Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

VVFS2000-30A-6 15 m VVZS3000-21A-6 15 m VVFS2000-30A-7 20 m VVZS3000-21A-7 30 m VVZS3000-21A-8 20 m Option Option Cable Color List of Each Terminal No.

AC Servo Motor Driver (MECHATROLINK-II type)

30 20 10 Parameter *1,*2 Para.

AC Servo Motor Driver (MECHATROLINK-III type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

3 Port Air Operated Valve Series SYJA300 1

VV3ZA2-20-031 1 pc. VV3ZA4-20-0311 pc. VZA212-P-M52 pcs. VZA412-P-012 pcs. VVZ200-32A-11 pc. VVZ400-32A-11 pc. Caution Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. VV3ZA2-50-031-01 1 pc. VV3ZA4-50-031-021 pc. VZA214-P2 pcs.

-fl Seies

NVFR2l00 NVFR22C)0 NVFR2300. 2400. 2sO0 Gasket NBR AXr624-20-2 AXr624-20-2 N{r624-20-2 Valve mounting bolt Steel AXr624-26 (M3X31) AXT624-26 (M3X31) AXI624-26 (M3X31) @ Pilot Ass'y Refer to "Pilot Operalor Ass'y/How to Order" on page 8. Series NVFRzOOO:Base Mounted Tlpe Pilot Operatar Ass'g/How to Order NVFR2000 Series enty and lndicat!

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

NVFR2l00 NVFR22C)0 NVFR2300. 2400. 2sO0 Gasket NBR AXr624-20-2 AXr624-20-2 N{r624-20-2 Valve mounting bolt Steel AXr624-26 (M3X31) AXT624-26 (M3X31) AXI624-26 (M3X31) @ Pilot Ass'y Refer to "Pilot Operalor Ass'y/How to Order" on page 8. Series NVFRzOOO:Base Mounted Tlpe Pilot Operatar Ass'g/How to Order NVFR2000 Series enty and lndicat!

VP300/500/700

Flow passage Porting specifications A Side R P Common Common 3 Side Individual Special specifications Symbol Note Nil Standard 1 Type 41 Type 42 Common R Common external pilot Stations 02 2 stations 20 20 stations Note) Instruct by specifying the valves and blanking plate to be mounted on the manifold along with the manifold base model no.

VZA200/400

VV3ZA2-20-031 1 pc. VV3ZA4-20-0311 pc. VZA212-P-M52 pcs. VZA412-P-012 pcs. VVZ200-32A-11 pc. VVZ400-32A-11 pc. Caution Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. VV3ZA2-50-031-01 1 pc. VV3ZA4-50-031-021 pc. VZA214-P2 pcs.

VZA2000

VV5ZA4-20-0811 pc. VV5ZA4-50-081-021 pc. VZA4121-014 pcs. VZA4141-24 pcs. VZA4221-013 pcs. VZA4241-23 pcs. VVZ4000-31A-11 pc. VVZ4000-31A-21 pc. Base mounted 2 position single 2 position double Sub-plate Assembly Part No.: VZA4000-S01 02 Mounting bolt and gasket are not included.

VZA200/400

VV3ZA4-50-031-021 pc. VZA214-P2 pcs. VZA414-2P2 pcs. VVZ200-31A-11 pc.

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 7 Stations Top Ported/Valve

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 3 Stations Top Ported/Valve

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 4 Stations Top Ported/Valve

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 6 Stations Top Ported/Valve

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 5 Stations Top Ported/Valve

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 8 Stations Top Ported/Valve

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 10 Stations Top Ported/Valve

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 9 Stations Top Ported/Valve