Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 1 (Cylinder Port Side), Port Size: N11 (3/8 inch), Option: S (Direct EXH Outlet w/ Silencer)

Model: 2000 (VQC2000), Supply / Exhaust Port Entry: 1 (Cylinder Port Side), Port Size: N11 (3/8 inch), Option: R (External Pilot)

2

Connection thread Metric 2, 3.2, 4, 6, 8 M3 x 0.5, M5 x 0.8, M6 x 1.0 Metric 3.2, 4, 6, 8, 10, 12, 16 M5 x 0.8 R, Rc, G1/8, 1/4, 3/8, 1/2 10, 12, 16 R, Rc1/8, 1/4, 3/8, 1/2 Inch 1/8", 5/32", 1/4", 5/16" 3/8", 1/2" 10-32UNF NPT1/8, 1/4, 3/8, 1/2 1/8", 5/32", 3/16", 1/4" 10-32UNF 5/16", 3/8", 1/2" NPT1/16, 1/8, 1/4, 3/8, 1/2 Inch 1/8", 3/16", 1/4" 5/16", 3/8", 1/2" M5 x 0.8 R, Rc1/8, 1/4, 3

SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

Table of Contents

1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Table of Contents

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

8 1/4 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size A, B port 1/8 Flow characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 2.2 1.4 1.7 2.1 1.4 1.8 2.1 2.0 1.5 1.9

SYJ3000/5000/7000

Double solenoid, 3 position individual SUP/EXH spacer SY3000-37-4A Interface regulator for single solenoid SY3000-37-3A 1 3 2 4 For DC: SYJ5 5 LO Z Double solenoid, 3 position interface regulator SY3000-37-6A 3 port adaptor plate SY3000-37-3A SYJ5 1 LOZ 1 3 2 4 For AC: 100 VAC Single solenoid SY3000-37-46A Type of actuation Double solenoid, 3 position type SY3000-37-47A 1 2 3 4 5 Single solenoid

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Valve) DXT199-22-3A 1 pc. (Blanking plate assembly) DXT192-52-1-4A 3 pcs. (Connector assembly) DXT192-52-2-4A 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type 10-SS5YJ7-20 Body ported Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10-SYJ723

Table of Contents

2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)

Compact 5-Port Solenoid Valve

PROFINET 3A M12 connector (4-pin, Socket, D-coded): 2 pcs. 7/8 inch connector (5-pin, Plug): 1 pc. 7/8 inch connector (5-pin, Socket): 1 pc.

VFS

1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

VFR

1, Metal joint q, w Plug-in type VVF4000-2A-1 End plate (U side) assembly VVF4000-2A-2 !1 End plate (U) !1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

LEC-OM07605CN

SSCNET/H(70ms) 36.1 (1) SSCNET SSCNET SSCNET LECSS2-T (2) (2) SSCNET SSCNET (3) (3) SSCNET SSCNET SSCNET (4) (4) SSCNET (5) (5) (6) (6) (7) (7) (8) (8) 8 31 8. 37 37.1 (1) LECSS2-T (2) (2) LECSS2-T 37.2 (1) LECSS2-T 3A 3A.1 (1) LECSS2-T 3E 3E.1 (1) J3 (MR Configurator2) "MRJ4(W)-B LECSS2-T LECSS2-T SSCNET/H SSCNET /H LECSS2-T SSCNET (2) [Pr.

MY1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 Nil W Z A L H AZ LZ HZ Nil W A L H A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH AL, AH AL, LH AH, LH A, L, H, AS, LS, HS A, L, H AL, AH AL, LH AH, LH X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Example: SS3YJ5-20-03 .1 pc. (Manifold base) SYJ512-5LZ-M5 .2 pcs. (Valve) SYJ500-10-1A .1 pc. (Blank plate ass'y) VQ SS3YJ5-41R-03-C6 .1 pc. (Manifold base) SYJ514R-5G .2 pcs. (Valve) SYJ500-10-3A . 1 pc.