High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

AW

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 372 Filter Regulator Series AW10 to AW60 Filter Regulator with Backflow Function Series AW20K to AW60K Dimensions AW60(K) AW10, AW20(K) Panel fitting dimension J T N D M J T M W Y F S U Bracket (Option) N D IN OUT R Z B C Q V U IN OUT K Plate thickness AW10, AW20(K): Max. 3.5 S OUT Bracket (Option

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

LEC-OM02704CN

W W (UVW) M U V W U V W PE M P1-P2(11kWP1-P) P 1 P 2 (C) 200V3.5kW CNP2P-D PC (13.2) 15 31 15 (2) (a) DO CN6ON/OFF (b) CN6DC24V (c) CN6SDDOCOM CN 6 DOCOM S D 15.4.3 (1) (a) (b) (12.4) (c) (2) 15 32 15 15.5 15.5.1 (1) ON(RYn0) (RYn1)OFF b01(1 ) (A25) ON 3000r/min (2) (RYn1)OFF ON(RYn0) 15.5.2 , 4.11.2 (a) ON(RYn0)OFF (B) (C) (EMG)OFF (AE6) (d) (LSP)(LSN)OFF

Prevents Micro-Bubbles

material: PPS N G A G A D L Non-locking type Locking type 60 K 4-M Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

125

AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF

5 Port Solenoid Valve

D-sub connector kit (25P) with 1.5 m cable MD1 Circular connector kit (26P) with 1.5 m cable FD2 D-sub connector kit (25P) with 3.0 m cable MD2 Circular connector kit (26P) with 3.0 m cable FD3 D-sub connector kit (25P) with 5.0 m cable MD3 Circular connector kit (26P) with 5.0 m cable 1 to 12 stations (12 stations, 20 points) LD1 Lead wire kit, 1.5 m lead wire LD2 Lead wire kit, 3.0 m lead

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

SZ3000

(Max. 20 stations) Symbol 02 Stations 2 stations Supply/exhaust block assembly mounting position Symbol D U B M Valve stations Layout (for special specifications) wq q w e n m Pilot system Symbol Nil R ... ...

VZ5000

G H VK Manual override (Non-locking) (Mounting hole) VZ VF VFR VP4 (Lead wire length) VZS G: 300 mm H: 600 mm 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) VFS VS4 2-Rc 1/4 (5(R1), 3(R2) port) VQ7 EVS (PE port) VFN L plug connector (L) VZ5140-LM plug connector (M) VZ5140-M(Lead wire length) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

AC Servo Motor Driver (Pulse input type/Positioning type ）

H T E d W T D L Max.

•

L M ,. Flat type Flat with rib (mm) Flat type Flat with rib mm M~ .. 'B c l D E Model M 'B C D E F G 1:4 1:6 Y 'A Y .' 1:6 H 1:8 H F G Flat with rib H H Flat Aatwith rib Flat ZPT25g ...

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 12.9 17.5 29.4 12 29.6 33.8 28.8 34.6 9.6 10 7.8 11.7 M5 x 0.8 8 30.1 25.1 6 ASD230FM-M5-06 11.6 13.7 20.6 32.5 13 34.6 6 ASD330FM-01-06S 39.6 14 11.6 13.7 29 22.9 38.5 35.2 30.2 14.2 11.8 10.6 R 1/8 12 32.1 27.1 15.8 33.9 8 ASD330FM-01-08S 38.9 15.2 18.5 31 28.2 44.8 6 ASD430FM-02-06S 12.8 17 53 25.2 43.5 18 8 ASD430FM-02-08S

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note Note Symbol 02 Symbol 02 2 stations 2 stations Note 1) Connector mounting position Double wiring specification Double wiring specification ... ... ... ... ... ... ... ... 10 02 11 02 11 stations 10 stations Symbol D Mounting position 2 stations 2 stations D side Specified layout Note 2) Specified layout (up to 22 solenoids possible) (up to 21 solenoids possible) 20 20 20 stations 20

ZP

D. Applicable tube O. D.

Direct Solenoid

d.bir21, 0 ) d1.r l s, t4 d.i.ir 13, (2)d.'

VCC

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

3 Port Air Operated Valve Series SYJA300

plug connector (M) DIN terminal (D) M8 connector (WO) 63.5 63.5 63.5 63.5 71.3 [73.5] 81.1 [83.3] 66.3 72.8 80.2 90.2 Max. 10 91.1 Pg7 78.1 [85.1] Approx. 300 (Lead wire length) 54 M8 x 1 71.5 81.7 Approx. 300 (Lead wire length) 51.6 93 67 [74] 100.5 Refer to page 4-4-61 for dimensions with connector cable.