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External Pilot Solenoid Type (Conduit terminal) A B C D E F G H I J K L M N O Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154

Nozzle Type Ionizer

L-bracket IZN10-B1 Pivoting bracket IZN10-B2 Power supply cable length Symbol Type 01 1 m 20 20 m * Available in 1 m increments from 1 m to 20 m.

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

Digital Pressure Switch

Please refer to the "List of output modes" on page 33 for the relationship between the set values and operation. : Set OUT2 in the same way.

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model For AC10*-A For AC20*-B For AC25*-B For AC30*-B For AC40*-B For AC40*-06-B For AC50*-B For AC55*-B For AC60*-B Descriptio Round type Standard G27-10-R1 G36-10-01 G46-10-01 Note1) Pressure gauge G27-10-R1 G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

2/3 Port Valve for Various

$ ' $ # ' ,*# ./ 01 ( *# ./ 2 01 $ ./ 23 ##4 #1 /47 .81 < :# /4; .71 + + 47 ./1 + /4 ./31 /;3 /;> /3 /3 17-3-4 Series VX / VXZ22/23 VXH22 VXF21/22 VX31/32/33 . !"! !#! !"! !"! !"! 0 !#! 0"!#! !"! 0 !#! 0" #!

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

KP/KPQ/KPG

-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 8 10 14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5

3 Port Air Operated Valve

N.O. 20.5 NC 12 41.1 3R 1P 91 83 33 60 83 61.3 91 41.1 12 NO 3/8 1(P), 3(R) port 1/8 (Pitch) P = 33 12(PA) port 31 M5 x 0.8 (Breathing hole) L1 L2 7.5 (Station n) (Station 1) 1/8 12(PA) port 12 93.5 70 13.5 47.5 2A 2A 3/8 2(A) port (Pitch) P = 33 31 2 stations 95 80 128 113 161 146 194 179 227 212 260 245 293 278 326 311 359 344 392 377 425 410 458 443 491 476 524 509 557 542 590 575 623

Series KP/KPQ/KPG

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10

Series KP/KPQ/KPG

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10

KP/KPQ/KPG

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

3 Port Air Operated Valve Series SYJA300

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C. Base mounted (with sub-plate) 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ712-5LZ-01 .2 pcs. (Valve) SYJ700-10-2A .1 pc. (Blank plate ass'y) VQZ SS3YJ7-42R-03-01 .1 pc. (Manifold base) SYJ714R-5G .2 pcs. (Valve) SYJ700-10-2A . .1 pc.