This is a legacy product. Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 4.0418 lb

Model: 42 (Dual AC Type), Bar Length: 64 (640mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 5L (ø3/16" Elbow)

HRX-OM-X027

To be arranged by the user. 6.3 Option L [Large capacity tank] 6.3.1 Option L [Large capacity tank] Large capacity tank provide you extra space volume for fluid collection of approximately 5L above high level.

HRX-OM-X071

(Adjust the bypass valve) AL14 Circulating fluid temperature increase OFF3 AL14 TEMPOUT.HI AL15 Circulating fluid temperature decrease OFF3 AL15 TEMPOUT.LO Displayed flow rate: 5L/min or less(For 400V type options Z and Z1:Less than 7L/min), piping is thin, external valve is closed, pinching or blockage of the piping or clogging of the filter.

HEC_W-E

25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 10 L/min Approx.2200W(water), 1500W(Fluorinert FC-77) Heating capacity Conditions: set temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 10 L/min Recirculating fluid : Water, Fluorine solvent(GALDEN HT-135 Fluorinert FC-77, FC-3283) Recirculating fluid Reservoir capacity : Approx.5L

IP80-OM00019

./ 80L/min(ANR)(SUP=0.14MPa) *3 200L/min(ANR)(SUP=0.4MPa) 5L/min(ANR)(SUP=0.14MPa) *3 11L/min(ANR)(SUP=0.4MPa) 2080() 2060( ExdBT5) ExdBT5(TC15916) A A Rc1/4 1/4NPT G1/4 Rc1/8 A G1/2M20X1.51/2NPT G1/2 2.6kg 2.4kg JISF8007 IP65(IEC Pub.529) *11/21/2%F.S.

ELECTRO-PNEUMATIC POSITIONER

0.140.7MPa Standard stroke 10 85mm (External lever allow-able runout angle 10 to 30) 60 to 100*2 Sensitivity Within 0.1%FS Within 0.5%FS Linearity Within 1%FS Within 2%FS Hysteresis Within 0.75%FS Within 1%FS Repeatability Within 0.5%F.S Thermal coefficient Within 0.1%F.S/oC Output flow rate *3 80L/min (ANR) or more (SUP=0.14MPa) 200L/min(ANR) or more (SUP=0.4MPa) Air consumption *3 Within 5L

HRX-OM-R039

The tank level is within the specified range. 4.6 Adjustment of Circulating Fluid Flow adjustment If the flow rate is less than 5L/min it will not be able to achieve the specified cooling capacity.

Digital Pressure Switch

Mounting screw (M3x8L, 2 pcs) Front protective cover ZS-27-01 Lead wire with connector ZS-38-3L 3 cores for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L

MLGP

In order to hold the locked state, be sure to follow the steps below after confirming safety. 1) Remove the dust cover (1). 2) Supply air pressure of 0.2 MPa or more to the unlocking port (2) shown below and unlock. 3) Screw the attached hexagon socket head cap bolt (3) (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), into the lock ring to hold the unlocked condition. 2.

CLQ

1) Remove the dust cover. 2) Supply air pressure of 0.2MPa or more to the unlocking port, and set the lock ring to the perpendicular position. 3) Screw the unlocking bolt which is included (hexagon socket head cap screw/20, 25: M3 x 5l, 32: M3 x 10l) into the lock ring to hold the unlocked condition. Unlocking bolt Unlocking port Dust cover 2.

AC

8 Symbol 03 VBA4200-04 Rc(PT)1/2 Related Products Air operated style Model Description Notes VBA1110/1 VBA2100/2200 VBA4100/4200 VBA2200-03 P.4.6-1 AM250-02 AM450-04/06 AM550-06/10 Mist separator AMC310-03 AMC510-06 AMC610-10 35dB or more of noise reduction Exhaust cleaner VBAT20 (20l, Directly connected to booster regulator) VBAT38 (38l, Directly connected to booster regulator) VBAT05 (5l

IR1000/2000/3000

pressure: 1.0MPa) Exhaust port: 2l/min (ANR) or less (at maximum set pressure) Bleed port: 9.5l/min (ANR) or less (supply pressure: 1.0MPa) Exhaust port: 2l/min (ANR) or less (at maximum set pressure) 4l/min (ANR) or less (supply pressure: 1.0MPa) 3l/min (ANR) or less (supply pressure: 0.7MPa) 4l/min (ANR) or less (supply pressure: 1.0MPa) 3l/min (ANR) or less (supply pressure: 0.7MPa) Note 4) 5l

MLGP

In order to hold the locked condition, be sure to follow the procedures below after confirming safety. 1) Remove the dust cover . 2) Supply air pressure of 0.2MPa or more to the unlocking port shown below and unlock. 3) Screw in the hexagon socket head cap bolt (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), included, into the lock ring and hold the unlocked condition. 2.

MLGP

In order to hold the locked condition, be sure to follow the procedures below after confirming safety. 1) Remove the dust cover . 2) Supply air pressure of 0.2MPa or more to the unlocking port shown below and unlock. 3) Screw in the hexagon socket head cap bolt (20, 25: M3 x 0.5 x 5l, 32: M3 x 0.5 x 10l), included, into the lock ring and hold the unlocked condition. 2.

3 Port Solenoid Valve Series VQ100 1

VQ110-5L 4 set Valve part no. (1st to 4th stations) VVQ100-10A-2 1 set Blanking plate part no. (5th stations) Applicable solenoid valve (Plug lead type) VQ10-L VQ10-M VQ10-G 1 VQ100 Series Prefix the asterisk to the part nos. of the solenoid valve, etc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP How to Order Valve Manifold Assembly (Example) VG U side D side 1 3 Stations 2 VP S070 VQZ215-5L 4 sets VQ VV3QZ25-05C6C 1 set (C kit 5 stations manifold base) VVQZ200-10A-51 set (Blanking plate assembly) VQZ215-5L4 sets (N.C. type part no.)

Table of Contents

Example) VQ1130-5L-C6-A A port, Plug 2-4-24 25 Body Ported Series VQ1000 Plug-in Unit: Flip Type Double check block (Separated type) VQ1000-FPGIt is used on the outlet side piping to keep the cylinder in the intermediate position for a long time.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

U side D side Stations 1 2 3 4 5 VQD1151-5L Port size (Body ported only) M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 2-8-8 9 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Manifold Option Blanking plate assembly/Body ported VVQD1000-10A-2 VQC Blanking plate assembly includes 2 screws and gasket SQ VQ0 VQ4 Blanking plate assembly/Base mounted VVQD1000-10A-5 VQ5 Courtesy

F

C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L