Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 25 30 30 29.5 27 29 25.5 27 31 24 30 17 (25) 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 32 33.5 33.5 33 30.5 30 26.5 28 32 25 31 19 (28) 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 40 38 38 37.5 35 34.5 31 32.5 36.5 29.5 35.5 24 (36) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 50 43.5 43.5 43 40.5 42

PF-OMN0009_C

63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W521 56 76.6 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0009CN-F PF3W504/520/540/511/

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

Model Selection 1

5 2 3 Union tee LQ2T 4 P. 17-5-123 5 Note) Basic size With reducer 17-5-95 24 Series LQ 1 2, LVN, TL/TIL Port size Tubing O.D.

XL

In the case of gases which cause a large amount of deposits, heat the valve body or use a model with heater to prevent deposits in the valve. 42 Specific Product Precautions 2 Series XL Be sure to read before handling. Mounting Operating Environment & Vacuum Characteristics Caution Caution All models 1.

Single Axis Electric Actuator Series LJ1H

Applicable strokes: 250, 350, 450, 550, 650, 700, 750, 850, 900, 950, 1050, 1100, 1150, 1250, 1300, 1350, 1400, 1450 Example) LJ1H3031PD-250-F2-X2 Allowable Moment (Nm) Allowable static moment Allowable dynamic moment Pitching Rolling Yawing Mounting orientation Load movement direction 117 137 123 Model LJ1H30 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep a = 1000 2000 L1

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

Table of Contents

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 15 12.8 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

Table of Contents

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7/D-J79 D-F7W D-J79W D-F79F D-F7NT Auto switch model D-P3DW D-A9V D-M9V D-M9WV D-M9AV D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-J79C D-A79W D-P4DW U 34.5 38 44 47.5 57.5 67.5 U 31.5 35 41 47.5 57.5 67.5 U 44 50 56.5 66.5 76.5 U 27 30.5 36.5 40 50 60 U 29 32.5 38.5 42 52 62 U 32.5 36 42 48.5 58.5 68.5 U 38.5 42 48 54.5 64.5 74.5 U 35 38.5 44.5

ISO Standard Hydraulic Cylinder

18 M12 x 1.25 12 M20 x 1.5 74 134 104 25 88 89 129 7 199 28 75 28 42 9 24 53 11 25 57 33 1/2 29 67 63 25 to 800 90 64.3 39 17 M12 x 1.25 12 M27 x 2 80 136 111 32 90 100 150 12 216 90 36 50 68 32 1/2 36 71 36 13 30 13 55 33 -0.009 -0.054 80 25 to 800 115 82.7 46 20 M16 x 1.5 16 M33 x 2 93 159 123.5 40 123 127 191 15 251 115 45 60 76 41 3/4 44 77 45 9 41 17 66 40 100 25 to 1000 130 96.9 47

KJ

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 15 12.8 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

C85

(126.5) {154(157.5)} 8 16 3.2 4.5 40 35 26 3.2 30 25 11 22 23.8 12.8 4.5 12.8 5 10 16 3.2 4.5 40 35 26 3.2 30 25 11 22 23.8 12.8 4.5 12.8 5 12 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 16 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 20 91{116} 141 166 25 5 6.6 66 54 42 5 50 40 17 40 36 19 6.6 19 8 96{121} 103{128} 146 171 153 178 25 98{121.5} 146.5 171.5 25 5 6.6 66 54 42 5 50

CQS

MU Theoretical Output (N) DOperating pressure (MPa) Piston area (mm 2) Rod size (mm) Operating direction Bore size (mm) 0.7 0.5 0.3 -X IN 12 6 59 42 25 84.8 20OUT IN 16 8 106 75 45 151 Data OUT Mounting IN 20 10 165 118 71 236 1. When removing a load, be sure to secure the wrench flats of the piston rod on the load side. 2.

CQS

Rear flange With auto switch W/o auto switch Bore (mm) Stroke range (mm) FD FT FV FX FZ L L1 B 17 17 19.5 22.5 A 31 31 42 45.5 B 22 22 29.5 32.5 A 26 26 32 35.5 12 16 20 25 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 3.5 3.5 4.5 5 14 15.5 18.5 22.5 5, 10 (All dimensions are common between standard stroke and long stroke except "A", "B" and "CL".)

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

25 5, 10 Rear Flange L1 Without auto switch A 26 26 32 35.5 With auto switch A 31 31 42 45.5 Bore (mm) Stroke range (mm) FD FT FV FX FZ L Inch Metric 14 15.5 18.5 22.5 B 17 17 19.5 22.5 B 22 22 29.5 32.5 11.5 11.5 12.5 14.5 12 16 20 25 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 3.5 3.5 4.5 5 5, 10 Double Clevis Without auto switch With auto switch A 40.5 41.5 51 57.5

Table of Contents

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 40 285.5 21 273 No.

CY1

Large variations may occur depending on the surrounding environment (variation on the order of 30%). 6 to 20 Auto switch model Bore size (mm) D-A9 A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 30 6 26 46 42 46 42 26 30 10 28 32 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25

LEC-OM02704CN

3.7.1 .42 3.7.2 .45 3.7.3 .46 3.7.4 .47 3.7.5 .50 3.7.6 .53 3.8 .56 3.8.1 1 .56 3.8.2 1 .57 3.8.3 2 .59 3.8.4 2 .60 3 1 3CC-Link 3 CC-Link 3.1 CC-Link DC5V CC-Link Ver.1.10 10M/5M/2.5M/625K/156Kbps NRZI CC-Link BUS(EIA RS-485) CRC(X16X12X51) CC-Link Ver.1.10() HDLC 164 156kbps 625kbps 2.5Mbps 5Mbps 10Mbps () 1200m 900m 400m 160m 100m 0.2m 42(1/)(2/32) .