Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

] 65.1 VF 122 (GZ, GS: 123.4) [125.4] 120.4 (GZ, GS: 122.4) [122.4] G: 300 H: 600 Manual override (Non-locking) VFR 3-Rc(PT)1/4,1/8 (Lead wire length) (P, A, B port) VP7 41 54 60 [66.5] VP4 57.1 47.6 25.5 20 11.5 12 VQ 10 22 22 63 18 2-Rc(PT)1/4 (R1, R2 port) VQ4 [ ] for AC VQZ 3 4 5 01 02 3 4 5 01 02 M plug connector (M): SYJ7 40-lMllL plug connector (L): SYJ7 40-lLllVQD (Mounting holes

VEX1

operating frequency Mounting Lubrication Port 01 P A R mm2 02 02 03 04 04 06 10 10 12 14 20 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

E-P HYREG ® Series VY1

M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil assembly with terminal part no. Coil no.

0.55

T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 Manifold

G15/G27

Model (Made to Order) 3 Bleed port Pressure range (1) Connection thread Note Indication unit Model MPa 0 to 0.2 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 0 to 0.2 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 0 to 0.2 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 G43-2-01 to 02-X2 G43-4-01 to 02-X2 G43-6-01-X2 G43-7-01 to 02-X2 G43-10-01 to 02-X2 G43-2-01 to 02-X3 G43-4-01 to 02-X3 G43-6-01-X3 G43-7-01 to 02-X3 G43

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

VFM300

Roller lever VFM250-02-01 VFM250-02-01S 14 polyacetal or head steel roller JIS Symbol (Pilot exhaust port) 0.5 MPa supply 2.2 mm P.T. 8 N F.O.F. 4.0 mm O.T. 3-4.5 mounting hole 6.2 mm T.T.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

(mm) 04 06 08 10 12 Type 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Control type Meter-out Meter-in 0 1 With residual pressure release valve With One-touch fitting 15-9-36 Speed Controller with Residual Pressure Release Valve with One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE

Speed Controller: Standard Type Series AS In-line Type

14.1 1.5 31.6 12.7 AS220-N02-ST NPT 1/4 NPT 1/4 AS220-F02-ST G 1/4 AS220-02-ST Rc 1/4 R 1/4 17 18 19.5 7 27.2 40.7 18 1.5 36.7 17.5 AS320-N02-ST NPT 1/4 NPT 1/4 AS320-F02-ST G 1/4 AS320-02-ST Rc 1/4 R 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 19 22.5 AS320-N03-ST NPT 3/8 NPT 3/8 AS320-F03-ST G 3/8 AS320-03-ST Rc 3/8 R 3/8 24.3 9.5 30 53.7 20.8 1.5 47.4 19 22.5 AS420-N04-ST NPT 1/2 NPT 1/2 AS420

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

24 (58) VF (C10) (02) VFR VP7 38.5 31.5 24.5 3 VP4 23.4 Mounting holes 48 (58) 15 15 1.5 1.5 VQ P 3 5 1 2-PE port 2-Rc(PT)1/8 R port VQ4 22.2 Die cast hole For manifold gasket positioning Rc(PT)1/4 P port VQZ VQD 3 4 5 3 4 5 0 1 0 1 DIN connector (Y): VQZ3 2 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ3 2 (R)wLwC6, C8, C10, 02 VZS 155.5 <157.5> 300 (Lead wire length) 71 <72> VFS Indicator

VFA3000

8 16 (0.9) 18 (1) 02 03 VFA31402 position single 0.31 1 8 1 4 3 8 16 (0.9) 18 (1) 02 03 VFA32402 position double 0.33 1 8 Body ported 1 4 3 8 12.5 (0.7) 14.5 (0.8) 02 03 VFA3340-X1 3 position closed center 0.48 1 8 JIS Symbol 1 4 3 8 16 (0.9) 18 (1) 02 03 VFA3440-X1 3 position exhaust center 0.48 1 8 2 position double 2 position single 1 4 3 8 12.7 (0.7) 8.2 (0.45) 13.3 (0.75) 8.7 (0.5) 02

VZ5000

) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L

5 Port Air Operated Valve

52 52 3 position closed center/exhaust center/pressure center VFA5 20(-P) 02 03 3 4 5 138 59.5 (78.5) 66 47 (28.2) (Distance between ports) 4A 24 32 3 2B 1/8 (Pilot port: Upward) 28 2 x 4.3 (For mounting) 1/4, 3/8 [4 (A), 2 (B) port] 44 1/8 [Pilot port: Lateral (-P)] 36 4.5 45 40 22.5 27 3 x 4.3 (For mounting) 2 x 3 (Breathing hole) 70 51 4.4 1P 3EB 5EA 4.4 1/4, 3/8 [1 (P), 5 (EA), 3 (EB

Fieldbus System

One-touch fitting (Metric) 1 2 3 4 5 A B C 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center 4-position dual 3-port valve (N.C./N.C.) 4-position dual 3-port valve (N.O./N.O.) 4-position dual 3-port valve (N.C.

Soft Start-up Valve

flats 30 33 AV4000-04-5 to 6G(Z)-A 1/2 1/2 1/2 AV5000-06,10-1 to 4G(Z)-A 3/4,1 3/4,1 3/4 128 59 53 37 37 53 Width across flats 36 52 AV5000-06,10-5 to 6G(Z)-A 3/4,1 3/4,1 3/4 Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-02-1 to 4G(Z)-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV2000-02-5 to 6G(Z)

5 Port Air Operated Valve Series VFA3000 1

exhaust center 3 position pressure center VFA3122-01-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Table of Contents

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.