Air Slide Table Series MXW

189 7 288 1 177.5 562 73.5 MXW20-250 48 48 269 141 166 215 8 312 2 203 612 59 163 Series MXW MXW25/Stroke: 100, 125, 150 mm Operating port 2 x Rc 1/8 (NPT 1/8, G 1/8) J 20 Width across hexagon socket hole 5 11 66 Width across flats 17 Note) If long bolts are used, they can touch the guide block and cause malfunction, etc.

End Lock Cylinder Series CBG1

Clevis type/CBG1D 20 to 50 Clevis type (mm) With rear lock/H With front lockR Bore size (mm) Z ZZ Z ZZ Without rod boot With rod boot Without rod boot With rod boot Without rod boot With rod boot Without rod boot With rod boot 150 + l 171 + l 149 + l 170 + l 20 130 151 129 150 159 + l 180 + l 158 + l 179 + l 25 137 158 136 157 163 + l 187 + l 163 + l 187 + l 32 141 165 141 165 184 + l 212

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

187 Double ( ) 10 One-touch fitting 3 position Exhaust center 66 74 SY760--C10 Closed center 3 position Pressure center 141 149 195 Exhaust center Pressure center Note) Entries inside ( ) are for the normal position Series SY5000 Weight g Port size L type, M type plug connector Valve model Type of actuation DIN terminal Grommet type A, B Single 61 65 88 2 position Double 79 86 132 SY560-

CG5-S

CD (shaft) 8 Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS

CG5-S

CD (shaft) 8 Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS

CG5-S

LX LY LZ RR S U 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 9 83 13 25 8 137 146 7 9 2 14 30 27.6 21 3 56.5 42 30 158 CG-E020SUS 9 83 13 32 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 11 85 15 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 11 93

CJ5-S

bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188

CJ5-S

bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040 0.076 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 20 8 132 141 7 9 2 14 30 27.6 21 3 56.5 42 30 153 CG-E020SUS 25 8 137 7 9 2 14 30 27.6 21 3 56.5 42 30 158 146 CG-E020SUS 2032 10 141 7 11 4 22 40 38.4 29 4 70.5 56 40 170 152 CG-E032SUS 40 10 159 7 11 4 22 40 38.4 29 4 70.5 56 40 188

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

Table of Contents

Step designation BIT 5 8 Stp-no. bit4 20 BIT 6 21 Stp-no. bit5 8 BIT 7 9 Stp-no. bit6 21 22 Stp-no. bit7 9 35V DC max. + SET-ON 10 Temporarily stops the program run by means of the ON input. 3 Temporary stop READY HOLD 23 BUSY 11 Performs an emergency stop when ON input stops. 16 Emergency stop (nonlogical input) ALARM STOP 24 COM 12 ALARM RESET 4 Alarm release Releases the alarm being generated

Air Slide Table Series MXQ

-50 21 KA NA x M5 x 0.8 thread depth 6.5 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 6 B A 5H9 depth 5 +0.030 0 NN x M6 x 1 thread depth 12 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Rc 1/8 Vent hole tap 25ALEC 18 LEC S [mm] LEC SS-T Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T U Y V LEC Y LEC Y 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 1 26.5 40 105 to 400 155.5 141 Motorless 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 118 1 34 60 105 to 500 178.5 160 63 Up to 200 192.6 155.2 21 40 76 82 M16

Magnetically Coupled Rodless Cylinder

Refer to pages 21 to 23 for further information on auto switches.

MXS

62 48 26 6 1 N-M5 X 0.8 thread 6 deep (Helisert) 6 12 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA-M5 X 0.8 thread 5.5 deep 10 21 5.5 K 10 5.5 9.5 12 6 12 5.5 J 10 Max. 13.5 (With stroke adjuster at retraction end) I Operating port 2-M5 X 0.8 11 3 2-M5 X 0.8 thread 5.5 deep 5H9 4 deep +0.030 0 HA GA 5H9 4 deep +0.030

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: Z Applicable shaft type: J X = CRB2 Y = X = (mm) (mm) CRBU2 Y X Y X Size Size 4 to 19.5 4 to 19.5 4 to 19.5 4 to 39.5 50 50 CRB1 4 to 21 4 to 21 4 to 21 4 to 45 63 63 Y = 4 to 23.5 4 to 23.5 4 to 23.5 4 to 53.5 MSU 80 80 5 to 30 5 to 30 5 to 30 5 to 65 100 100 CRJ Symbol: A58 The rotation axis is reversed. The long shaft and short shaft are shortened.

Air Slide Table Series MXS

Shock absorber (Refer to page 71.) 9.5 10 5.5 10 21 K 5.5 NA x M5 x 0.8 thread depth 5.5 KA 21 Stroke adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 37.5 12 6 N x M5 x 0.8 thread depth 6 Note) (Helisert) 6 4 x M5 x 0.8 thread depth 7 1 18 (With stroke adjuster at extension end) 3.5 (With stroke adjuster at retraction end) 26 58 35 48 62

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5.5 10 Bottom view of MXQ16-50 1322K 21 13 35 45 5.5 10 0.3 35.7 5.5 37 Z ZZ G (NN 1) x H H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 24 1 A B NN x M6 x 1 thread depth 12 6 HA 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 GA A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39

C95

40 50 63 80 100 10.5 12 15 15 18 18 14 16 21 21 25 25 Centre trunnion Bore (mm) TC B TA TF Part No.

C85

20.5 26.5 21 22 18.5 25 20 25 5(30) 5(30) 55 55 80 80 16 23 19.5 23 20.5 26.5 23 22 20.5 25 20 26 22.5 25 23.5 29.5 25 25 22.5 29 ( ) for non rotating type.