Compact Cylinder

E1 NDH10 NX NDH10 NX A RR1 A A1 L1 MM RR1 U1 NZ L L1 U1 A1 MM l10 l12 l16 l20 22 28 38 44 l10 12 16 20 25 32, 40 50, 63 80 100 12 16 20 25 32, 40 50, 63 80 100 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 10 21.5 32 34 41 42 56 71 79 6 8 8.5 10.5 14 18 21 21 16

NCQ2/CQ2

st 5 st 10 st 5 st 10 st 5 st 10 st 5 st 10 st 5 st 10 st 20 st 20 st 20 st 20 st 20 st 20 st LY 32 40 50 57.2 28 67.2 12 38 22 67.2 33 17 77.2 43 27 LH 34.5 73.7 18.5 28.5 73.7 39.5 23.5 83.7 49.5 33.5 63.7 44.5 76.7 40.5 17.5 86.7 50.5 27.5 96.7 50.5 27.5 60.5 37.5 106.7 4 x LD LT LG LZ LX A LS X Y X Y NCQ2 CQ2 L L1 L1 LD LG LX LH LY Bore size (mm) LZ Y X 5 st 10 st 20 st 5 st 10 st 20

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Compact Hydraulic Cylinder

1.25 M14 x 1.5 M16 x 1.5 M4 12 12 12 16 10 10 12 12 10 10 13 13 7 7 7 9 6.5 5.5 5.5 CH2m M4 6.5 5.5 5.5 M5 10 9 7 CHA M5 10 9 10 Related Y-type double knuckle joint Bracket pin Equipment 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B D-m 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NX NZ NZ NX A1 A1 U1 L1 A B U1 L1 Material: Carbon steel Material: Cast iron Material

MY1

Wall mounting z P. 26 P. 58 y x y Wa: Connection plate t = 10 (880g) x z MY1C40-500 3. Ceiling mounting 4.

Battery-less

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load

Table of Contents

Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

Made to Order

14 depth 10 75, 100, 125 150, 200 250, 300 M8 x 1.25 depth 16 M12 x 1.75 depth 21 140 16 19 10 120 40 9 45 170 20 100 150 9 25 6.5 9 10 7 50 93 14 depth 10 M14 x 2 depth 25 M10 x 1.5 depth 20 170 19 21 10 150 45 12 50 194 25 120 170 11 26 7 11 12 7 55 103 17 depth 12 Long Stroke Bore size (mm) Bore size (mm) Stroke range (mm) K L M N O PG PL Q R S T U V W XA Y Z R Y X 20 25 32 40 20 25 32

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

YZ VFS1320-D/DZ/Y/YZ VFS1420-D/DZ/Y/YZ VFS1520-D/DZ/Y/YZ Lead wire O.D.

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Environment

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 LER LEH LEY -X5 1500 1500 1000 11LEFS 800 11LEJS 1000 1000 Lz 600 L3 [mm] L2 [mm] L1 [mm] 25A400 500 500 LEC 200 Ly Lx LEC S 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 LEC SS-T Work load [kg] Work load [kg] Work load [kg] LEC Y Motorless

VFS

YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

10 stations R port A, B port 3-4-41 42 Series VF5000 Common EXH: VV5F5-20, VV5F5-21 Common EXH: VV5F5-20-1 (G) (E) (T) (D, Y) Double Manual override (Non-locking) Single 2n-Rc 1/4, 3/8 (A, B port) 218.5 (3 position: 247.5) Y: 217.5 (3 position: 246.5) D: 218.5 (3 position: 247.5) 197.5 (3 position: 226.5) Y: 108.5 (3 position: 123) D: 109.5 (3 position: 124) (3 position: 113.5) (3 position

One-touch Fittings

[mm] *1 D1 Weight [g] With a rib X (X) Y Nylon Urethane Applicable tubing M L1 Oval type Round type 4 1/8 KQ2L04-01GS1 10 8.2 7.7 10 10 14.8 16.2 17.2 13.3 4.6 3.3 3 4.8 1/4 KQ2L04-02GS1 14 8.2 7.7 10 10 14.8 21.7 21.1 13.3 4.6 3.3 3 14.3 Rib 4, 6 8 to 16 6 1/8 KQ2L06-01GS1 10 10.4 9.7 12 10 15.5 17.3 19.4 13.3 11.4 9 4.5 5.2 1/4 KQ2L06-02GS1 14 10.4 9.7 12 10 15.5 22.8 23.3 13.3 11.4

CRQ2

Applicable shaft type: W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) Y 3 to 9 3 to10 L2 6 (9 Y) to Y 7 (10 Y) to Y L4 max Y Y Size 10 15 X 8 to 18 10 to 20 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) L3 max X 2 X 2 Size 10 15 Symbol :: A14 Symbol :: A15 Symbol

•

K ,L Y Model 'A .8 C D E F I:MSXQ.8 I: Ji J ;K .L y G H J G H ZPT40B 40 43 34 7.5 60 110 125 5 10 1 1265 6.2 13 4.4 48 16 ZPTSQ8.

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4