LEC-OM02904

P() 2 (2) C D 3 CN2 (3) L11 L21 CN3 CN3 DC24V (7) (5) DOCOM EM1 5 7 DOCOM DICOM (5) 4 5 (4) RA1 ALM 1.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Chapter 4 Rotary axis setting switch (SW1) SW1 Used to set the axis No. of servo amplifier. 8 driver. 7 9 Section 3.13 A 6 B 5 8 C 7 4 9 A 6 D 3 B 5 C E 4 2 D 3 F 1 E 2 F 1 0 0 SW1 ON 4F Test operation select switch (SW2-1) TEST SW2 Used to perform the test operation mode by using MR Configurator. SW2 1 2 MR Configurator2TM.

Step Motor Controller

Connector C Actuator side (Terminal no.) 1 2 5 6 (14) (18) 8 A1 B1 (13.5) (17.7) (17.7) Cable length (L) 1 3 5 8 A B C 1 2 A6 B6 1.5 m 3 m 5 m 8 m (30.7) Connector A 5 6 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 m (14.2) Connector C (Terminal no.) 1 2 5 6 15 m 5.5 6.3 Actuator side (14) (18) (Terminal

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Proposals for Energy Saving

8 @5 @3 w !6 !5 !1 !2 !0 Actuators !3 !

CV/MVGQ

2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

ZP

10 N A8 B5 E r Connection thread (Male thread) Width across flats G M5 x 0.8 e Vacuum inlet (Female thread) A8 M8 x 1 A10 M10 x 1 A14 M14 x 1 H H C B F 5 B5 M5 x 0.8 Mounting Bracket Assembly Thin Flat Type with Ribs Model A B C 2 D E F G H J K L Vacuum inlet direction q Pad dia.

ZP

2.5) a b c d e Y Model 13.5 5 1.8 14.5 5 1.8 G: M5 x 0.8 G: M6 x 1 G: M8 x 1.25 Model A B C D E Y F ZPY2004U 2 4 2.6 4.6 1.2 0.3 25 5 F 6 F U6 (Soft tube 6/4) U6 (Soft tube 6/4) 15.5 7 2.5 16.5 7 2.5 8 28 20 30 48 10 ZPY25D ZPY3507U 3.5 7 4.3 7.8 1.8 0.5 ZPY4010U 4 10 5 11 2 0.8 C Y A B Model ZPY10UT 10 11 1 ZPY13UT 13 14 1.5 ZPY16UT 16 17 2.5 ZPY10CT 10 11 0.8 ZPY13CT 13 14 1 ZPY16CT 16

LVQ

Size Symbol 2 2 2 3 3 4 4 5 5 6 6 A B C A B A B A B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" LVC LVA LVH LVD With reducer Basic size LVQ Note 1) Select a fitting the same

Free Mount Cylinder Series CU

. 5 5 10 2 pcs. 10 5 CUJ CU Mass/( ): Denotes the values with D-A93.

SMC Basic Pneumatics

C"=l C'=l C;l C,=l C;l C;l C"=t Flg. 7.28.1 In Series circuit, all devices having a C" of 1 and the resulting impact on the circuit,s ovsrall C, \i_ --+ C,-=t c,=1 .4 C,=1.4 C,=1.73 c"=1 .73 C"=1.73 C"=2 C"=2 C,=2 Q,=2 =.x><+<_= _><_><_# -..>---.> G".v"=1'0 C,*=1.0 C"-=1.0 c,=1 C,=3 c,=4 C-"=r C*"=0.9g C"*=o.06 C,"r.=0.84 C",l/|=0.89 C*=0.82 Flg. 7.28.2 Orifices in series connection and resulting

%silltr

C"=l C'=l C;l C,=l C;l C;l C"=t Flg. 7.28.1 In Series circuit, all devices having a C" of 1 and the resulting impact on the circuit,s ovsrall C, \i_ --+ C,-=t c,=1 .4 C,=1.4 C,=1.73 c"=1 .73 C"=1.73 C"=2 C"=2 C,=2 Q,=2 =.x><+<_= _><_><_# -..>---.> G".v"=1'0 C,*=1.0 C"-=1.0 c,=1 C,=3 c,=4 C-"=r C*"=0.9g C"*=o.06 C,"r.=0.84 C",l/|=0.89 C*=0.82 Flg. 7.28.2 Orifices in series connection and resulting

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

cable 6 to 12 D D K F G1/2 Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts C H C J E J E IN IN A A 2 x Port size 1(IN), 2(OUT) port B B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port

Magnetically Coupled Rodless Cylinder

5 !6@4 @6!0i q !4 !2 r @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 2a 3a @0 @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !

1.1

Rc 1/2 Stainless steel, Brass, PE, PVC, PPE, Copper brazing (Heat exchanger) Stainless steel, PE, PVC, Brass, Copper brazing (Heat exchanger) Wetted parts material 5 to 32 0.2 to 0.5 27/28 Rc 1/2 5 to 32 0.2 to 0.5 12/15 Rc 1/2 5 to 32 0.2 to 0.5 10/12 Rc 1/2 Temperature range (C) Pressure range (MPa) Required flow rate Note 8) (50/60 Hz) (l/min) Port size Wetted parts material Power supply

JXCx-OMT0002

5 5 DHCP mode Note 2) 2 5 6 Unused : : : 9 9 9 Note 1) The mode to set IP address by DHCP server.

Compact Cylinder Series CQS

Basic style (Through-hole/Both ends tapped common): CQSKW/CDQSKW 12 16 Auto switch Minimum lead wire bending radius 10 2 x 2 x OB counterbore H thread effective depth C F Q Width across flats K1 2 x M5 x 0.8 2 x 2 x OA effective depth RA Width across flats K2 I SMC T D M E SMC 2 x N through M E RB RB 5 Flat washer 2 pcs.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

(4) Mass (kg) Type of actuation Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Plug-in Non plug-in (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 2 position 3 position 2 position 3 position 4.73 (4.56) VFR610 VFR611 0.12 9.1 41 0.15 9.6 2 40 Single 3 4 100 or less Double Exhaust center 2 100 or less 4.78 (4.61) VFR620 VFR621 0.17 9.7 0.14 9.2 41 40 3 4 Double

CRB2/CRBU2/CRB1

Stopper ring Block (C) Stopper ring Block (D) Block (D) Block (C) Counterclockwise 2-2> Counterclockwise 2> The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation to end of rotation .