MGG

115 25 103 55 94 194 164 182 Rc 1/4 25 58 M10 x 1.5 depth 21 With rod side locking With head side locking For locking type For non-locking type Bore size (mm) Bore size (mm) Z X W Bore size (mm) HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 37 25.3 157 30 40 20 25 32 40 50 12 (14) 21 47.5 107 (115) 11 104 40 28.3 175 37 46 12 (14) 21 48 107 (115) 11 104 43 31.3 201 37 52 12 (14) 21 49

VM

Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 1.7 12 12 15 5 6 21 29.9 46 3 ZPR13UT 13 14 ZPR13 1.8 13 1.5 ZPR16UT 16 17 ZPR16 18 16 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Table of Contents

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

thread length (mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I K 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 5 15.5 25 to 300 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 5.5 19.5 25 to 400 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y

TABLE OF CONTENTS

21, 31 NPT 1/2 AN CONNECTOR MISCELLANEOUS OPTIONSsee page 76 All Models BODY OPTIONSsee page 80 SPLICE BOX HOUSING 3.52 3.22 (81.8) .34 (8.6) FINE METERING SILVER SHADING RING All Models 2.50 (63.5) (89.4) Model 21 All Models JIC HOUSING METERING TO ORIFICE ALUMINUM SHADING RING Model 21 Model 21 All Models YOKE MANUAL OVERRIDE BUILT IN MUFFLER All Models 21*, 71 All Models 1.88 (47.8) MOUNTING

Round Type Hydraulic Cylinder

30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-4A SYJ5000-21-3A Round head combination screw M2.5 x 7, Matt nickel plated (with spring washer) Round head combination screw M2.5 x 7, Matt nickel plated (with spring washer) Blanking plate SYJ5000-21-1 Blanking plate SYJ5000-21-1 Gasket DXT192-10-15 Gasket DXT192-10-15 Caution Mounting screw tightening torques Applicable manifold base Type SS5YJ5-20 Type SS5YJ5-40 Type SS5YJ5-41 Type SS5YJ5

CRB2/CRBU2/CRB1

depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 82 98 3 8 14 21 80 39 5 34 83 17 45 52 60 8 75 9 R30 CDRB1BW 63-E CDRB1BW 8030 32 M8 x 1.25 depth 12 17 0.006 0.017 30 0 0.052 1/4 R8 95 110 3 8 15 21 90 48 5 34 94 19 53.5 63 70 7.5 88 9 R30 CDRB1BW 80-E CDRB1BW 100M10 x 1.5 depth 13 25 0.007 0.020 45 0 0.062 1/4 R11 125 140 4 13 11.5 21 103 60 5 39 120 28 65 78 80 7.5 108 11 R30 CDRB1BW

Intrinsically Safe Valve

21 1.9 79.6 21 73 42 B B B B 11.1 31.5 6 x 1/4" {P(1), EA(5), EB(3) port} 55.2 M5 x 0.8 (External pilot port) 21 (Pitch) P = 19 Stations 1 n 2 81.5 56.2 52.8 A A 9.4 41 28.9 B B 7 2n x 1/4" {A(4), B(2) port} (Pitch) P = 19 24 L-type plug connector with cover (LL) 53-SS5Y7-42Terminal type (TT) 53-SS5Y7-42L (Lead wire length) 120.5 37.1 L (Lead wire length) 81.5 Stations Stations 81.5 53.5

Compact Cylinder with Air Cushion

x 1.5 M14 x 1.5 22 22 42 14 30 12 14 16 30 12 14 36 41.6 Y-G04 10 18 32, 40 42 0.3 0.5 +0.5 +0.3 +0.070 0 14 IY-G05 22 50, 63 I-G05 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 Y-G05 14 22 50, 63 56 0.3 0.5 +0.5 +0.3 18 IY-G08 28 80 I-G08 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 +0.070 0 Y-G08 18 28 80 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 22 IY-G10 32

CHKD/CHKG

18 78 45 172 41 38 36 M30 x 3.5 14 15 63 35 144 26 depth 17.5 179 22 96 56 208 50 43 45 M39 x 4 21 17 76 40 174 Note 1) Body dimensions are the same with or without auto switches.

Stability of suction position,

Pad diameter 32 to 50 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T32UMl-A10 ZP3E-T40UMl-A10 ZP3E-T50UMl-A10 6 M10 x 1 40 Seal washer Seal washer M10 x 1 31 31 6 Seal washer 6 M10 x 1 Width across flats 6 Width across flats 6 21.5 4.9 21 4.9 21 4.9 Width across flats 6 14.5 14.5 15 3 2 2.5 35 32 43 40 53 50 Weights [g] Weights [g] Weights [g] Pad material

RQ

IY-G04 18 M14 x 1.5 M14 x 1.5 22 22 42 14 30 12 14 16 30 12 14 36 41.6 10 18 42 0.3 0.5 +0.5 +0.3 +0.070 0 50, 63 I-G05 Y-G05 50, 63 14 IY-G05 22 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 14 22 56 0.3 0.5 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 IY-G08 28 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10

JA/JAH/JB/JS

23 25 29 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust cover Order with the following part no. if dust cover is damaged.

JA/JAH/JB/JS

23 25 29 5.5 7 8 10 13 13 17 17 17 19 19 19 22 24 24 27 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust cover Order with the following part no. if dust cover is damaged.

ASR

31 57.7 10 155 178 17 36.5 65.6 6 158 181 18.5 37.5 66.6 8 18.5 23.4 48.5 24.3 20.4 53.5 R1/4 21 24.8 92.2 72 55.8 50.8 25.6 49.8 44.8 19 149 172 21 32.6 61.7 10 151 174 22 34.4 63.5 12 20.9 165 188 17 36.5 65.6 6 168 191 18.5 37.5 66.6 8 18.5 23.4 48.5 24.3 20.4 53.5 R3/8 21 24.8 93.8 73.6 57.4 52.4 25.6 51 46 20.2 159 182 21 32.6 61.7 10 161 184 22 34.4 63.5 12 20.9 292 310 21 32.6 74.8