VFRA3000

Cv 1.9 2.2 1.9 2.2 1.6 1.7 2.0 (0.96) 2.4 (0.96) 1.5 1.7 VFRA3111-02 VFRA3111-03 VFRA3211-02 VFRA3211-03 VFRA3311-02 VFRA3311-03 VFRA3411-02 VFRA3411-03 VFRA3511-02 VFRA3511-03 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 0.38 0.39 0.41 0.36 0.40 0.39 0.42 0.42 0.33 (0.48) 0.34 (0.47) 1.9 2.2 1.9 2.0 1.8 1.9 1.7 1.8 1.9 (0.69) 2.2 (0.69) 0.61 Single 1/8 2 position 0.71 Double 1/8 Body ported Closed

Standard Combinations

1/4, 3/8, 1/2 AF + ARG ACG20B ARG20 AF20 1/8, 1/4 ACG30B ARG30 AF30 1/4, 3/8 ACG40B ARG40 AF40 1/4, 3/8, 1/2 AF + AFM + ARG ACG20C ARG20 AF20 AFM20 1/8, 1/4 ACG30C ARG30 AF30 AFM30 1/4, 3/8 ACG40C ARG40 AF40 AFM40 1/4, 3/8, 1/2 AWG + AFM ACG20D AWG20 AFM20 1/8, 1/4 ACG30D AWG30 AFM30 1/4, 3/8 ACG40D AWG40 AFM40 1/4, 3/8, 1/2 INDEX Air Combination Regulator with Built-in Pressure Gauge

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

/N.C. 4 position dual 3 port valve: N.C./N.C. 4(A) 2(B) 4(A) 2(B) A 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.O./N.O. 4 position dual 3 port valve: N.O./N.O. 2(B) 4(A) 2(B) 4(A) B 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.C./N.O. 4 position dual 3 port valve: N.C.

5 Port Air Operated Valve Series VFA3000 1

VFA5420-02-X1 5 Body ported VFA5120-03 2 3 8 3 VFA5420-03-X1 5 VFA5144-02 2 1 8 1 4 3 VFA5444-02-X1 5 Base mounted (1) VFA5144-03 2 3 8 3 VFA5444-03-X1 5 VFA5144-04 2 1 2 3 VFA5444-04-X1 5 Note 1) With sub-plate Note 2) { }: Normal position 5-3-15 8 Series VFA5000 Dimensions: Body Ported 2 position single: VFA5120-02 03 2 position double: VFA5220-02 03 (Pilot port) (Mounting hole for manifold

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

8 NPT 1/4 AS320-F02-SD G 3/8 AS320-02-SD Rc 3/8 19 22.5 R 1/4 24.3 9.8 30 54.8 21.9 1.2 49.3 123 AS320-N03-SD NPT 3/8 NPT 3/8 AS320-F03-SD G 3/8 AS320-03-SD Rc 3/8 19 22.5 R 3/8 24.3 9.8 30 52.6 19.7 1.2 47.4 128 AS420-N04-SD NPT 1/2 23.8 NPT 1/2 AS420-F04-SD G 1/2 AS420-04-SD Rc 1/2 24 27.5 R 1/2 28.5 12.4 38.5 62.9 25.8 1.2 55.8 222 Reference thread dimensions after installation. 599

Plug-in/Plug Lead: Single Unit

(R2) Circuit diagram Plug lead type Plug-in type Individual SUP spacer 03 04 03 04 VVQ5000-P-1(Plug-in type) VVQ5000-P-5(Plug lead type) 179 (Plug-in type) 133 (Plug lead type) 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in

VEX1

(A) 2 (A) 1 (P) 3 (R) 2 (A) 2 (A) 3 (R) Model C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv C[dm3/(s.bar)] b Cv VEX312-01 VEX312-02 VEX332-02 VEX332-03 VEX332-04 VEX350-04 VEX322-01 VEX322-02 VEX342-02 VEX342-03 VEX342-04 1/8 1/4 1/4 3/8 1/2 1/2 1/8 1/4 1/4 3/8 1/2 2.4 3.5 4.1 8.7 9.8 24 3.3 4.1 8.1 12 13 0.19 0.35 0.36 0.29 0.37 0.32 0.34 0.28 0.34 0.26 0.20 0.59 0.89 1.1

