3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

Made to Order

39 st 41 to 99 st 101 to 249 st 11 to 39 st 41 to 99 st 101 to 249 st 12 43 55 84.5 1 13 42.5 16 49 65 94.5 3 19 48.5 Bore size (mm) A E 21 to 74 st 76 to 199 st 201 to 399 st 21 to 74 st 76 to 199 st 201 to 399 st 20 53 77.5 110 0 24.5 57 25 53.5 77.5 109.5 0 24 56 Bore size (mm) A E 21 to 39 st 41 to 124 st 126 to 199 st 201 to 399 st 21 to 39 st 41 to 124 st 126 to 199 st 201 to 399 st

Air Slide Table

41 82 Double-ported type (MXQA) 6 20 34 32 230 29 10 10 18 8 23 42 40 330 51 10 10 19 12 30 52 50 580 113 16 16 33 16 37 70 60 920 201 21 21 49 20 46 80 70 1,600 314 41 41 82 Low thrust with high rigidity type (MXQB) For applications which require more guide rigidity than thrust Single sideported type (MXQC) When a lower height is required When two indicator LEDs need to be observed on one

1

WA WB Bore size (mm) Stroke range (mm) 26 to 39 st 41 to 124 st 124 124 124 128 128 148 126 to 199 st 200 200 200 200 200 220 201 to 299 st 300 300 300 300 300 320 301 to 399 st 26 to 39 st 41 to 124 st 126 to 199 st 201 to 299 st 171 172 174 174 178 171 301 to 399 st CP95 32 40 50 63 80 100 121 122 124 124 128 121 83 84 86 88 92 85 45 46 48 50 54 47 48 48 48 52 52 72 33 34 36 38 42 35 24

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

CA2

34 38.5 46.5 55 63 Hs 30 34 41 48.5 56 Ht 30.5 35 42.5 51 59 Hs 30 34 41 48.5 56 40 50 63 80 100 30 34 41 49.5 58.5 B 32 A Operating Range Bore size Auto switch model 40 8 50 7 63 9 80 9.5 100 10.5 D-Z7/Z80 D-A3/A44/A3C/A44C D-A5/A6 D-B5/B64 9 10 11 11 11 D-A59W D-B59W D-Y59/Y69/Y7P/Y7V/Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W/F5BAL/F5NTL D-F59F D-G5/K59/G5W/K59W/G5BAL/G5NTL/G59F D-G39/K39/G39C

MG

101 80 60 40 201 OUT 16 8 151 136 121 106 91 76 60 45 30 151 IN Bore size (mm) Mounting bracket part no.

ISO Cylinder

Weights [g] Bore size [mm] 8 10 12 16 20 25 C85KN 39 41 82 95 189 257 C85KE 41 43 86 98 194 262 Without magnet C85KF 37 39 77 85 174 240 C85KY 37 39 77 85 175 241 Basic weight CD85KN 39 41 83 95 193 261 CD85KE 41 43 86 99 198 266 With magnet CD85KF 37 39 77 85 178 244 CD85KY 37 39 78 85 178 245 Additional weight per 10 mm of stroke 2.3 2.5 4.5 5.5 8.7 12.2 Foot (1 pc.)

CV/MVGQ

85 85.5 41 93 91 93.5 91 41 80 59 55.5 50 54 50 51 48.5 93.5 94 48.5 101.5 107 102 107 49.5 100 69.5 63 57.5 62 57.5 59 56 104 104 56 112 121 112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

CV/MVGQ

41 93 91 93.5 91 41 80 59 55.5 50 54 50 51 93.5 94 48.5 48.5 101.5 107 102 107 49.5 100 69.5 63 57.5 62 57.5 59 104 104 56 56 112 121 112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

SMC

121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NA 2 2 2 2 2 2 4 4 4 NN 2 2 2 2 3 4 5 6 7 KA 169 223 275 H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195

High Vacuum Angle Valve

G G Heater A A [mm] Series Valve size A B C D E Fn G H J K 25 50 121 48 27 12 40 26 44 21 40 65 171 66 39 11 55 41 67 29 50 70 185 79 31 11 75 52 76 29 9 XLC XLG 19 Heat-resistant 2-Color Indicator Solid State Auto Switch: Direct Mounting Type D-M9NJ/D-M9PJ RoHS Refer to the SMC website for details on products that are compliant with international standards.

Battery-less

1500 500 500 400 400 400 Positioning repeatability [mm] 0.015 0.08 0.02 0.02 0.01 0.05 0.05 Drive motor Step motor V V V V V V V 8 V 16 V V V V V 25 V V V V V V V Size 32 V V V V 40 V V V 8 2 (6) 16 15 (4) 1 35 (8) 35 (7.5) 8 (12) Max. work load [kg] The values in parentheses are for when mounted vertically. 25 30 (15) 10 70 (30) 70 (29) 12 (20) 5 (5) 12 (4) Size 32 50 (20) 19 80 (43) 80 (41

CHKD/CHKG

14 70 28 126 24 27 24 M20 x 2.5 8 11 43 24 104 83.5 20 depth 13 140 16 77 35.5 146 30 33 33 M27 x 3 9 13 52 30 121 102 23 depth 15.2 161 18 88 45 172 41 38 36 M30 x 3.5 14 15 63 35 144 123.5 26 depth 17.5 189 22 106 56 208 50 43 45 M39 x 4 21 17 76 40 174 149 Note 1) Body dimensions are the same with or without auto switches.

MXQ

42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Angle Weight (g) Load (kN) Bore size (mm) 32 40 50, 63 80, 100 125 JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 M10 x 1.25 49.5 19.5 70 2.5 24 5 8 8 17 9 0.5 M12 x 1.25 60 20 160 4.4 31 6 11 11 22 13 0.75 0.5 M16 x 1.5 71.5 22 300 11 41 7.5 14 13.5 27 15 1 M20 x 1.5 101 28 1080 31 18 59.5 11.5 24 16 32 18 2 M27 x 2 123 34 1500 38 28 66 13 27 20 41 24 2 Black color Rod