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03 04 SUP blocking plate VVQ5000-16A-1 P R1 EXH blocking plate VVQ5000-16A-2 R2 Rc3/8 03 Rc1/2 04 Bottom ported Rc1/2 04 Description/Model Stations 1 2 3 4 5 6 7 8 9 10 11 12 Notes Applicable valves and options Part No.

)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve 6 VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter 6 E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06-A 10-A 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter 6 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer 6 Y14-M5-A Y24

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

04 ANA1-04 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 AN40-04 ANA1-04 SRF ITV Note 1) In the case of options GN, two pressure gauges and one silencer are included in the same container as accessories.

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

03 04 VVQ5000-P-1(Plug-in type) VVQ5000-P-5(Plug lead type) 179 (Plug-in type) 133 (Plug lead type) 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug llead type Individual EXH spacer 03 04 03 04 VVQ5000-R-1(Plug-in

Series: 5 (VP500), Body: 4 (Base Mounted), Pilot: Internal Pilot, Voltage: 5 (24 VDC), Electrical Enty: D (DIN Terminal), Light/Surge Suppressor: Z (w/Light/Surge Voltage Suppressor), Port Size: 03 (3/8"), Thread: Rc, Safety Limit Switch/Wiring: S1 (M12 Connector, Made by Rockwell Automation), with Check Valve, External Pilot Only: Check Valve: None; Applicable Tube: None, Throttle: Variable

Series: VP500, Body: Base Mounted, Pilot: Internal Pilot, Voltage: 24 VDC, Electrical Enty: DIN Terminal, Light/Surge Suppressor: w/Light/Surge Voltage Suppressor, Port Size: 3/8", Thread: Rc, Safety Limit Switch/Wiring: M12 Connector, Made by Rockwell Automation, with Check Valve, External Pilot Only: Check Valve: None; Applicable Tube: None, Throttle: Variable Throttle

Applicable model t ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 2 Minimum C Factor of a Supply Valve Model C[dm3/(sbar)] ZH05A 0.12 ZH07A 0.23 ZH10A 0.47 ZH13A 0.80 ZH15A 1.06 ZH18A 1.53 ZH20A 1.88 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 1 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 t 2.

How to Order Sub-plates 04 P VQ5000 Electrical entry Port size Replacement of pilot valve assembly (Voltage) Refer to pages 2-6-40 to 2-6-41 for pilot valve assembly part numbers. Refer to page 2-6-3 for replacement method. 04 Rc 1/2 Porting specifications P S Plug-in conduit terminal Plug lead Note1) For bottom ported, port size is Rc 1/2.

Y . u , E 37 | 1/2" NPT M6 0 t 02 03 04 M 6 x 1 . 0 PT1/8 Pr1/4 PT3V8 PT1/2 a a a a a o a a a a a a a a a a a o a a a a a a a a a a a o a a a a a a a a a a a r a a a a a a a r a a a a a a a a o a r a o a a a The use of compact spacer with bracket reduces the total assembled space.

(This is not applicable to VHS40) Body Size Symbol Port Size Body Size 20 30 40 02 03 04 1/4 3/8 1/2 Effective area (mm2) 5 5 Model VHS20 VHS30 Note: Other sizes, thread forms, options, etc. may be possible, please contact SMC for availability.

12 One-touch Screw-in One-touch 03 04 04 Screw-in Screw-in Screw-in ZH20DA11 13 13 One-touch One-touch One-touch 11 N04 13 One-touch Screw-in One-touch N03 N04 N04 Screw-in Screw-in Screw-in 4 Screw-in: NPT female threads 3 Screw-in: Rc female threads 223

Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i s not bei ng used, prevent i t f rom t ouchi ng t he ot her w i res as t hi s can cause a m al f unct

Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i s not bei ng used, prevent i t f rom t ouchi ng t he ot her w i res as t hi s can cause a m al f unct

Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i s not bei ng used, prevent i t f rom t ouchi ng t he ot her w i res as t hi s can cause a m al f unct

Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i s not bei ng used, prevent i t f rom t ouchi ng t he ot her w i res as t hi s can cause a m al f unct

Description Model ALDU900 ALD900 ALDU600 ALD600 126044P 113449 Note 1) 113543 Note 2) Bracket 126130P 126044P 126130P Panel 12661P 12651-1P IS430-1 IS420-1 IS430-1 IS420-1 Float switch S1 ALD600 IS430-2 IS420-2 IS430-2 IS420-2 S2 Note 1) Bracket for filter mounting: For Rc 1 ,1 Note 2) Bracket for filter mounting: For Rc 2 Thread machining on filter body is needed. } 1 4 1 2 How to Order

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The series may be used as either a selector valve, or a divider valve.  It is vacuum applicable up to –101.2kPa.  Series VP3145/3165/3185 is a large size, 3 port solenoid valve with a rubber seal.  It is possible to use the series in vacuum