AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

After Overload 2 (51) occurred, turn 1. Reduce load. 2. Check operation pattern. 3. Use servo motor that provides larger OFF/ON the power supply to clear the alarm. Then the overload operation is repeated. output. 8 9 8. TROUBLESHOOTING Display Name Definition Cause Action 51 Overload 2 Machine collision or the like caused max.

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

ZX

Filter unit (F) ZX100-K6-F 1 41 51 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 1 10 19 8.8 4.8 Filter unit (Mounting hole) 13-2-51 51 Series ZX Air supply for release valve pilot Air supply for supply valve pilot Vacuum pad connection V port Valve Unit: Type K8 Vacuum switch (ZSE2) Pilot exhaust PE port Configuration and combination Valve unit (K8) + Adsorption confirmation switch (ZSP1) Filter

Vacuum Module Series ZX

Philips screw M2.5 x 51 How to order (2) Adsorption confirmation switch unit (For replacement) Single How to order (4) Digital vacuum switch unit (For replacement) Philips screw M2.5 x 51 How to order (3) Vacuum switch unit (For replacement) Philips screw (M2.5 x 39) Filter unit (For replacement) How to order (1) Valve unit (Supply valve: N.O.)

KJ

How to Order KQ2 H 05 S 02 With thread seal One-touch fittings Nil Without seal S With thread seal Applicable tubing O.D.

Table of Contents

96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R50 25 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94

1.1

Note 2) If clear water is to be used, please use water that conforms to Clear Water Quality Standard of the Japan Refrigeration and Air Conditioning Industrial Association (JRA GL-02-1994 cooling water system circulating type make-up water). Deionized water can be used only for supply water. Supply water with electrical conductivity of 1 S/cm or more.

CL

CXS Rear flange With rod boot Without rod boot CXT Bore (mm) ZZ 182 198 201 227 ZZ 202 220 223 247 MX 20 25 32 40 MXU Front trunnion/CLG1UN Front trunnion MXS With rod boot Without rod boot Bore (mm) BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z 46 51 51 62 TT MXQ Z 66 73 73 82 20 25 32 40 0.025 0.047 69.5 31 40 47 47 54 3.2 3.2 4.5 4.5 47.8 42 42 48 56 59.6 8 10 10 10 10 51 26 28 28 36 5.5 5.5

Combination Cylinder

CB Rear flange With rod boot CV/MVG Without rod boot Bore (mm) ZZ 202 220 223 247 ZZ 182 198 201 227 CXW 20 25 32 40 CXS Front trunnion/CLG1UN Front trunnion CXT With rod boot Without rod boot Bore (mm) TT BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z 46 51 51 62 MX Z 66 73 73 82 20 25 32 40 0.025 0.047 8 10 10 10 10 28 28 28 30 5.5 5.5 6.6 6.6 51 26 28 28 36 69.5 31 40 47 47 54 3.2 3.2 4.5 4.5

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SYJ312 SYJ322 SYJ332 SYJ342 SYJ352 SYJ314 SYJ324 SYJ334 SYJ344 SYJ354 SYJ313 SYJ323 SYJ333 SYJ343 SYJ353 2 position 0.9 (0.05) 5 Port Body ported type M3 0.5 50 54 3 position 59(33) 73(47) 61(35) 77(51) 2 position 5 Port Base mounted type (With sub-plate) 1.8 (0.1) Body ported type M5 0.8 76(50) 80(54) 3 position 33 47 35 51 2 position 4 Port Base mounted type For manifold use only Note1

Air Cylinder

to 100 st 101 to 125 st 126 to 200 st 20 46 131 156 181 25 51 136 161 186 211 32 51 138 163 188 213 40 62 155 180 205 230 Bore size 1 to 50 st 51 to 100 st 101 to 125 st 126 to 200 st Z ZZ Z ZZ Z ZZ Z ZZ 20 118 139 143 164 168 189 25 123 144 148 169 173 194 198 219 32 126 150 151 175 176 200 201 225 40 143 171 168 196 193 221 218 246 Constructed of pins, flat washers and hexagon socket

Speed Controller with Indicator

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

smcmaintenancepartslist

Float type Note 5) AD27 Y200 AKM2000-01 (02) IS1000M-20 Y210-01 (02) AD17 Y100 AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 auto drain Spacer Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03

Modular/F.R.L. Units Series AC

AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 Float type auto drain Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y500 Y600 Spacer Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 VHS50-06 10 VHS20-01 02 VHS30

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

63 RQ m1: Weight of cylinder operating part kg m2: Load weight kg V: Piston speed m/s 10 50 MU 40 32 5.0 4.0 3.0 (g) Table (2) Weight of Cylinder Movable Parts/Without Built-in Magnet D25 Cylinder stroke (mm) 2.0 Bore size 20 16 (mm) 5 10 15 20 25 30 35 40 45 50 75 100 -X 1.0 5 6 7 8 10 11 12 12 209 11 13 15 17 19 16 0.5 0.4 0.3 15 18 21 24 27 31 34 37 40 44 20 Data 24 28 33 37 42 46 51

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

R2 P Manual override 8.5 34 63.8 13.8 (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 57.5 [64.5] + 42.1 25.5 20 12 22 22 11.5 18 1/4 (R1, R2 port) 31.5 34 63 L plug connector (L): 10-SYJ7 43-L3 4 5 01 02 M plug connector (M): 10-SYJ7 43-M3 4 5 01 02 DIN terminal (D, Y): 10-SYJ7 43D Y3 4 5 01 02 M8 connector (WO): 10-SYJ7 43-WO3 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 19 (20) AS32l1FG-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS32l1FG-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-10(S)A 10 15.9 26.7

Modular Type Regulators Series AR

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Option Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30 AR 25

HRX-OM-M090

5.17.1 Data reset function . 5-51 5.17.2 Method of resetting data reset function . 5-51 5.18 Accumulated time reset function . 5-52 5.18.1 Accumulated time reset function . 5-52 5.18.2 Method of resetting accumulated time reset function . 5-52 5.19 Communication function . 5-54 5.19.1 Communication function . 5-54 5.19.2 Communication function setting and checking . 5-54 Chapter 6 OptionOptional

HRX-OM-R016

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M