VFS

Max. 3.5 3 position (240) Double (230) 3 position (204) 3 position (241) Double (194) Double (231) Single (153) Single (135) Single (153) 6-Rc 3/8 6-Rc 3/8 6-Rc 3/8 4-Rc 1/8 Pilot EXH port: PE 4-Rc 1/8 Pilot EXH port: PE 4-Rc 1/8 Pilot EXH port: PE (With light/surge voltage suppressor: 104.5) (With light/surge voltage suppressor: 119.5 (121.5)) (With light/surge voltage suppressor: 109) (

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L 125 F5125 60 16 110 Max. 157 90 20 180 Max. 224 10.5 M12 x 25L

C95

70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22 28 34 40 73 82.5 90 97.5 110 120 95 106.5 122 129.5 150 160 12 16 16 20 20 25 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72 90 100 126 150 79 90 110 120 153

5 Port Solenoid Valve SY Series

EA P EB In common Type 42 Bar stock type/Common External EXH Individual wiring SY3 40 SY5 40 P. 79 The base mounting facilitates maintenance after valves are changed.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

How to Order XC35 With coil scraper Specifications: Same as standard type Dimensions: Same as standard type 153 Made to Order CP96 Series Symbol -XC65 Made of Stainless Steel (Combination of -XC7 and -XC68) 8 Suitable for the cases it is likely to generate rust by being immersed in the water and corrosion.

MY1

127 153 162.5 177.5 162.5 177.5 157.5 182.5 157.5 182.5 283.5 116.5 278.5 121.5 328.5 131.5 323.5 136.5 Note 1) Perpendicular electrical entry type and D-Y7BA cannot be mounted on 16, 20, 50 and 63.

Slide Unit Series CX2/CXWM/CXWL

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Handling on Shock Absorber Service Life and Replacement Period of Shock Absorber Caution Caution 1.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

n x 6.6 6H9 ( +0.030 0 ) depth 66 7 60 64 76 7 6H9 (+0.030 0 ) depth 66 6H9 (+0.030 0 ) depth 66 11 Motor mounting position: Right side parallel 153 G 70 60 64 *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Slide Unit Series CX2/CXWM/CXWL

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Handling on Shock Absorber Service Life and Replacement Period of Shock Absorber Caution Caution 1.

Air Cylinder Series CS1

354 398 111 115 Up to 998 50 96 90 45 345 389 363 407 0.2 stroke Lube Non-lube 111 135 336 380 153 354 398 120 Dimensions except mentioned above are the same as standard type.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

281 135 115 Lube Non-lube 299 290 308 0.2 stroke Up to 998 153 281 90 45 135 120 Lube Non-lube Dimensions except mentioned above are the same as standard type.

CS1

0.2 Stroke 289 115 275 293 Lube Non-lube to 998 111 90 45 135 271 153 0.2 Stroke 289 120 280 298 Other dimensions are the same as standard style.

Digital Flow Switch (Integrated display type) ( compatible)

Nominal thread size Tightening torque Rc(NPT)3/8 15 to 20 Nm Rc(NPT)1/2 20 to 25 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm Rc(NPT)1 1/4 40 to 42 Nm Rc(NPT)1 1/2 48 to 50 Nm If the tightening torque is exceeded, the product can be broken. If the correct tightening torque is not applied, the fittings may become loose. Avoid any sealing tape getting inside the piping.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Max. 3.5 VFR VQ7 3 position (241) Double (231) Single (153) 3 position (240) Double (230) Single (153) 3 position (204) Double (194) Single (135) 4 x Rc 1/8 Pilot EXH port: PE 4 x Rc 1/8 Pilot EXH port: PE 4 x Rc 1/8 Pilot EXH port: PE (With light/surge voltage suppressor: 104.5) (With light/surge voltage suppressor: 119.5 (121.5)) (With light/surge voltage suppressor: 109) (With light/surge

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

KJ10D KJ12D KJ16D KJ20D KJ27D M10 x 1.25 10 43 28 14 20 4 15 M12 x 1.25 12 50 32 16 22 4 17 M16 x 1.5 16 64 42 21 28 4 23 M20 x 1.5 20 77 50 25 33 4 27 M27 x 2 30 110 70 37 51 4 36 83 Series CP96/C96 Simple Specials These changes are dealt with Simple Specials System.

Compact Cylinder

Rod End Nut CZ 8 10 10 CX 9 11 13 CT 9.5 11 14 CR 5.3 6.4 8.4 CL 26 42 54 Part no. MU-C02 MU-C03 MU-C04 Double clevis socket material: Cast iron Surface treatment: Painted MM Note) Double clevis socket is available for sizes from 25 to 40. (mm) MM M8 x 1.25 M12 x 1.25 H 5 9.6 B 13 22.2 C 15.0 21.9 D 12.5 18 Part no.

MGC

M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1 32 46 95 70 52 30 M5 x 0.8 25 161 82 37 28.5 50 53 112 16 38 12 21 M6 x 1 32 50 105 80 60 35 Rc1/8 20 188 92 44 33 60 63 132 20 47 12 25 M8 x 1.25 38 60 125 95 70 40 Rc1/8 20 241 104 55

High Vacuum Angle Valve

0 2-1 o 0.2 153 188 q 190 138 O-ring Part No.

Aluminum High Vacuum Angle Valve

0 2-1 o 0.2 153 188 q 190 138 O-ring Part No.

45

L dimension 33 No. 510.5 34 523 35 535.5 36 548 37 560.5 38 573 39 585.5 40 598 41 610.5 42 623 43 635.5 Mounting screw tightening torques L dimension 44 648 45 660.5 46 673 47 685.5 No. 48 698 49 710.5 50 723 51 735.5 52 748 53 760.5 54 773 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm L dimension 55 No. 785.5 56 798 57 810.5 58 823 59 835.5 60 848 61 860.5 62 873 63 885.5 64 898 65 910.5 L dimension