MY1

30 30 Data 20 20 20 1.

ZX

Function ZL Solenoid valve/Air operated valve Operation ZY 3, 5, 6, 12, 24 VDC, 100, 110 VAC (50/60 Hz) Power supply voltage Vacuum pressure switch unit Series ZS ZQ Vacuum switch Adsorption confirmation switch Adsorption confirmation switch Series Vacuum switch ZF Set pressure range 0 to 101 kPa 20 kPa to 101 kPa 0 to 101 kPa 20 kPa to 101 kPa 3% or less 0.5 kPa Hysteresis ZP 2 to 25 0.3

Cylinder with Lock Series MNB

14 102 73 64 45 86 30 111 12.5 11 10 65 359 14 22 + 0.084 0 22 MB-B08 80, 100 55 30 175 116 73 64 45 86 30 111 12.5 11 10 65 379 + 0.084 0 14 22 22 10 Series MNB Dimensions of Accessories Dimensions of Accessories Knuckle joint pin Clevis pin Rod end nut (standard equipment) 30 d Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.

3

(Refer to page 403 for details of the MK2T series.) 12, 16 20, 25 103 101 MK 102 (MK2T) Allowable moment of inertia [kgm2] Allowable moment of inertia [kgm2] 104 MK 103 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 (MK2T) MK (MK2T) Allowable

5 Port Air Operated Valve Series VFA3000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

Manifold Type: 30 (Top Ported Common EXH), Stations: 3 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 7 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 16 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 5 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 8 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 12 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 6 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 2 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 4 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

VNH

35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 x 8 7 x 10 9 x 12 9 x 12 20 24 24 70 92 109 17-4-34 5 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Precautions Be sure to read before handling.

Manifold Type: 30 (Top Ported Common EXH), Stations: 9 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Manifold Type: 30 (Top Ported Common EXH), Stations: 11 Stations, Passage: 1 (Type 30), Port Size: None, Thread Type: 00T (NPTF, Body Ported Types)

Refrigerated Air Dryer

Note 3) Refer to pages 101 and 102 for further details on optional specifications.

Electric Actuators

(Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116 TSUBAKI CABLEVEYOR specification (-X40) LJ1H 10/20/30 (Horizontal mount) 122 LJ1S 10/20/30 (Horizontal mount) 128 101 Made to Order Specifications Series LJ1H/LJ1S Clean Room Specification (-X60) Change of materials, anti-corrosive