Hydraulic

4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) M8 x 1.25 9.5 depth 5.4 20 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 M10 x 1.5 9.5 depth 5.4 25 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 M12 x 1.75 11 depth 6.5 32 61

F

20.9 55 22 57.4 5/16 3/8 KQU09-U02 17.46 15.2 51.5 15.2 45.5 18.5 6 12 38 KQU12-U03 22 20.9 61 20.9 55 22 57.4 3/8 1/4 KQU11-U02 19.05 17.9 56.5 17.9 50.5 21 7 12 12 KQU12-U04 22 20.9 62.5 20.9 54.5 22 57.4 3/8 3/8 KQU11-U03 19.05 17.9 56.5 17.9 50.5 21 7 3/8 1/2 KQU11-U04 22.23 17.9 59 17.9 51 21 7 1/2 1/4 KQU13-U02 22.23 21.7 61 21.7 55 22 9.6 1/2 3/8 KQU13-U03 22.23 21.7 61 21.7 55 22

Rotary Clamp Cylinders

There is no need to place the suffix -61 to the end of part number. 61 D-F79F(Example) Flexible specification Note 3) 1 m (M): D-M9W, D-M9A(V) Contact Protection Box: CD-P11/CD-P12 Internal Circuit D-A9/A9V, A7(H)(C), A80(H)(C), A79W type The above auto switch type does not have a built-in contact protection circuit. q Where the operation load is an inductive load

Magnetically Coupled Rodless Cylinder

(Not available 0.5 m) Note 3) To designate solid state switches with flexible specifications, add -61 after the lead wire length. Specifications CD-P12 CD-P11 Part no.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

75 95 60 70 78 100 125 138 155 8 8 12 12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 114 136 167 190 211 237 264 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Double clevis style: (D) A clevis pin and 2 cotter pins are included.

KR

(mm) Connection thread R Model L1 L2 D1 Applicable tubing KRW06-02S KRW06-01S 1 8 26 41 67 30 47 74 66 76 145 10 42.5 40 46 48 43.5 49.5 51.5 56.5 58.5 65 57.5 59.5 66 10 20 48 46.5 1 4 17 4.0 14 17 12 14 17 12.8 6 8.6 KRW06-03S 47 14.2 3 8 1 8 KRW08-01S KRW08-02S KRW08-03S KRW10-02S KRW10-03S KRW10-04S KRW12-02S KRW12-03S 1 4 3 8 1 4 3 8 1 2 1 4 3 8 51 52.5 59.5 61 66 62 63.5 15.2 12 23

2/3 Port Valve

69 79 Q 39 39 N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Q 23 23 Energized closed VXD2142 47 47 48 65 78 86 42 46 56 52 56 66 104 (116) 44 59 66 28 35 40 3 8 8 14 29 37 43 34 43 47 20 20 23 92 92 95 59 59 62 30 30 35 57 74 81 34 51 58 39 63 80 90 26 3 8, 1 2 32.5 17.5 20 45.5 118 (136) 3 4 VXD2150 VXD2260 1 VXD2152 VXD2262 25.5 41.5 36.5 49.5 133 (150) ( ): N.O. 4.1-24 VXD21/22/

IIIIIII

f3(t 5l o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

Combination Cylinder

Single Rod Series CLA Double Clevis/CLAD CL MLG CNA CNG MNB CNS (mm) Stroke range (mm) Bore (mm) A AL B B1 BN BP BQ C CD CX CZ D E F GA GB GC GD H1 GL GR CLS W/o rod boot W/ rod boot +0.3 +0.1 40 50 63 80 100 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 129 140 44 52 64 78 92 10 12 16 20 25 15 18 25 31.5 35.5 29.5 38 49 61

Hygienic Design Cylinder Series HY

Mass (g) Applied retaining ring 40 60 70 130 Df8 L d l m t -X HY-E03SUS HY-E04SUS HY-E05SUS HY-E06SUS 32 40 50 63 10 12 12 16 53 60 68 78 9.6 11.5 11.5 15.2 46 53 61 71 2.3 2.3 2.3 2.3 1.2 1.2 1.2 1.2 C type for shaft 10 Df8 d C type for shaft 12 Individual -X C type for shaft 12 t l t C type for shaft 16 L Technical data Note 1) One clevis pin is attached with two retaining rings.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

