&snac

Z b K g ( ! ' / i t h A u t o D r a i n : 1 . 3 5 k S ) _ M A S S k s 0 . 2 5 k s ( ! / i t h B r a c k e t : 0 . 3 1 k s ) D i m e n s i o n s 0 n e t o u c h f i t t i n s f o r P u r g e a i r e x h a u s t ( 0 P t i o n : P , P s ) c h e c k e r 9 8 d i a m e t e r i n c h ) p u t ' g i n o a i r D e w p o i n t l n o u t e r 8 rn m(5/16 D l i 0 n : .!.

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Rotary Actuator/Vane Style Series CRB2

Stepped round shaft Middle-cut chamfer Machined keyway Change of long shaft length Change of long shaft length S, Y J, K, T J, K, T J, K, T J, K, T S, Y J, K, T XA40 XA41 XA42 Shaft through-hole + Shaft-end female thread XA43 Shaft through-hole + Shaft-end female thread XA44 Shaft through-hole + Shaft-end female thread Change of double shaft length Change of double shaft length Change

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

) Symbol Description Applicable size 10 15 20 30 40 Description Shaft type Applicable size 10 15 20 30 40 Shaft type Symbol XA39 Shaft through-hole Shaft through-hole Shaft through-hole S, Y K, T J S, Y K, T J Y K J J XA31 XA33 XA37 XA45 XA47 XA48 XA51 S, Y J, K, T J, K, T J, K, T J, K, T S, Y J, K, T Shaft-end female thread Shaft-end female thread Stepped round shaft Middle-cut chamfer

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

5

S 1 pc. n n pcs.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

NCM

Low speed Stainless steel rod Front nose mount Rear pivot mount Double end mount Block mount O O O O S S S O O O O O O S S O O O S O N N N S 5 1, 5 1, 5 2 1, 5 1, 5 1, 5 3 1 N O S S S O O O O N O S S S O O O O N N N O O O O O O N N O O O O S N O O O O S O O O O O O O O O 1, 5 O Combination available to order S Available with special request N Not available Note 1) Exclude 2".

ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Air Cylinder Series MB

thread 10.2 10.2 MB 10.2 A K f N N f K A l + Stroke 10.2 l h + Stroke ZZ + 2 Stroke S + Stroke h MB1 CA2 Without Air Cushion CS1 Stroke range Width across flats Bore (mm) Eff. thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W S ZZ CS2 32 40 50 63 80 100 to 1000 125 6 8 11 11 13 16 16 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72

Rotary Actuator/Vane Style Series CRB1

Y K, T J, X, Z S, Y K, T J, X, Z Y K Z J J, T X S S, Y J, K, T X, Z J, K, T J, K, T S, Y J, K, T X, Z XA40 50, 63, 80, 100 XA41 XA42 XA43 50, 63, 80, 100 XA44 XA50 XA53 XA56 XA57 XA58 XA59 XA60 Change of double shaft length (Both sides with four chamfers) Axial: Bottom (Short shaft side) Change of double shaft length (With four chamfers, without keyway) Description Shaft type Applicable

Table of Contents

Fixed 4% F .S.

Modular F.R.L. Unit

Attachment Port size for intermediate air release Applicable models Attachment mounting position Description Symbol None Nil AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve Thread type AW + [K] + AL AC20A to 40A Metric system thread (M5) Rc NPT G AF + AR + [S] + AL AC20 to 60 Nil AW + [S] + AL AC20A to 40A N Note 1) S Pressure switch AF + [S] + AR AC20B

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 CQ2B16-T-PS CQ2B16-S-PS 16 CQ2B20-T-PS CQ2B20-S-PS 20 Port size Rc 1/8, 1/4 CQ2B25-T-PS CQ2B25-S-PS 25 Port size M5 x 0.8 Nickel plated 20 to 50, Anodized 32 to 50 CQ2B32-T-PS CQ2B32-S-PS 32 CQ2B40-T-PS CQ2B40-S-PS 40 CQ2B50-T-PS CQ2B50-S-PS 50 A set includes !4. Note Kits include items !4, !5, !

XL

Port S (10) remains pressurized and valve S (18) remains open.

CV/MVGQ

B1 Axis d9 REC CX CY MQQ M S + Stroke Z + Stroke ZZ + Stroke RHC MK(2) Single acting, Spring extend: CVM3D T Bore size Stroke RS Q G RS H A RZQ MI W S CEP1 CE1 H + Stroke CE2 Z + 2 x Stroke ZZ + 2 x Stroke ML2B AL D CZ H1 MM NN CX H L U CD HX A B1 Eh8 F I K N NA RR Bore size (mm) 20 25 32 40 C J G5-S 8 19 10 41 30 14 9 18 13 5 9 15.5 13 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26

CV/MVGQ

19 23 28 36 10 12 16 20 25 8 8 8 0 0 RZQ MI W S CEP1 Double Clevis Style: CVS1D CE1 Lube type (CVS1D), Non-lube type (CVS1DN) CE2 ML2B With rod boot C J G5-S Width across flats B1 CV Rod d9 MVGQ CC Connection port A ZZ + l + Stroke Z + l + Stroke h + l RB S + Stroke Z + Stroke ZZ + Stroke J Bore size (mm) Stroke range (mm) 40 50 63 80 100 DA AL B B1 C D E F H1 HX CX CDH10 CZ J K L 32 40 40

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

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VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.