Air Cylinder Series CS1

261 M14 x 1.5 Up to 1400 M30 x 1.5 Lube Non-lube Air-hydro 50 47 36 90 59 43 14 19 20 16 15 31 24 98 35 82 75 40 160 161 128 212 112 255 110 232 133 255 M14 x 1.5 Up to 1400 M30 x 1.5 0.2 x Stroke 56 53 40 90 59 43 14 19 20 17 36 26 39 82 75 40 180 182 144 236 118 275 106 120 252 141 273 M16 x 1.5 Up to 1400 18.5 M36 x 1.5 63 60 45 70 48 17 24 25 20 41 31 39 92 85 45 200 204 162 115 265

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

235 75 40 110 98 Lube Non-lube Air-hydro Lube Non-lube Air-hydro 258 235 258 0.2 stroke Up to 1000 133 40 110 235 75 98 277.5 256.5 277.5 0.2 stroke Up to 1200 40 141 75 120 256.5 106 299 285 303 0.2 stroke Up to 1200 85 45 153 281 135 115 Lube Non-lube 299 290 308 0.2 stroke Up to 998 153 281 90 45 135 120 Lube Non-lube Dimensions except mentioned above are the same as standard type.

Series CE1

LX LY LZ FD FL FV FX FZ A CD CL CU CW CX CZ RR 12 106.5 4.5 8 4.5 29.5 17 2 85 34 52 44 4.5 5.5 25 45 55 114 5 108 7 14 5 10 6 99.5 20 121 5.8 9.2 6.6 42 24 3.2 96.4 48 66.5 62 6.6 8 39 48 60 133 8 124 12 18 8 16 9 114 4.4-11 Series CE1 Dimensions 32, 40, 50, 63 Both ends tapped CE1B Bore size Stroke 4-N through 8-O thread depth 20 20 2.5 91 500 or 3000 K 7 H G D M E J F L X C B + Stroke

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

W is width across flats dimension. 49 36 10 10 39.5 48.5 133 51 55 58.5 17-5-110 15 Series LQ1 High Purity Fluoropolymer Fittings Union: LQ1U Metric sizes Applicable tubing O.D.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50

PC Wiring System

Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5

CV/MVGQ

48 42 85.5 91 93.5 CE2 80 107 49.5 48.5 59 51 93.5 48.5 101.5 55.5 50 54 50 94 107 102 100 ML2B 104 121 58.5 56 69.5 59 56 112 63 57.5 62 57.5 104 121 112 Operating Range C J G5-S CV Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

CM2

Local Area: (800) 258-9200-www.stevenengineering.com With air cushion With rod boot Cushion valve Width across flats 1.5 Width across flats B3 e 9 Built-in One-touch fittings l 9 f One-touch fitting port size P h ZZ + Stroke H1 H G F D CX AL ZZ CD A K S Z CI I B1 E L MM N NA NN P RR U Bore size (mm) 0 0.033 20 41 8 13 8 10 9 18 62 24 30 9 14 15.5 13 5 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 133

CS1

0.2 Stroke 245 98 222 245 Lube Non-lube Air-hydro Lube Non-lube Air-hydro to 1000 98 75 40 110 228 133 0.2 Stroke 251 98 228 251 to 1200 75 40 106 120 246 141 0.2 Stroke 267 106 246 267 to 1200 Lube Non-lube 111 85 45 135 271 153 0.2 Stroke 289 115 275 293 Lube Non-lube to 998 111 90 45 135 271 153 0.2 Stroke 289 120 280 298 Other dimensions are the same as standard style.

CKZ2N

Clamp Arm Tightening Torque Bore size (mm) Tightening torque Nm Ibfin 50 63 80 12 to 15 15 to 20 18 to 24 106 to 133 133 to 177 159 to 212 Bore size (mm) Tightening torque Description Nm Ibfin 50 63 80 50 63 80 50 63 80 50 63 80 44 to 62 44 to 62 44 to 62 27 to 35 27 to 35 27 to 35 1150 to 1327 1416 to 1770 4248 to 4600 22 to 27 22 to 27 27 to 44 5.0 to 7.0 5.0 to 7.0 5.0 to 7.0 3.0 to 4.0

