1.1

[Dustproof filter set] q This dustproof filter is secured with hook-and-loop tape.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

MB1

1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.

ARM10/11

1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No. Material Description Description q w e r t y u i o !0 !

ARM10/11

1 u q SMC o A Component Parts Replacement Parts Part no. No. Material No. Material Description Description q w e r t y u i o !0 !

Vacuum Pad

122 10 20 D 11 21 E 23 51 D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Vacuum Pad

122 10 20 D 11 21 E 23 51 D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Vacuum Pad

122 10 20 D 11 21 E 23 51 D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Vacuum Pad

122 10 20 D 11 21 E 23 51 D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

CQS

Rear flange Long stroke Standard stroke (mm) Without auto switch With auto switch Without/with auto switch Long stroke (mm) Bore (mm) Standard stroke (mm) B L L1 A B L L1 A B L L1 17 17 19.5 22.5 A 12 16 20 25 24 25.5 28.5 32.5 13.5 13.5 14.5 15 32 32 41 44 51 51 63.5 67 14 15.5 18.5 22.5 3.5 3.5 4.5 5 22 22 29.5 32.5 31 31 42 45.5 14 15.5 18.5 22.5 3.5 3.5 4.5 5 26 26 32 35.5 35 to 100 35

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

1.63

position is changed, go back to step q.

Compact Cylinder Series CQS

Stroke range Bore size Stroke range Bore size Long stroke Rod end male thread 31 to 199 12, 16 31 to 199 12, 16 Rubber bumper Stroke range 20 51 to 199 20 51 to 199 Rubber bumper is standard equipment for long stroke type. 25 51 to 299 25 51 to 299 Part no.: CQSB25-47D-XB10 Makes 47 stroke tube. B dimension is 69.5 mm. Part no.: CQSB25-47D CQSB25-50D with 3 mm width spacer inside.

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

Compact Manifold Regulator

1 q SMC o A Component Parts Description Replacement Parts Part no. Material Note Material No. Description No.

45

Manifold block assembly q (Metric size) SX5000-51-2A (Inch size) SX5000-51-16A R, P port SX3000 (Metric size): With One-touch fittings for 8 (Inch size): With One-touch fittings for 5/16" R, P port SX5000 (Metric size): With One-touch fittings for 10 (Inch size): With One-touch fittings for 3/18" SUP/EXH block assembly (Metric size) SX3000-51-2A (Inch size) SX3000-51-16A w End block assembly

CV/MVGQ

G Bore size (mm) LL MM N Q S W H ZZ d e f h With rod boot Without rod boot l ZZ RS H A 40 50 63 80 100 86 83 83 84 85 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 38 43.5 49 63 73 84 90 98 116 126 8 0 0 0 0 51 58 58 71 72 221 231 239 271 283 52 58 58 80 80 43 52 52 65 65 15 15 17.5 21.5 21.5 59 66 66 80 81 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 229 239

VQ5000

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures