Made to Order CA2 series GB Stroke A Stroke B (mm) Q S ZZ GB Bore size 40 50 63 80 100 29 53 167 269 ZZ + Stroke (A + B) S + Stroke (A + B) Q 33 59 179 295 33 61 195 311 41 73 231 373 41 79 251 395 L CBA2 series B port D port C port A port (mm) L Q S ZZ GC Bore size (mm) 40 50 63 80 100 42 12 66 180 282 Q GC Stroke B Stroke A 48 14 74 194 310 48 14 76 210 326 S + Stroke (A + B) 58 16 90 248 390 ZZ + Stroke
e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.
w e q w VQC1100 VQC1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4
A 24 VDC 5 Size 2 B E A B 4 N.C. Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet 7 N.O. 110 VAC With surge voltage suppressor 200 VAC Size 3 C F A B 5 N.C.
Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.
4 (B) 2 (A) 4 (B) 2 VQC4101 VQC4100 VQC4101 VQC4100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500
Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to
R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ1230D Double (double solenoid): SQ1231D y e e q w y e e q w SQ1231D SQ1230D (A)(B) (A) (B) 4 2 4 2 5 13 5 1 3 (R1) (P)(R2) (R1)(P)(R2) u u 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 SQ1331 SQ1330 (A)(B) (A)(B) y e e q y e e q w w 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ1431 SQ1430 (A)(B) (A)(B) 4 2 4 2 5 1 3 (R1) (P)(R2)
-05 48 7.5 19.7 Block separation lever B B B B 111.4 118 102.9 100.4 91.9 A A A A B A B A B A B A Dimensions are the ones for SV1300.
2401 P3 JIS B 2401 P22 JIS B 2401 P5 131545 JIS B 2401 P5 131647 JIS B 2401 P5 131647 JIS B 2401 P5 JIS B 2401 G50 JIS B 2401 P6 JIS B 2401 G55 131336 JIS B 2401 P14 1.5-34 AR1000 to 6060 Dimensions AR1000 to 5060 Panel mounting hole AR1000 to 3060: Max. 3.5t AR4060/5060: Max. 5t AR6060 Model Port size A B C D M N P E F G H J K L Bracket mounting dimensions 25 40 53 53 70 75 90 95 11 15 25
-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B
DL DM HR K Q Q M 20 20 21 28.5 40 B + Stroke L 25 21 21 29.5 41 E A + Stroke With rod end lock DM End lock mechanism Manual release Non-lock type ) ( 24 11 2-M5 x 0.8 4-N through D 1 Flat washer F Q B + Stroke L A + Stroke Rod end male thread H1 Bore size (mm) L1 H1 C1 X Standard stroke 18.5 10, 15, 20, 25 14 12 M8 x 1.25 28.5 20 50, 75, 100 32.5 M10 x 1.25 22.5 10, 15, 20, 25 C1 17.5 15
Example) AF30-03BD-CR-A q r t w e q Symbol 20 30 40 Body size Description Nil N Note 1) Rc NPT G F Note 2) Thread type w + 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Port size e + Nil B Note 3) Mounting a Without mounting option With bracket Option Semi-standard + r Nil C Note 4) D Note 5) Float type auto drain b Without auto drain N.C.
7 @1 q B B !9 B-B !5 !8@8 e r t !2 !1 @3 @5 o A @4 A A-A !4 @2 @0 !0 w !3 @6 Component Parts No.
5 q !9 !8 @7 RE A B REC CX CY MQQ M RHC MK(2) RS Q G @2 !7 @6 #1 #0 @8 !0 @9 !1 @0 #2 i !6 @3 @1 @5 @4 RS H A RZQ MI W S CEP1 REAS10 CE1 Component Parts CE2 Material No. Description Note Material No. Description Note ML2B Stainless steel Cylinder tube q !7 Hard anodized Aluminum alloy Plate B Aluminum alloy External slider tube w !
Description Note Hard anodized Material Material Aluminum alloy Note Aluminum alloy Plate B q !
Internal Circuit (Brown) +5 V +24 V TD+ TD0 V q w e r VP R x D/T x D-N DGND R x D/T x D-P SHIELD q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT GND FG DC-DC converter (insulated) GND +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D Power supply for the input and for the control unit of the Gateway +24 V 0 V q w +24 V RD+ RD0 V q w e r INPUT
Model Q R U T Q R 99.5 99.5 20 20 196 231 68.5 68.5 47.5 47.5 20 20 VXF25A< VXF26A< Q R U 196 231 23 23 20 20 202 237 U 16 Series VXF2 Dimensions: Flange type VXF25B<<B B A A C C U S S S J J z300 Q R I 1/2 Exhaust port 24.4 Q z300 1/2 Exhaust port K I R K 24.4 (Y) E H (X) L L H (X) E U (Y) Z Z DIN terminal B A C T Q J