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, 3m or 5m lengths Port location is available as shown (perpendicular) or axial rr Non-rotating piston rod optional ) ,.u : Available with urethane bumper or {& air cushion.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Q = D __ 4 6 _ 1000 Q = (D d) __ 4 6 _ 1000 Formula (1) .

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q Q Q 25 Q Q Series VQZ Base Mounted Type Construction VQZ100 Poppet type N.C.

NCQ2/CQ2

L F K M E J L Q Q A + Stroke B + Stroke A + Stroke B + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

Made to Order

CA2 series GB Stroke A Stroke B (mm) Q S ZZ GB Bore size 40 50 63 80 100 29 53 167 269 ZZ + Stroke (A + B) S + Stroke (A + B) Q 33 59 179 295 33 61 195 311 41 73 231 373 41 79 251 395 L CBA2 series B port D port C port A port (mm) L Q S ZZ GC Bore size (mm) 40 50 63 80 100 42 12 66 180 282 Q GC Stroke B Stroke A 48 14 74 194 310 48 14 76 210 326 S + Stroke (A + B) 58 16 90 248 390 ZZ + Stroke

Air Cylinder Series CM2

Auto switch model Bore size (mm) 25 20 32 40 D-A9 D-M9 D-M9W q BM2-020 (1) w BJ3-1 q BM2-025 (1) w BJ3-1 q BM2-032 (1) w BJ3-1 q BM2-040 (1) w BJ3-1 D-C7/C80 D-C73C/C80C D-H7 D-H7W D-H7BAL D-H7NF BM2-025 BM2-020 BM2-032 BM2-040 D-B5/B64 D-B59W D-G5NTL D-G5NBL BA2-025 BA2-020 BA2-032 BA2-040 D-A3A/A44A D-G39A/K39A BM3-025 BM3-020 BM3-032 BM3-040 Note 1) Two kinds of auto switch mounting brackets

CU

L A93L 5m .

MGP

6e q u !4 w !7 !3 @0 !1 y !5 Component Parts Description Material Note Component Parts Description Material Note No. q w e r t y u i o !0 for piston rod for guide rod No. !1 !2 !3 !4 !5 !6 !7* !8* !

Air Fittings & Tubing

(mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.

Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min) max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

VQ5000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Metal Seal/Rubber Seal Series VQ Body Ported

Note q No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

V

Use this box for induction load, 5m or more lead wire length and 100V AC. Interface plate for ZSM Ejector P31806-01 (blank) P31806-02 (use with switch) CD-P11 Contact protection box 0 NZM Ejector Mounting 1 1 8 PT T1 1/8 NPTF S W I T C H T Y P E 15L Solid state (NPN) 21L Contact reed CONTACT PROTECTION BOX/INTERNAL CIRCUIT Courtesy of Steven Engineering, Inc. !

CM2

Construction Construction 1.4-8 Series CM2 Construction Component Parts Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Stainless steel Aluminum alloy Carbon steel Material Note Note White anodized No. q e r t y u i o !0 !1 No. !2 !3 !4 !5 !6 !

Free Mount Cylinder Series CU

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

A

Flow rate ln/min* 100 550 550 2000 2000 4000 4000 Max Supply Pressure 1.5MPa / 220PSI 1.5MPa / 220PSI Max Operating Pressure 1MPa 1MPa Pressure Regulating Range 0.05~0.7MPa 0.05 ~0.85MPa / 8~125PSI Port Size for Pressure Gauge 116 18 N/A 18 N/A 14 N/A Ambient and Media Temperature 5 ~ 60C / 40~140F 5 ~ 60C / 40~140F Filtration Standard: 5m Standard: 5m 45 Bowl Capacity cm3 4 15 15 20 45 20