Digital Flow Switch (Integrated display type)

(0.01 s increment), 0.1 to 1.0 s (0.1 s increment), 1 to 10 s (1 s increment) Select from 20 s, 30 s, 40 s, 50 s, 60 s Hysteresis 8 Variable Protection Short circuit protection Output type Voltage output: 1 to 5 V (0 to 10 V can be selected, only when the power supply voltage is 24 VDC) 10, Analogue outpour 9 Current output 4 to 20 mA Impedance Voltage output Output impedance approx.1 k Current

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 For XLF/XLG Symbol Changed part*2 Leakage [Pam3/s or less]*1 Internal External Nil None 1.3 x 1010 (FKM) 1.3 x 1010 (FKM) A w, e, r 1.3 x 108 1.3 x 108 B w, e 1.3 x 108 1.3 x 1010 (FKM) C r 1.3 x 1010 (FKM) 1.3 x 108 D w 1.3 x 108 1.3 x

MHZ2/MHZJ2

N1 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

Parallel Style Air Gripper Series MHZ

-10 MHZ2-6 1 MHZ2-10 2 N2 2 N2 2 N2 2 N2 1 N1 1 N1 1 N1 MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHZ2-25 MHZ2-25 1 N1 MHZ2-32 2 MHZ2-32 1 MHZ2-40 2 MHZ2-40 1 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

High-Precision Digital Pressure Switch

1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.

Output block / Power block

Terminal block plate (VVQC1000-74A-2) which is shipped after March 2004 can be connected to EX126 for adding the Output block.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

ZSM1-115/121

Example: Analog output = 1 to 5 [V] F .S. = 5 [V] 1 [V] = 4 [V] 3 [% F .S.] = 4 x 0.03 = 0.12 [V] The output error induced by the temperature change can be as much as 120 [mV].

Model: 1000 (VQC1000), Wiring: D (Double Wiring), Port Size: C3 (For 3.2mm One-touch fitting)

Model: 1000 (VQC1000), Wiring: D (Double Wiring), Port Size: M5 (For M5 Thread)

Model: 1000 (VQC1000), Wiring: D (Double Wiring), Port Size: C4 (For 4mm One-touch fitting)

Model: 1000 (VQC1000), Wiring: D (Double Wiring), Port Size: C6 (For 6mm One-touch fitting)

Model: 1000 (VQC1000), Wiring: D (Double Wiring), Port Size: N3 (For 5/32 inch One-touch fitting)

Model: 1000 (VQC1000), Wiring: D (Double Wiring), Port Size: N7 (For 1/4 inch One-touch fitting)

Model: VQC1000, Wiring: Double Wiring, Port Size: For 3.2mm One-touch fitting, Check Valve Option: -

Model: VQC1000, Wiring: Double Wiring, Port Size: For M5 Thread, Check Valve Option: -

Model: VQC1000, Wiring: Double Wiring, Port Size: For 4mm One-touch fitting, Check Valve Option: -

Model: VQC1000, Wiring: Double Wiring, Port Size: For 6mm One-touch fitting, Check Valve Option: -

Model: VQC1000, Wiring: Double Wiring, Port Size: For 5/32 inch One-touch fitting, Check Valve Option: -