Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector)

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector)

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, Air-Operated with Solenoid Valve, XL, HIGH VACUUM VALVE, 0.49000 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, Air-Operated with Solenoid Valve, XL, HIGH VACUUM VALVE, 1.14000 lb

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -, Non-standard Indicator: -, Body Surface

Valve Type: Normally Closed, Bellows Seal, Flange Size: 80, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -,

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -, Non-standard Indicator: -, Body Surface

Valve Type: Normally Closed, Bellows Seal, Flange Size: 80, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -,

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -,

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -,

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

U side D side Stations 1 2 3 4 5 VQD1151-5L Port size (Body ported only) M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 2-8-8 9 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Manifold Option Blanking plate assembly/Body ported VVQD1000-10A-2 VQC Blanking plate assembly includes 2 screws and gasket SQ VQ0 VQ4 Blanking plate assembly/Base mounted VVQD1000-10A-5 VQ5 Courtesy

AC

01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Table of Contents

For details, refer to page 2-4-68. Note 2) See page 2-4-69 for details.

HRX-OM-X027

and Fig. 5.2-2 Key operation (2/2) show the operation of keys of the thermo-chiller.

HRX-OM-X071

Fig 2-2 Part number of product(2/2) 2.1 Model Number of Product HRR Series 2-2 HRX-OM-X071 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts 2.2.1 HRR050-A-20/40(Air cooled type) In the case of option Z, without bypass valve Fig 2-3 Names of the parts Table 2-1 Accessory list 2 copies Operation manual (English 1 copy/ Japanese 1 copy) Power supply connector 1 pc.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

For details, refer to page 2-4-92.

Series VQ Metal Seal/Rubber Seal Body Ported

Coil voltage VQ0 VQ1000 VQ2000 1 2 3 4 5 2 position single 1 3 5 6 100V AC (50/60Hz) Note 2) 2 position double (latching) 110V AC (50/60Hz) 24V DC 12V DC (1) (2) 3 position closed center (1) (2) 3 position exhaust center Electrical entry (2) 3 position pressure center LO MO L plug connector without connector Note 1) Two stations required. Note 2) L plug connector is used for AC.

HEC_W-E

TABLE 2-1 DIVISION OF DANGER, WARNING, CAUTION, AND NOTE -2-2 TABLE 2-2 MEANING OF A SYMBOLS -2-2 TABLE 2-3 SAFETY INTERLOCK LIST(PART 1) -2-6 TABLE 2-4 SAFETY INTERLOCK LIST(PART 2) -2-6 TABLE 3-1 QUALITY STANDARD FOR WATER(TAP WATER) -3-4 TABLE 5-1 FUNCTION OF COMPONENTS -5-3 TABLE 6-1 SPECIFICATIONS OF HEC006 -6-1 TABLE 6-2 SPECIFICATIONS OF HEC012 -6-2 TABLE 8-1 AVAILABLE MODE IN LEVEL

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.