13

54.3 12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

VM

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Intrinsically Safe Valve

4/25/3 (A/BEA/EB) Valve model (P, EA, EB) 4, 2 (A, B) 1, 5, 3 4position dual 3 port Cv b C [dm3/ (sbar)] Cv b C [dm3/ (sbar)] N.C.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

Pilot Operated

: JIS B 8471, 8472, 8473 Cv 2.

One-touch Fittings

button dimensions b L M1 M2 Applicable tubing O.D.

High Purity Chemical Valve

LVC B A B A B A PB Double acting N.C. N.O. Double acting LVA With flow rate adjustment PA PA N.C. B A PB B A Double acting LVH N.C. Double acting With bypass PA PA N.C. LVD PB B A B A Double acting N.C. Double acting With flow rate adjustment & bypass LVQ PA PA N.C. PB B A B A Double acting N.C. Double acting LQ1 With indicator PA N.C. B A LVN N.C.

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

Compressed Air Preparation Filter

AMK Series RoHS Symbol AFF/AM/AMD AMK Modular Connection Example 1 2 How to Order AMK F 30 03 B D Option/Semi-standard: Select one each for a to d.

Secondary Batteries

Example) 90-AFM30-N03B-RZ Air Filters/Pressure Control Equipment Actuators Air Grippers AFD 30 90 03 B Series compatible with secondary batteries q r t w e 90 Material restriction q Symbol Description 30 40 Body size Nil N F Rc NPT G w Thread type + 02 03 04 06 1/4 3/8 1/2 3/4 Port size e + Nil B Note 1) a Without mounting option With bracket Option r Mounting + Nil R Flow direction b Flow

0.55

3/8, 1/2 2(A) port Standard/VPA744-1l 03 04 A B 40 16 64 24 3/8, 1/2 3(R) port 1/8 12(PA) port 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 12 3R NC 1P (1/8) 12(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-1l 3/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66

Modular Type Air Filters Series AF

20 30 40 Symbol Nil B* H* Symbol 02 03 04 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

Model: 32, Orifice: 2 (2.2mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: C (Conduit), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 32, Orifice: 2 (2.2mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 3 (110VAC 50/60HZ), Electrical Entry: C (Conduit), Surge Suppressor: Non, Rectifier: R (AC Class B Coil w/Full-wave Rectifier), Bracket: B (Bracket)

Model: 32, Orifice: 2 (2.2mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 03 (3/8), Thread: N (NPT), Voltage: 5 (24VDC), Electrical Entry: C (Conduit), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 32, Orifice: 2 (2.2mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Surge Suppressor: S (w/Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 32, Orifice: 2 (2.2mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: Rc, Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Surge Suppressor: S (w/Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 32, Orifice: 2 (2.2mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Terminal), Surge Suppressor: L (w/Light), Rectifier: R (AC Class B Coil w/Full-wave Rectifier), Bracket: B (Bracket)

Model: 32, Orifice: 2 (2.2mm), Style: 4 (COM, Single Unit), Option: C37, Seals: NBR, Class B, Suffix: Standard, Port Size: 02 (1/4), Thread: N (NPT), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Surge Suppressor: Non, Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)