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Additionally, when the barrier is selected, the barriers equivalent to the number of solenoids are included with the product. 52-SY9000 Electrical entry Port size (Base mounted type) Plug connector type Plug connector with cover type Cable type L LL TT Symbol Port size Applicable series Without sub-plate Nil 02 02 03 03 04 1/4 1/4 3/8 3/8 1/2 52-SY5000 Lead wire length 52-SY7000 3 6 10 15

Booster Regulator/Air Tank

215 62.8 62 8 Silencer (Option) OUT port Rc 1/2 22 32 130 EXH port Rc 1/2 3.2 96 4 x 12 150 116 (When silencer installed: 224) (When high-noise reduction silencer installed: 230) 10 Series VBA Dimensions VBA22A-03 300 28 39 Pressure gauge (Option) OUT side gauge port Rc 1/8 IN side gauge port Rc 1/8 IN port Rc 3/8 139 43 46 15 Silencer (Option) OUT port Rc 3/8 21 24 EXH port Rc 3/8 53 4 x

Fluoropolymer Piping Equipment

Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" LVN Size Size Symbol Symbol 1 2 3 4 5 6 03 04 06 08 10 12 19 25 03 07 11 13 19 25 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQHB LQHB 1 1/8" TL TIL 2 1/4" 3 3/8" TLM TILM 4 5 6 1/2" 3/4" 1" TD TID TH TIH Note) For details of the applicable tubing sizes, refer to page 945. Specifications Piping 1.

NCQ8

/8 3 5/8 3 7/8 4 1/8 4 5/8 5 1/8 5 5/8 6 1/8 1/4-20UNC-2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 3/8 3 5/8 3 7/8 4 1/8 4 3/8 4 7/8 5 3/8 5 7/8 6 3/8 2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 3/8 3 7/8 3 7/8 4 1/8 4 3/8 4 7/8 5 3/8 5 7/8 6 3/8 3 3 1/8 3 1/4 3 3/8 3 1/2 3 5/8 3 3/4 4 4 1/4 4 1/2 4 3/4 5 1/4 5 3/4 6 1/4 6 3/4 1/4-20UNC-2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 3/8 3 7/8 3 7/8 4 1/8 4 3/8 4 7/8 5 3/

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

VQ7-6/7-8

30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 26 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

VQ7-6/7-8

38(53) 50(63) 32(42) 5 3 1 23(30) 38(53) 32(42) 1 23(30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

3 Port Solenoid Valve/

3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X 6 VP500/700-X536 Dimensions Residual Pressure Release Valve (-X536) VP542(R)-5 D YZ1-03 -X536 VP542(R)-5 D YZ1-03 -M -X536 3/8" [2(A) port] Port size: 1/8" (Without check valve) Applicable tube O.D.: 6, 1/4" (With check valve) (External pilot port) 31 2 x 4.2 (For mounting) Safety limit switch Made by OMRON 3.5 7

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

Free flow Controlled flow Model Applicable cylinder bore size (mm) Effective area (mm2) Weight (g) Port size Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 90 1/8 1/4 1/4 3/8 1/4 3/8 1/2 340 5.2 250 3.8 20, 25, 32, 40 115 32, 40, 50, 63 810 12.3 810 12.3 130 40, 50, 63 80, 100 1670 25.5 1670

Modular Type Regulators Series AR

Ambient and fluid temperature (C) 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25 AR40 AR40-06 AR50 1/4, 3/8 AR30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AR60 Model AR20 AR40 AR40-06 AR50 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AR60 Port size 1 Port size 1 30 AR X430 03 BG 30 AR X425 03 BG For high/low temperature Option/Semi-standard: Select one each

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

69 22 32.8 44.3 20.9 15.2 12 5/16" 48.8 43.8 42.8 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12