Aluminum High Vacuum Angle Valve AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),
(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) How to Order Unit for Replacement (1) Valve unit (2) Adsorption confirmation switch unit 15 C 0X B ZSP1 D K1 B V ZX1 5 Z B D S L Applicable nozzle diameter Vacuum pump for system Single (PD port is equipped with plug.)
ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !
ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !
ih* tlrb ldt vJ300-10-1A Type 42,42R,542 and S42R Applicable valves Type 42 & S42 NVJ314-O NVJ3140-O NVJ324-O NVJ3240-O Type S42 NVV3J3O42 Poollion qf A port ts | End cover side S I Solenoid side Typ 42R & S42R NVJ314R-O NVJ324R-O mli|ll!ih* phfi &Jt vJ300-10-1A Tyw 42R (External pilot lype) Station I o2T, staf,o"s lT, 20 I 20 stations A port siae Ts llcarr.romfMs) B3T lo"d !
10. 10-1. 2 2P5P6 16 XL-OMY0002
10-2 1 2 3 c b 1 S 2 O 4 M a S aa M 0.2MPa b S 0.3MPa c S 25,40,50,160 O 3 4 O O O O O
(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.
Flow Characteristics Port size 12 Flow characteristics Manifold 23 Port 1, 2, 3 C[dm3/(s bar)] C[dm3/(s bar)] b 0.13 0.10 0.26 0.16 b 0.26 0.16 0.13 0.10 Cv 0.007 0.016 0.012 0.020 Cv 0.012 0.020 0.007 0.016 V114 V114A V124 V124A 0.032 0.070 0.050 0.085 0.050 0.085 0.032 0.070 Type VV100-S41 M5 x 0.8 Note) Values when mounted on the manifold base (5 stations).
:DXT20O-3-1A aln case of the base mountd type, the outlet of the 3 port valve is the B port of the manifold bas6, | .Al j \ r ADplicable base NW5Z3-?
:DXT20O-3-1A aln case of the base mountd type, the outlet of the 3 port valve is the B port of the manifold bas6, | .Al j \ r ADplicable base NW5Z3-?
S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.
SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.
SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.
2 4(A) (B) (A) (B) (A) 2 4 2 4 B (EB)3 5(EA) 1 (P) VF3000 VF5000 = 2(B) (A)4 5 1 3 1 5 3 (EA) (P) (EB) (P) (EA) (EB) (EA)5 1 3(EB) ; B (P) 2-position double Symbol @ = : 2-position single > > : @; VF1000 4(A) (B)2 (A) (B) (B) (A) 4 2 2 4 5(EA) 1 (EB)3 (P) VF3000 VF5000 2(B) (A)4 5 1 3 3 1 5 = (EA) (P) (EB) (EB) (P) (EA) (EA)5 1 3(EB) ; (P) 3-position closed center/exhaust center/pressure
Material 63 80 100 160 Exterior seal (3) Standard AS568-043V AS568-045V AS568-050V AS568-167V Specific AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Valve seal (2) Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Specific AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** S Valve seal Standard XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Specific XLD63-2-9-1A ** XLD80
pressure supply port (PS) Filter block Spacer A Valve unit 84 2 x 4.2 (Mounting hole) Rc 1/8 PV port Air pressure supply port(PV) A 2 2 1.2 1 Adapter C Ejector Bracket A Bracket A Rc 1/8 Vacuum port (V) A: Release flow rate adjusting needle with lock nut ZR1 1-K1M-D10 13 15 7.2 1 For port exhaust 9 (Needle fully open) Exhaust (EXH.) port Rc 1/8 A A B B A A B B S S A A B B 73 Digital pressure
AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi
Y M B O L S H O W T O O R D E R L U B R I C AT O R S E R I E S NAL NAL800-N12 (1 14 NPT) NAL800-N14 (1 12 NPT) NAL900-N20 (2 NPT) T E C H N I C A L SPECIFICATIONS D I M E N S I O N S L U B R I C AT O R NAL800 NAL900 Max Supply pressure 1.5MPa / 220PSI Max Operating Pressure 1MPa / 145PSI Operating Temp Range 5~60C /40~140F Recommended lubricant Turbine oil #1 (ISO VG32) Bowl Polycarbonate
A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.