Clean Room Regulator/Fluoro Resin Type Series SRF30

(inch size) 11 3/8 SRF30T 11 Tubing SRF30S 07 Integral fittings Pilot port thread type Applicable tube size Inch size (Tubing size regulator port) Metric size (Tubing size regulator port) Nil N Rc1/8 NPT1/8 07 11 1/4 x 5/32 (with plug-in reducer) 3/8 x 1/4 (standard size) 6 x 4 (with plug-in reducer) 8 x 6 (with plug-in reducer) 10 x 8 (standard size) 06 08 10 Note)The reducer method allows

VS 8-2/VS 8-4

Insulation resistance M/km, 20C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 5 or more Note) The minimum bending radius of the D-sub connector cables is 20 mm.

Plug-in Unit

5 D-side end plate assembly Manifold block assembly !6 D-side end plate assembly part no. !7 Manifold block assembly part no.

Fluoropolymer Tubing Variations

KM P.502 P.503 KF M H/DL L/LL KC KK KK130 FEP Tubing (Fluoropolymer) TH/TIH Series Soft Fluoropolymer Tubing TD/TID Series DM Modified PTFE Material FEP Material KDM KB Flexibility improved by approx. 20% (Compared with SMC TL/TIL Series) Suitable for applications which require flexibility. This has better resistance in chemical environments.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

plated M J NBR, Stainless steel 304 D I G F E C Connection thread B A Barb One-touch: M-32F-2, M-04F-2 Applicable tubing (mm) Weight (g) A B C D E M1 M2 Model (O.D. / I.D.)

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: F (G), Port Size: 04 (1/2), Mounting: B (w/Bracket), Silencer: without Silencer, Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: F (G), Port Size: 04 (1/2), Mounting: B (w/Bracket), Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 40 (Applicable AC Size: AC40), Handle Operation: Single Action, Thread Type: F (G), Port Size: 04 (1/2), Mounting: without Mounting Option, Silencer: S (w/Built-in Silencer, EXH Port), Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: G, Port Size: 1/2, Mounting: w/Bracket, Silencer: without Silencer, Handle Color: Black, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: G, Port Size: 1/2, Mounting: w/Bracket, Silencer: w/Built-in Silencer, EXH Port, Handle Color: Black, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC40, Handle Operation: Single Action, Thread Type: G, Port Size: 1/2, Mounting: without Mounting Option, Silencer: w/Built-in Silencer, EXH Port, Handle Color: Black, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Electric Actuator

(E) Retun to origin IN2 D D D ) ) ) ) D D D D ) ) ) ) IN1 D ) ) D D ) ) D D ) ) D D ) ) IN0 ) D ) D ) D ) D ) D ) D ) D ) Position number 1 2 3 4 5 6 7 8 9 10 (A) 11 (B) 12 (C) 13 (D) 14 (E) Retun to origin OUT2 D D D ) ) ) ) D D D D ) ) ) ) OUT1 D ) ) D D ) ) D D ) ) D D ) ) OUT0 ) D ) D ) D ) D ) D ) D ) D ) IN3 D D D D D D D ) ) ) ) ) ) ) ) OUT3 D D D D D D D ) ) ) ) ) ) ) ) 54 Programless

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

D LEC-CSNA-1 11.1 Product no.

Environment

LEF D-M9NAV D-M9NA D-M9BA D-M9BAV D-M9PAV D-M9PA Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry direction LEJ 3-wire 2-wire Wiring type NPN PNP Output type LEL 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage LEM 10 mA or less Current consumption 24 VDC (10 to 28 VDC) Load voltage

42

for D-sub connector cables is 20 mm.

KJ

d (inch) Applicable tubing O.D.

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.