Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Vacuum Ejector Series ZM

40 40 60 30 30 Suction flow rate 40 20 20 20 10 10 0 0 0 0 45 40 35 25 15 30 20 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure (MPa) Flow rate l/min (ANR) 992 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-14 ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 ZSM1-015 ZSM1-021 Model Sensor type Switch Set pressure

Compact Manifold Regulator Series ARM5

ARM5B R 06 A Individual Supply Type 3. Options 1.

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

JIS Standard Hydraulic Cylinder

25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 CHN H 0.1 0.4 D +0.1 0 50 40 185 145 57 79 M48 x 1.5 76 40 M8 x 1.25 +0.07 0 25 16 76 60 25 32 M16 x 1.5 26 16 M5 x 0.8 CHM C +0.084 0 31.5 20 90 70 30 40 M20 x 1.5 31 20 M5

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.

Valve Single Unit

-C6 Applicable series Symbol Port size M5 x 0.8 12 12 stations SX3000 SX5000 M5 Note) For SS5X3: 4 to 12 stations. 01 1 8 SS5X3-41P-06-C6 1 set (Type 41P , 6-station manifold base part no.)

VEX1

cap screw (with spring washer) M5 x 0.8 x 10 (2 pcs.)

Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the SMC

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol JIS Symbol 15-9-67 Series ASD-FM How to Order ASD 3 3 0 F M 01 06 S With seal M5 and U10/32 types, as they are not available with seal. Body size 2 3 4 M5 standard 1/8 standard 1/4 standard Type Applicable tubing O.D.

REC

700 1/8 146 8 10 32 52 36 200 20 RZQ 25 40 34.5 M26 x 1.5 Up to 700 1/8 146 9 10 40 60 40 204 20 40 42.5 32 M26 x 1.5 Up to 1000 1/8 159 9 10 40 60 40 217 22 MI W S 40 53 51 M32 x 2 Up to 1000 1/4 181 10 11 53 77 44.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

CV/MVGQ

TX TY TZ QY S TD TT Bore size (mm) 20 25 32 40 52 36 116 62 8 10 32 32 14 120 10 40 40 60 40 14 62 9 40 60 40 122 9 10 40 16 64 44.5 154 53 53 77 16 88 10 11 10-15-24 25 Valve Mounted Cylinder Double Acting, Single Rod Series CVM5 Head Side Trunnion Style (T) Bore size Stroke CVM5T Manual override Width across flats B2 Width across flats B1 0.025 0.061 RE A B REC CX CY Width across flats

CV/MVGQ

TZ TY TX TT TD S QY Bore size (mm) 20 25 32 40 116 36 52 32 32 10 8 62 14 120 40 60 40 40 10 9 62 14 122 40 60 40 40 10 9 64 16 154 44.5 77 53 53 11 10 88 16 10-15-24 25 Valve Mounted Cylinder Double Acting, Single Rod Series CVM5 Head Side Trunnion Style (T) Bore size Stroke CVM5T Manual override Width across flats B2 Width across flats B1 0.025 0.061 RE A B REC CX CY Width across flats

Vacuum System Peripherals:

M5 x 0.8 x 5 M5 x 0.8 x 5 How to install cover assembly Remove machine screw M48 x 2 M48 x 2 ( ): Port size is R , , 13-14-12 12 Related Products: Air Line Equipment Air Filter, Regulator, Filter Regulator, Mist Separator Modular, Air filter Series AF Flow rate (l/min (ANR)) Bowl capacity (cm3) Filtration degree ( m) Port size Rc Model AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 150 1100 2600

LEC-OM07605CN

BAT6V1SET (38.5) 4 0.8 [kg] M5 3.24 [N m] CNP1 CNP2 CNP 3 L1 P+ U (40) 2-M5 6 C D V L2 (6) L3 W NP3 L11 L21 P4 1560.5 (168) PE M4 1.2 [N m] (6) 9 2 9

5

(mm) Female Rod End (mm) (mm) Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 Bore size S TD TT TX TY TZ Z ZZ 20 62 8 10 32 32 52 36 116 Bore size ZZ 20 103 25 8 20 M5 x 0.8 95 25 62 9 10 40 40 60 40 120 25 107 32 12 20 M6 x 1 97 32 64 9 10 40 40 60 40 122 32 109 40 13 21 M8 x 1.25 125 40 88 10 11 53 53 77 44.5 154 40 138 * When female thread is used, use a thin wrench when tightening the piston

Silencer Series AN

(1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (M3) AN120-M5 (

Stainless Steel 316 Fittings

Hexagon Socket Head Male Connector: KQG2S (M5) Applicable tube O.D.

Modular Type Lubricator Series AL

50 60 Thread type Metric thread (M5) Rc NPT G Nil N F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

0.4

C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 97 130 152 31 42 53 64 75 86 108 119 141 125 150 175 50 62.5 75 87.5 100 125 112.5 137.5 162.5 110.5