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

N11T) (02T) 2-M2.5 x 0.45 Thread length 6 13 9 31.5 24.5 16.5 3 2.5 4 36 23.4 Mounting holes 9 6.5 6.5 47.5 10.5 Foot bracket 49.7 15.4 16.7 PE port P 1 3 R 1.5 A 1/8 NPTF R port 1/4 NPTF P port 23 Die cast hole For manifold gasket positioning L type plug connector (L): VQZ3 2(R)L -N7T, N9T, N11T, 02T DIN connector (Y): VQZ3 2(R)Y -N7T, N9T, N11T, 02T 88.5 300 (Lead wire length) Indicator

Series VQ Base Mounted Metal Seal/Rubber Seal

457 487.5 498 23 421 441 462.5 473 22 405 425 450 460.5 21 389 409 437.5 448 20 373 393 412.5 423 19 357 377 400 410.5 18 341 361 387.5 398 17 325 345 375 385.5 16 309 329 350 360.5 15 293 313 337.5 348 14 277 297 325 335.5 13 261 281 312.5 323 12 245 265 300 310.5 11 229 249 275 285.5 10 213 233 262.5 273 9 197 217 250 260.5 8 181 201 225 235.5 7 165 185 212.5 223 6 149 169 200 210.5 5 133

High Purity Fluoropolymer

L L H A M W E N A LQ2H21-M LQ2H22-M LQ2H23-M LQ2H24-M LQ2H31-M LQ2H32-M LQ2H33-M LQ2H34-M LQ2H35-M LQ2H36-M LQ2H41-M LQ2H42-M LQ2H43-M LQ2H44-M LQ2H51-M LQ2H52-M LQ2H53-M LQ2H54-M 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 W 39 1/8" 42.5 19 19.9 16 18 36.5 1/4" (M) H 49 43 H (E) 1/4" Class 2, 3 48.5 42.5 Port size 22 26.2 24 24 R (NPT) 49 42.5 3/8" 48.5 59 58 59 58 68 67 68 67 42 53

MK

40 50 63 10 20 50 70 100 250 280 500 595 87 123 290 320 525 640 1100 1520 1350 1805 Availability of Body Options Additional Weight 12 Unit: g 16 20 25 32 40 50 63 Bore size (mm) Bore size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm 13 32 100 100 200 200 350 350 Rear flange 133

Precautions 1

Refer to front matters 42 and 43 for Safety Instructions, pages 3 to 11 for Actuator and Auto Switch Precautions and 3/4/5 Port Solenoid Valve Precautions in Best Pneumatics No. 1.

Rotary Actuator

[mm] 63 15 105 59 130 101 Size H U UU 50 39 114 150 63 45 136 177 80 55 165 215 100 60 190 250 Size H N U UU 50 30 15 105 125 63 33 17 124 146 80 43 20 153 178 100 44 25 174 204 80 18 130 76 160 119 100 18 150 92 180 133 DThe dimensions of shaft key and four chamfers are the same as the basic type.

IDG

With float type auto-drain With drain guide Port size A B C D E F G H J K L M H H Model IDG3V/3HV/5V/5HV IDG10V/10HV 5.5 224 45 11 275 59 14 133 158 188 208 185 244 269 365 87 30 24 8.5 78 180 192 1/8, 1/4 7 102 41 35 11 92.5 201 242 IDG20V/20HV 1/4, 3/8 305 IDG30V/30HV 322 IDG50V/50HV 168 409 464 544 121 50 40 IDG60LV/60SV 77 18 9 239 246 13 112 278 IDG75LV/75SV 3/8, 1/2 334 180 IDG100LV

JIS Standard Hydraulic Cylinder

15 40 19 11 43 35 1/2 46 155 13 14 50 8 58 37 35 15 220 225 55 52 15 15 25 to 1400 63 M12 x 1.5 90 98 63 15 42 19 14 43 35 1/2 52 163 15 18 60 10 65 45 42 18 240 247 65 55 15 20 25 to 1500 80 M16 x 1.5 110 118 80 17 40 22 16 44 44 3/4 65 184 18 18 72 12 87 50 50 20 269 284 65 17 20 80 25 to 1800 1/4 stroke 100 M18 x 1.5 135 150 102 19 42 22 18 44 44 3/4 75 192 20 22 85 12 109 55 55 23 287

Table of Contents

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.