Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

or less] *1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Sealmaterial Symbol Seal material Compound no.

3-Position Rotary Table

Each operational contents Figure 3 Pressure port and active speed controller Table 1 Operating Pressure port Speed controller A, C B, D C port B port D port A port Clockwise-1 C Clockwise-2 1 l o ec Co s k Counterclockwise-1 w wi is 2 k un ec eo 2 Counterclockwise-2 l C te is rc kw lo oc ck cl wi er se nt -1 u o C 294 3-Position Rotary Table MSZ Series Angle Adjustment 1) Stop positions

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

XLA XL XLQ XLQ y Body surface treatment/Seal material and its changed part Bodysurfacetreatment Part numbers indicating changed seal material and leakage XM XY Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Symbol Nil A Note 2) Leakage Pam3/s or less Note 1) Changed part None w, e w e Symbol External 1.3 x 10-10 (FKM

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

-M9NL Du Seal material and its changed part XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM)

Size: 25, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 250mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: S (Straight Type

Size: 32, Bearing Type: L (Ball Bushing Bearing), Motor Mounting Position: D (In-line), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 250mm, Motor Option: W (w/Lock/Motor Cover), Guide Option: w/o Option, Actuator Cable Type, Length: R3 (3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: S (Straight Type

Indicator, Rear Flange Surface), Temperature: H0 (5 to 150°C, No Heater), Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: R3 [CHEMRAZ® (SSE38)], Seal Replacement

Motor Mounting Position: D (In-line Motor Type), Lead: J (16mm), Stroke: 150mm, Motor Option: B (w/Lock), Body Option: S (Dust-protected), Mounting: H (w/Side Holder, 4 pcs.), Actuator Cable Type, Length: R3 (3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: T (T-branch Type Communication Plug Connector)

Indicator, Flange Side, Temperature: 5 to 150°C, with 100°C at 100VAC, 120°C at 200VAC Heater, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: External - Hard Anodized; Internal - Oxalic Acid Anodized, Seal Material: R3 [CHEMRAZ® (SSE38)]

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: R3 [CHEMRAZ® (SSE38)], Seal Replacement: Valve Seal, Exterior Seal;

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: R3 [CHEMRAZ® (SSE38)], Seal Replacement: Valve Seal, Exterior Seal;

Indicator, Rear Flange Surface, Temperature: 5 to 150°C, No Heater, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: R3 [CHEMRAZ® (SSE38)], Seal Replacement: Valve Seal

Rotary Gripper Series MRHQ

I Rotary Gripper Series MRHQ How to Order Length of lead wire 0.5m 3m 5m Nil L Z S F9N L Q D MRH 10 90 F9NV L Number of auto switches Rotary gripper 2 pcs. 1 pc. Nil S Gripper Type of auto switch for detecting rotation Nil Without auto switch Parallel type: 2 fingers Q Applicable auto switches Gripper bore Lead wire length (m) Load voltage Auto switch part No.

Body Size: 3 (3/8), Type: 201, Port Size: 03 (R3/8, Rc3/8), One-touch Fitting: F (w/One-touch Fitting), Valve Side Applicable Tubing O.D.: 10 (ø10), Sealant: S (w/Sealant)

(CC-Link Ver. 1. 10), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: S (Straight Type Communication Plug Connector)

: R3 (3m), Controller: CD1 (DeviceNetâ„¢), Mounting: 8 (DIN Rail), I/O Cable: w/o Cable, Communication Plug Connector: S (Straight Type Communication Plug Connector)

Motor Mounting Position: R (Basic Type), Lead: J (16mm), Stroke: 50mm, Motor Option: w/o Option, Body Option: S (Dust-protected), Mounting: w/o Side Holder, Actuator Cable Type, Length: R3 (3m), Controller: C61 [Parallel Input (PNP)], Mounting: 8 (DIN Rail), I/O Cable: 1 (I/O Cable, 1.5m)

Motor Mounting Position: R (Basic Type), Lead: J (16mm), Stroke: 150mm, Motor Option: w/o Option, Body Option: S (Dust-protected), Mounting: w/o Side Holder, Actuator Cable Type, Length: R3 (3m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

3m), Controller: CM1 (CC-Link Ver. 1. 10), Mounting: 7 (Screw Mounting), I/O Cable: w/o Cable, Communication Plug Connector: S (Straight Type Communication Plug Connector)