VQC 50 51 52 53 54 55 56 57 58 59 Connector cable for M12 waterproof connector (Female side) L dimension 723 735.5 748 760.5 773 785.5 798 810.5 823 835.5 VQZ Mass (g) 130.1 132.4 134.6 136.9 139.1 141.4 143.6 145.9 148.1 150.4 No. 60 61 62 63 64 65 66 67 68 69 Connector manufacturers' example Correns Corp. OMRON Corp. Yamatake-Honeywell Corp. Hirose Electric Co., Ltd. DDK Ltd.

Compact Cylinder Series CQS

74 83 92 315 273 129 146 188 231 121 137 20 632 567 93 503 106 119 132 144 157 439 182 208 311 375 170 195 25 800 958 721 643 150 166 182 197 213 564 134 245 277 406 485 1116 229 261 Additional Mass (g) Bore size (mm) 12 16 20 25 1.5 3 6 12 Male thread Nut Rod end male thread 1 2 4 8 Rubber bumper (No need to add for long stroke) 0 1 2 3 Foot style (Including mounting bolt) 55 (53) 65 (61

AC Servo Motor Driver (CC-Link Type ）

Torque limit delay time can be set in the parameter No.PD26. 15 61 15. INDEXER POSITIONING OPERATION 15.9 Home position return mode 15.9.1 Outline of home position return Home position return is performed to match the command coordinates with the machine coordinates. In the incremental system, home position return is required every time input power is switched on.

AC Servo Motor Driver (CC-Link Type ）

Torque limit delay time can be set in the parameter No.PD26. 15 61 15. INDEXER POSITIONING OPERATION 15.9 Home position return mode 15.9.1 Outline of home position return Home position return is performed to match the command coordinates with the machine coordinates. In the incremental system, home position return is required every time input power is switched on.

Mechanical Valves Series NVM, NVFM, NVZNI

f3(t 5l o.24 /61 Millimeters in Parentheses f4q 5l 1.20 fi5) 0.12 /3) 1.54 lAt\ 1.28 '"2 5l 0.96 'tL 6l 0.06 /eol 1.95 3.23 Millimeters in Parentheses NVM120-N01-34 130-N01-34 NVMl20-N01-33 130-N01-33 F .

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

lock V7 113.5 153.5 80 120 14 14 679 LEFS Series AC Servo Motor Dimensions: Motor Parallel LEFS40R With lock/LEFS40V8-B X W (2.4) 6H9 ( ) depth 7 +0.030 0 4 x M8 x 1.25 thread depth 13 Encoder cable (7) Motor cable (7) 58 Z Body mounting Note 1) reference plane 74 153 7 6H9 ( ) depth 7 +0.030 0 60 106 (170) Stroke end of the motor side L A (Table traveling distance) (86) 90 86 62.4 13 60 61

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Moment resistance*1 *2 Table displacement*1 61% Improved by up to 50% Reduced by up to With internal battery-less absolute encoder Restart from the last stop position is possible after recovery of the power supply.

15

LEC Y Motorless Motorless Dimensions [mm] LAT Size Stroke range [mm] B C D EH EV H J K L M O1 R S T U LZ 25 15 to 100 89.5 13 20 44 45.5 M8 x 1.25 24 17 12.5 34 M5 x 0.8 8 45 46.5 1.5 105 to 400 114.5 LC3F2 32 20 to 100 96 13 25 51 56.5 M8 x 1.25 31 22 16.5 40 M6 x 1.0 10 60 61 1 105 to 500 126 * The L measurement is when the unit is at the retracted stroke end position.

Integrated Controller

Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 37 How to Order p. 43 Specifications p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61

Thermo-chiller/Rack Mount Type

/64 61/64 Accessories18 Power supply connector, Particle filter element and maintenance handle19, Operation manual Weight10 [kg] 40 46 1 No condensation should be present.