Table of Contents

(Including band and screw) J Applicable auto switch Bore size (mm) 20 25 40 32 DD-C7, D-C80 D-C73C, D-C80C Reed -X BMA2-020 BMA2-032 BMA2-025 BMA2-040 D-H7, D-H7C D-H7W, D-H7NF,D-H7BAL D-B5, D-B64, D-B59W D-G5NTL Reed D-A3, D-A44 Solid state 20Reed Solid state BA-32 BA-01 BA-02 BA-04 Data BD1-01M BD1-02M BD1-02 BD1-04M Solid state D-G39, D-K39 Mounting screws set made of stainless steel

60

D-DN

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Ground construction is Class D grounding.

KJ

(inch) Model D1 L M Weight (g) Applicable tubing 5 32 KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 1 4 5 16 20.5 3 8 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Weight (g) Model Note) D L A KQ2P-01 KQP-01 KQ2P-03 KQP-03 KQ2P-05 KQP-05 KQ2P-07 KQP-07 KQ2P-09 KQP-09 KQ2P-11 KQP-11 KQ2P-13 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 5 6 6.8 8.5

3 Port Solenoid Valve Metal Seal Series VZ200 1

G: 300 H: 600 Lead wire length VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Foot bracket VT VP VG 3-Rc 1/8 VP S070 Pilot EXH VQ Locking type manual override VKF VQZ L VZ4 2-L(Z)-01 DIN terminal: VZ4 2-D(Z)-01 1 2 1 2 VZ 300 (Lead wire length) VS With light

Series AS-FM/AS-M/ASD-FM

Weight g Model d T D1 H D2 D3 L1 L4 L2 L3 Min. Max.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

CLA

light/Operation D-AS9W, D-8S9W, D-FS*W, D-GS*W, D HJS9W, D-FS' F, D-J59W, D-KS9W, D-'SBAL Solid Stat.

3 Port Air Operated Valve Series SYJA300

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C. Base mounted (with sub-plate) 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

JXCx-OMY0004

Current limit is exceeded (01-148) Over load D RESET SVON Make sure there are no obstructions that interfere with the actuator movement. Also, make sure that the load, speed, acceleration and deceleration are within the range of the actuator.

0.

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (for VQZ100) This is used when changing piping location.

JXCx-OMY0006

Turn Alarm _Commen t_159 (01-159) ON RESET 9F D SVON and SETUP The connection with the higher-level devices (such as the PC and teaching box) is disconnected. Communic ation error. (01-150) The connection with the higher-level devices (such as the PC and teaching box) is disconnected.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS VFS VS4 VQ7 EVS VFN ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01

Intrinsically Safe Valve

Electrical entry TT is approved for Class I, II, III, Division 1, Groups A, B, C, D, E, F, G. Electrical entry L and LL is approved for Class I, Division 1, Groups A, B, C, D. 4.

Modular Type Filter Regulator Series AW

AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.

JXCx-OMY0008

Current limit is exceeded (01-148) Over load D RESET SVON The target position was not reached within the set time limit (01-149) Failed to reach the set position within the set time limit. Posn failed ALM D RESET SVON Make sure there are no obstructions that interfere with the actuator movement.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

-23 AS221F-01-01 1/8" 20.4 3.2 9.3 20.4 16 27.5 27.5 16 9.3 12.7 12.7 AS221F-01-04 AS221F-01-03 5/32" 4 20.4 27.5 27.5 20.4 17 9.3 9.3 14.2 13.4 13.4 17 12 12 AS221F-01-06 AS221F-01-05 35.2 30.2 32.1 13.5 27.1 3/16" 6 23.1 16.5 30.2 35.2 30.2 32.1 27.1 27.5 20.4 14.2 1/8 17 11.6 1/8 11.4 (12.7) (12.7) AS221F-01-08 AS221F-01-07 1/4" 8 23.9 18.5 32.4 25.3 15.2 18.5 13.2 31 19 19 AS221F-01-

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS-T 2 x Port size ASP ASN AQ ASV 2 x D AK Dimensions Max.