specification), Shape: Standard, Outlet Flow Rate(l/min): 283 ～ 333, Outlet Open Air Pressure Dew-Point(°C): 2.8 ～ 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: NPT, Inlet Air Temperature(°C): 37.8, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: NPT, Control Side Plumbing Thread Nominal: 3/8, Standard size: 3E

specification), Shape: Standard, Outlet Flow Rate(l/min): 283 ～ 333, Outlet Open Air Pressure Dew-Point(°C): 2.8 ～ 10, Exit Flow Rate Class(l/min): Up to 400, Supply Side Connection Type: NPT, Inlet Air Temperature(°C): 37.8, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: NPT, Control Side Plumbing Thread Nominal: 3/8, Standard size: 3E

), Shape: Standard, Outlet Flow Rate(l/min): 200 ～ 283, Outlet Open Air Pressure Dew-Point(°C): 3 ～ 10, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/8, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread Nominal: 3/8, Standard size: 3E

The VN series is a combination of process valves that can be operated with pressure differential zero and comes with many variations. The VNA series is used for controlling pneumatic systems or air-hydro circuits. The VNB series controls various, Process valve, 2 PORT PROCESS VALVE, 0.5 lb

The VN series is a combination of process valves that can be operated with pressure differential zero and comes with many variations. The VNA series is used for controlling pneumatic systems or air-hydro circuits. The VNB series controls various fluids. VNC is used for controlling the cutting oils and coolants used in machine tools. VNH is for controlling high pressure cutting oils and coolants

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Body type Body type Plug-in type Non plug-in type VVFS2000-20A-1 VVFS2000-20A-2 Part no. 1 8 Plug-in type Non plug-in type VVFS2000-P-01-1 VVFS2000-P-01-2 VVFS2000-P-02-1 VVFS2000-P-02-2 Rc Body type Plug-in type Non plug-in type VVFS2000-10A Part no. Part no.

Air Slide Table

For details, refer to page 126. 40 MXQA Series Dimensions: MXQ 20A [Standard] MXQ 20A-mZ Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

VFR

Body type Plug-in type Non plug-in type 1 8 Plug-in type Non plug-in type Body type VVFS2000-20A-1 VVFS2000-20A-2 Part no. Body type Plug-in type Non plug-in type VVFS2000-10A Part no.

VFS

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no. Body type Plug-in type VVFS2000-22A-1 Non plug-in type VVFS2000-22A-2 Part no.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no.

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 SY3000 SY3000-39-20A SY5000 SY5000-39-1A SY7000 SY7000-39-1A SY3000 SY3000-38-20A SY5000 SY5000-38-1A SY7000 SY7000-38-1A Rc 1/4 SY9000 SY9000-39-1A Rc 1/4 SY9000 SY9000-38-1A Series Round head combination screw Gasket Note 1) The SUP port can be on the lead wire side or end plate side for SY3000/5000/7000.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 SY3000 SY3000-38-20A(-Q) SY5000 SY5000-38-1A(-Q) SY7000 SY7000-38-1A(-Q) E5 5 SY3000 SY3000-39-20A(-Q) SY5000 SY5000-39-1A(-Q) SY7000 SY7000-39-1A(-Q) EXH port (Both sides) 1 8 1 4 SY9000 SY9000-39-1A(-Q) 1 4 1 8 1 4 SY9000 SY9000-38-1A(-Q) 1 4 P1 1 SUP port Note) In case of 20P and 23P, for protection of the wiring unit section from drainage, piping at the EA port should

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.

HRS100/150

HECR Circulating fluid return port Rc3/4 HEC Barrel nipple 20A 144 HEB Y-strainer (40 mesh) 20A HED Flow direction HEA Y-strainer (20A) (Accessory) IDH Barrel nipple (20A) (Accessory) 107 HRS100/150 Series Standard Type Recommended External Piping Flow External piping circuit is recommended as shown below. 7 Thermo-chiller 2 Facility water outlet (Water-cooled refrigeration) Facility water

Proposals for Energy Saving

Electrical option Nil None S With surge voltage suppressor L With indicator light Z With surge voltage suppressor/indicator light Body size 4 15A 5 20A 6 25A 7 32A 8 40A 9 50A Refer to Table 2 below for applicability.

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.

VCL

VXA 2 1 VCHm Thread type 1 Rc NPT G Nil N F VDW Voltage VQ 1 2 3 4 7 8 J 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 48 VAC 230 VAC Port size LVM Class 3 v v v Class 2 v v Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 v v v v Symbol 01 02 03 04 06 VCA VCB Please consult with SMC regarding other voltages.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-20A P294030-20A P294030-20A @8 CRA180 Nickel plated Steel wire Needle valve P294040-23 P294040-20 P294040-20 P294040-20 @9 CRA1100 Nickel plated Steel wire Lock nut P294050-23A P294050-20A P294050-20A P294050-20A #0 Corresponding parts o, !

Process Valve

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.

42

VQ7 Restrictor spacer VVQ4000-20A-1 SUP stop valve spacer VVQ4000-37A-1 SUP/EXH block plate VVQ4000-16A (1 pc./set) Interface regulator (P, A, B port regulation) ARBQ4000-00A B P -1 EXH blocking plate (Order qty: 2 pcs.)