 mm, Port Thread: TN [NPT (ø32-ø100)], Stroke: 25 mm, Auto Switch: M9NA--Solid State, Water Resist., 3 Wire NPN, Horizontal

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Bore Size: Ø63 mm, Port Thread: TN [NPT (ø32-ø100)], Stroke: 25 mm, Auto Switch: M9NA--Solid State, Water Resist., 3 Wire NPN, Horizontal

Valve Type: Double Acting, O-ring Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen.

Valve Type: Double Acting, Bellows Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen.

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Valve Type: Angle Type, Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.

Valve Type: In-line Type, Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.

Valve Type: Angle Type, 2 Stage Control, Single Acting, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen.

tapped, Port thread type: NPT, Auto Switches: M9NA, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

(standard), Port thread type: NPT, Auto Switches: M9NA, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

tapped, Port thread type: NPT, Auto Switches: M9NA, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

(standard), Port thread type: NPT, Auto Switches: M9NA, Lead Wire Length(m): 0.5, The number of the switches: 2, Type of Auto Switch Mounting: Standard, Custom-made Specifications: None, Connector Type: -

Part Number Description: HIGH VACUUM VALVE   Product Line: Z   Product Line Description: VACUUM SERIES   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

15

LEF LEJ Component Parts LEL Quantity Size 25, 32 63 1 Motor flange 1 1 No.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Different surfaces) 25 20 1 pc. 25 20 2 pcs. (Same surface) 70 75 D-Y7BAL 2 pcs.

Rotary Actuator

Applicable shaft types: S, W CRB1 Y2 = X = X = Y = X = MSU CRJ CRA1 CRA1 CRQ2 Y = Y1 = Y1 = Y2 = [mm] [mm] MSQ [mm] Size Y1 Y2 W Y 30 3 to 8 15 to 25 50 1 to 20 18.5 to 36 63 1 to 22 21 to 41 80 1 to 25 25 to 50 100 1 to 30 32.5 to 60 Size X Y1 Y2 W Y W Y 30 15 to 25 3 to 8 15 to 25 50 18.5 to 36 1 to 20 18.5 to 36 63 21 to 41 1 to 22 21 to 41 80 25 to 50 1 to 25 25 to 50 100 32.5 to 60 1

Plate Cylinder

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Size 25 32 40 50 63 Part no.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

88 100 113 138 163 188 213 238 263 288 313 50 51 64 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 51 64 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80 56 68 30 12.5 25 37.5 50 75 100 125 150 175 200 225 250 103 116 128 141 166 191 216 241 266 291 316 341 100 56 76 32 12.5 25 37.5 50

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Rod end configuration Bore size (mm) Round bar type, Chamfered type, Roller type, Lever type with shock absorber 40 Symbol Specifications 20, 25, 30 -XA 50 Change of rod end shape 20, 25, 30 -XC3 Special port position Mass (kg) Bore size (mm) Rod end configuration Cylinder stroke (mm) Action 30 25 20 Round bar type, Chamfered type, Roller type Lever type with built-in shock absorber Round

Environment

201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move when it returns to origin.