Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

3 Port Solenoid Valve/

-X538 34.4 75.2 118.7 262.7 AW40-04G-A Y400T-A E400-04-A VP744-5DZ1-04-X555 34.4 75.2 160.2 304.2 AW40-04G-A Y400T-A E400-04-A 17 VP500/700-X536, X538, X555 Specific Product Precautions Be sure to read this before handling.

0.4

D-G

2/3 Port Valve for Various

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Interface Regulator Specifications Caution SV1000 SV2000 SV3000 SV4000-SV4000 P, A, B 0.1 to 0.7 MPa 0.7 MPa Air Maximum at 50C 38.4 g (43.4 g) 32 g (37 g) 86.5 g 80.3 g 103.8 g 97.6 g 178.2 g 171.8 g Interface regulator Applicable model Regulating port Set pressure range Maximum operating pressure Fluid Ambient and fluid temp.

Fluoropolymer Piping Equipment

) L2 M3 M3 F F C side A side C side A side 1/4 H3 (E3) G 1 G 25 H3 L3 (L1) (L1) (L3) Class 2 to 5 Class 2 to 5 Type T3 Type T4 Class 6 Metric Size Model A side (Left) B side (Center) C side (Right) B E1 E2 E3 F G H1 H2 H3 L1 L2 L3 M1 M2 M3 Min. port size Applicable tubing O.D.

30

G thread Metric Rc thread G thread P. 7 P. 18 P. 3 P. 16 P. 13 P. 10 Inch Inch Straight Union KQB2H Union Y KQB2U Extended Male Elbow KQB2W Metric Inch P. 3 P. 10 Metric Inch P. 5 P. 12 Metric R thread G thread P. 7 P. 18 P. 13 Inch Male Elbow KQB2L Different Diameter Tee KQB2T Metric Inch P. 6 P. 12 Metric R thread G thread P. 4 P. 17 Female Connector KQB2F P. 11 Inch Metric Rc thread G

3

Without temperature sensor/Without flow adjustment valve 195 g 270 g 295 g 370 g 245 g 320 g 345 g 415 g 395 g 515 g 595 g 715 g 875 g With temperature sensor/Without flow adjustment valve 1060 g Weight Note 6) External scratch marks and Without temperature sensor/With flow adjustment valve dirt are judged as good parts provided that they do not affect product performance.

HRX-OM-R016

Model number: HRS030-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

HRX-OM-O021

Model number: HRS050-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

HRX-OM-R005

Model number: HRS060-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

HRX-OM-X027

Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Digital Flow Switches

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Digital Flow Switches, Series PF2A, Series PF2W

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

125

. * The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air

HRX-OM-W058

Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.