Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(PF2A7 0) 2% F .S. (PF2A7 1) 2% F.S. Monitor unit 1% F.S. 1 digit (Fluid: Dry air) 1% F .S. 1% F .S. (Fluid: Dry air) 1% F.S. Monitor unit 0.1% F.S. Monitor unit Monitor unit 0.1% F.S. 0.1% F.S. 0.1% F.S. (Fluid: Dry air) (Fluid: Dry air) Analog output: 5% F.S. Analog output: 0.3% F.S.

125

How to Order Sub-plate and Base Gasket Body size 22 42 VEX VEX VEX1 2 9 A VEX4 2A 1 A Port size Thread type Port size Thread type Symbol Port size A 1/8 B 1/4 Symbol Thread type Nil Rc F G N NPT T NPTF Symbol Port size A 1/4 B 3/8 C 1/2 Symbol Thread type Nil Rc F G N NPT T NPTF Sub-plate Base gasket VEX1 11 2 VEX4 4 Options/Part Number Description Part number VEX312-01 02 VEX322-01 02 VEX33202

IR1000/2000/3000

Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !

LEC-OM071xx

H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H /EXT1 *

AC Servo Motor Driver (CC-Link Type ）

, [b] to [f]).

AC Servo Motor Driver (CC-Link Type ）

, [b] to [f]).

Smooth Cylinder/Low Speed Cylinder

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 REA Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 REB W W W 0.7 193 172 212 REC 0.3 144 126 156 CY CY G 0.5 109 94 118 0.7 90 78 97 CX Foot: L Rod flange: Head flange: 0.3 433 386 476 F G MQ L, F 0.5 334 297 367 W W W RHC 0.7 281 250 309 0.3 210 185 229 RZQ G 0.5 160 141 175 0.7 134 117 129 D-X 1231 Series CS2Y Construction

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

600 _ _ 1 F 290 7 8 7.

VKF300

Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type

Hydraulic

1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 123 Hydraulic Cylinders: Technical Data 2 Series CHA Stroke range limit charts: Bore sizes 40, 50, 63, 80 Symbol Mounting orientation Mounting orientation Mounting orientation Mounting orientation Symbol Symbol Symbol F F F F F F F F F F F F Bore size 40 Bore size 50 3000 2 4 8 9 3 7 2 4 3 7 5 2000 8 9 1 5 1 6

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type

ZP

M3 x 0.5 F: M5 x 0.8 C D E G H E G Model 10 13 16 H Model G ZPTB 6-B-A8 F E F E E F 19 47 15 45 ZPTB10-B5-A10 ZPTB10-B-A8 75 40.5 36.5 39 80 72.5 76.5 23 24 78 85 3 6 5 8 ZPTB20-B5-A10 ZPTB15-B-A8 50.5 49 113 46.5 110.5 114.5 29 43 83 51 ZPTB30-B5-A10 ZPTB25-B-A8 59 123 60.5 56.5 95 120.5 124.5 39 93 ZPTB40-B5-A10 66.5 156.5 69 159 70.5 160.5 77 ZPTB50-B5-A10 76.5 166.5 79 169 80.5 170.5

MGG

Stroke (mm) 200st 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 60 10 20 30 40 50 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGL 40Stroke 4 (Ball bushing type) 800st Deflection Y (mm) 3 700st 600st 2 500st 400st 1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(N) 10 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 6 (Slide bearing type) 5 800 st 700 st 4 600 st 3 500 st 2 300 st 400 st st: Stroke (mm) 1 200 st 100 st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM50Stroke 8 (Slide bearing type) 7 Deflection Y (mm) 6 1000 st 5 900 st 4 800 st 700 st 3 600 st 2 400 st 500 st st: Stroke (mm) 100 st 200 st 300 st 0 1 0

•

Flat type Flat with rib (mm) Flat type Flat with rib (mm) M_I F ..,01 H:t.Ij)(1 1t1ol8_125 y Mo\lel fA "B C 0 . EL F HJ,46 x l H:Mf!

AC Servo Motor Driver

PULSE F 10m max.

Tie-rod Type Hydraulic Cylinder

h ZZ 40 66 185 55 25 92 211 50 73 201 60 28 99 227 1/4 stroke 63 80 212 65 30 106 238 80 90 236 80 32 116 262 100 100 258 100 35 123 281 1/5 stroke 125 100 261 100 35 123 284 160 108 290 120 38 131 313 400 CHA Series Tie-rod Type Hydraulic Cylinder Double Acting/Single Rod Foot type: CHAL H 2 x Rc P CHQ A MA K F GA T a M GB V Cushion adjustment screw Air release 4 x J CHK R (max.)

Compact 5-Port Solenoid Valve

ZK2 Combination Manifold n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 82.1 91.1 100.1 109.1 118.1 127.1 136.1 145.1 154.1 163.1 172.1 181.1 190.1 199.1 208.1 L2 61.4 70.4 79.4 88.4 97.4 106.4 115.4 124.4 133.4 142.4 151.4 160.4 169.4 178.4 187.4 L3 123 123 135.5 148 148 160.5 173 185.5 185.5 198 210.5 210.5 223 235.5 248 L4 112.5 112.5 125 137.5 137.5 150 162.5 175