Manifold Specifications

Rc 1 4 VVZS3000-R-02-1 VVZS3000-R-02-2 Body type Plug-in type VVZS3000-10A-1 Non plug-in type VVZS3000-10A-2 Part no. Body type Plug-in type ARBZS3000-00-P-1 Non plug-in type ARBZS3000-00-P-2 Part no. Note) Apply pressure from the P port of the base to operate the interface regulator.

Plug-in/Plug Lead: Single Unit

n 9 445 465 8 404 424 L1 L2 7 363 383 6 322 342 5 281 301 4 240 260 3 199 219 2 158 178 1 117 137 12 568 588 11 527 547 10 486 506 2-6-33 Base Mounted Series VQ5000 Manifold Option Parts Blanking plate assembly 170 (Plug-in type) VVQ5000-10A-1 (Plug-in type) VVQ5000-10A-5 (Plug lead type) 124.5 (Plug lead type) It is used by attaching on the manifold block for being prepared for removing

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Blanking plug (with O-ring) 1 VVCC12-10A-1 For 2 port valve Hexagon socket head plug (R1/4) 1 Blanking plug (with O-ring) 1 VVCC13-10A-1 For 3 port valve Hexagon socket head plug (R1/4) 2 9 VCC Series Specifications VCC12 VCC13 VCC12D Model Passage number 2 port 3 port Note 3) 2 port (Diaphragm type) Construction (Fluid contact material) Poppet seal (PEEK resin + Stainless steel) + Special

S070

Ports S070B-5BG 3 set 3 port 3 SS070B-10A 1 set Blanking plate assembly no. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Prefix the symbol to the solenoid valve part number.

S070

Ports S070B-5BG 3 set 3 port 3 SS070B-10A 1 set Blanking plate assembly no. Prefix the symbol to the solenoid valve part number. Port size OUT port Symbol SUP/EXH port (Applicable tubing) Applicable tubing Write sequentially from the 1st station on the D side.

3 Port Solenoid Valve

S070B-5BG 3 set Ports SS070B-10A 1 set Blanking plate assembly no. 3 port 3 Prefix the symbol to the solenoid valve part number. Port size Write sequentially from the 1st station on the D side.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Manual override P L 5 24 VDC 02 Rc 1/4 (8A) Rc 3/8 (10A) 9 Other 03 3-9-1 2 Series VS410 Accessory (Option) Apparent Power (Power Consumption) 1.

Direct Operated Solenoid Valve Metal Seal Series VS4
10

Manual override P L 5 24 VDC 02 Rc 1/4 (8A) Rc 3/8 (10A) 9 Other 03 3-9-1 Series VS410 Accessory (Option) Apparent Power (Power Consumption) 1.

IDX-OM-W038

5A 5A 15A 10A 10A 180/200W 50/60Hz 385/440W 50/60Hz 220W 420W 0.01m (99.9%) 6) 2 0.3m3.5/LANR PID / R134a/0.14g R134a/0.26g ()7) 52dB (A) 55dB (A) () 26kg 37kg 10mm 12 CE 1 ANR2065% 2 3 4 0.5 5-5%+10% 6 7 1m1m 6.2 GWP ( G W P) GWP ) Regul at i on ( EU ) N o 517/2014 I PCC AR4 ) R134a 1, 430 1, 430 R404A 3, 922 3, 920 R407C 1, 774 1, 770 R410A 2, 088 2, 090 1 2 61 IDH Series

Air Cylinder Series CA2

CJP CX CZ U K A N F N h + l S + Stroke H L C B Z + Stroke RR ZZ + l + Stroke CJ2 ZZ + Stroke Double clevis and double knuckle joint types are packed with pins and retaining rings.

A_HEC-OM-K001

(mgFe/L) 1.0 or less Copper (mgCu/L) 0.3 or less Sulfide ion (mgS2-/L) None detected Ammonium ion (mgNH4+/L) 1.0 or less Residual chlorine (mgCl/L) 0.3 or less Free carbon (mgCO2/L) 4.0 or less Connect fittings to connecting ports WATER IN and WATER OUT of Heat Exchanger unit to connect input/output hoses of facility water.

Electromagnetic Digital Flow Switch

Model Flow range 0.5 L/min 2 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 0.5 L/min 20 L/min LFE1 0.4 L/min 24 L/min 0.4 L/min 24 L/min 2.5 L/min 100 L/min LFE2 2 L/min 120 L/min 2 L/min 120 L/min 5 L/min 200 L/min LFE3 4 L/min 240 L/min 4 L/min 240 L/min Rated flow range Display flow range Set flow range 21 These safety instructions are intended to prevent hazardous situations

Compact Manifold Regulator

AXT100-DR7 L dimension Select L dimension from the table below and enter an applicable symbol.

Booster Regulator/Air Tank

min (ANR)) Outlet air flow rate (L/min (ANR)) Outlet air flow rate (L/min (ANR)) Pressure Characteristics Pressure Characteristics Pressure Characteristics Inlet pressure: 0.7 MPa Outlet pressure: 1.0 MPa Flow rate: 20 L/min (ANR) Inlet pressure: 0.7 MPa Outlet pressure: 1.0 MPa Flow rate: 20 L/min (ANR) Inlet pressure: 0.7 MPa Outlet pressure: 1.0 MPa Flow rate: 20 L/min (ANR) (Representative

Booster Regulator/Air Tank

VEX SRH Product Not Applicable to the ASME Standard ASME Standards Compliant Product SRP VBAT 05 N A 1 E V X105 Product not applicable to the ASME standard VBAT 05 N 1 A X11 SV SRF ITV Tank internal capacity Tank capacity Option Symbol Internal capacity 05 5 L 10 10 L 20 22 L 38 38 L Material Option IC Symbol Option Nil None V Drain valve Symbol Internal capacity 05 5 L 10 10 L Symbol Option

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

ARM10/11

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

AC Servo Motor Driver (Network card type ）

10A 20 Note 1.

AC Servo Motor Driver (CC-Link Type ）

(b) Cable internal wiring diagram MR-J3ENCBL2M-L/-H MR-J3ENCBL5M-L/-H LE-CSE-RA LE-CSE-SA LE-CSE-SB LE-CSE-RB MR-J3ENCBL10M-L/-H Driver Encoder side Servo amplifier connector side connector P5 LG 1 2 3 P5 6 LG MR MRR MR MRR 3 4 5 4 BAT BAT 9 2 Plate SD 9 SHD 13 6 13.

A_HEC-OM-I009

Range A l l o w a b l e L o w e r Setting range : 0.1 to 10.0 C Min. increment : 0.1 C Indicated content : Temp. from target to lower limit T e m p . R a n g e M O D E < 1 . 5 C (Ex. : 1.5 C) Function : Sets lower limit of temp. where the warning arises. The difference between target temp. and lower limit temp. should be input.