3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

VEX1

They conform to JIS B 8372 (Air pressure regulator).

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

HRX-OM-W038

Optuon B ventilation air outlet Earth leakage breaker Handle Lid for circulating fluid fill port (There is a handle on the other side too.)

HRX-OM-O021

How to see the manufacturing code P O 001 January 2011 O O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2011 P Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2012 Q 2 P 2013 R 3 Q Fig. 1-3 Position of product label 1.4.2 Earth Label Fig. 1-4 Earth label HRS Series 1.4 Other Labels 1-5 HRX-OM-O021

IDX-OM-W032

R407C(HFC) 42010g 73010g 55010g 67010g R1 R1-1/2 R2 10mm 1 2 54kg 62kg 100kg 116kg 1ANR 2065% 2 3 30mA 4() 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDFA Series 6-1 6 1 IDX-OM-W032 6 6-3 IDFA22EIDFA37E IDFA55EIDFA75E mm A B C D E F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698 93

HEC-OM-S019

Mar Q QQ RQ SQ . ZQ AQ BQ . Feb P QP RP SP . ZP AP BP . May S QS RS SS . ZS AS BS . Aug V QV RV SV . ZV AV BV . Jan o Qo Ro So . Zo Ao Bo . Nov y Qy Ry Sy . Zy Ay By . 2012 2013 2014 . 2021 2022 2023 . Year Jun T QT RT ST . ZT AT BT . Dec Z Qz RZ SZ . ZZ AZ BZ . Apr R QR RR SR . ZR AR BR . Jul U QU RU SU . ZU AU BU . Month Q R S . Z A B . Oct X QX RX SX . ZX AX BX .

IDX-OM-W034

SIZE PORT SIZE B G H D E WITH LAMP SWITCH DRAFT AIR OUTLET THERMOMETER EVAPORATION BALL VALVE BLOCK TERMINAL AUTO DRAIN F C VENTILATION VENTILATION [DIA.911]) (WIRE DIA.0.4 ENTRY HOLE POWER CORD DRAIN TUBE LENGTH39.4[1000] J N M K L P [4XDIA.13] 4XDIA.0.5 (SIZE OF RECOMMENDED BOLTM10) A B C D E F G H J K L M N P Q R Model Port Size Dimensions (inch [mm] ) 31.5 [800] 34.2 [868] IDFB55E 2 1.4

IDX-OM-W031

IDFA Series 6-1 Specifications 6 1 IDX-OM-W031 Air Dryer 6 References 6-3 Dimensions IDFA22EIDFA37E IDFA55EIDFA75E Measuremm Model Port Size A B C D E F G K L M N P Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680 IDFA55E R2 470 855 800 (128) (273) (868) (110) 13 500 75 700 526 (110) 519 IDFA75E 900 (968) IDFA Series 6-3 Dimensions 6 2 IDX-OM-W031 Air Dryer

VXD

B Grommet 100 VAC With surge voltage suppressor 12 One-touch fitting C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC 6 25A N.C. N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 03 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ VP Conduit terminal

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(For details, refer Best Pneumatics Vol. 1.) 5-2-4 3 5 Port Air Operated Valve Series SYA3000/5000/7000 Flow Characteristics/Weight Model/Series SYA320 (Body ported) Port size Flow characteristics Weight (g) Pilot port size (Nominal size) Valve model Type of actuation C (dm3/(sbar)) b Cv C (dm3/(sbar)) b 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Cv P, EA, EB A, B 35 37 Single Double 2 position

5 Port Solenoid Valve, Series VQC

VQC4000 VVQC4000-2A-1 Thread type Nil F T Rc G NPT/NPTF 22 Manifold Specification Sheet Series VQC1000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 1 1 08 FD1 B C6 F P T Kit / / 1 2 3 8 VV5QC 1 1 08 SDQ B C6 S Kit Fill out for I/O serial kit only.

3 Port Air Operated Valve Series SYJA300 1

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

VP4

VFR VP450 VP470 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 82 (3 position: 98.5) 129 VZS 71(95.5) VFS 139.5 B A B A VS4 VQ7 (External pilot port) 1/8 (External pilot port) 1/8 EVS VFN A B B A B B B A EA P EB P EA EB ( ): Port size 3/4, 1 Dimensions: Port

HRX-OM-R005

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

Coolant Valve: Air Operated/External Pilot Solenoid VNC Series

1 2 4 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Symbol A: Non-locking push type A (projecting) N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa 4 1 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz Valve size 1 7 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC

VXF2

A B 1 2 3 4 20A NBR/POM Without Grommet 25A NBR/POM A With A Direct piping type 40A 24 VDC 50A A B Direct piping type B C D E F G H J K L M N P Q R S T U V W 65A 5 100 VAC Grommet Flange type with surge voltage suppressor 110 VAC A B C D Direct piping type 200 VAC Flange type 230 VAC 80A 6 Flange body I type 24 VDC Flange body II type 24 VDC DIN terminal with surge voltage suppressor 100

IDX-OM-V024

Disconnect the jumper wire from the remote terminal B (terminal number 6-7) and connect the switch. Automatic return switch (momentary switch).

VPA4

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.