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,oox'o''"n' ar3oro 60 Nole 2) Drain guide is G1i 4 (app cable 10 AF30lo 60) Nore 1) Wlhoul a valve name plate and caulion A F 1 0 1 0 6 0 Port size Symbol Port 1 0 20 30 40 50 60 Symbol Descrlption Applicable M5 a 1 B O AF20 to 60 1t4 a a a 3a a a 1t2 a g4 a a 1 a a auto dlain (N C.)

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Modular Type Regulators Series AR

y A 2 OUT 1 I N C SM A AC Component Parts AF No.

Rotary Actuator/Vane Style Series CRB1

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e Key 0 K K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o

Lubricator

AL-OMX0056-A PRODUCT NAME Lubricator MODEL / Series / Product Number AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-D AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,W,Z)-D AL40-(F,N)06(B)(-2,3,6,8,R,W,Z)-D AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,W,Z)-D AL60-(F,N)10(B)(-2,3,6,8,R,W,Z)-D Contents Page 1. Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4.

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG

Rotary Cylinder Series MRQ

i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl u an m t ad en ju m st Friction fittings Note) Can be adjusted 5 at the rotating ends.

CC-Link-E

N ot e1) W i re col or w hen t he opt i on cabl e i s used. Pi n assi gn of bus adapt or si de connect or I t em Pi n assi gn I t em Socket assi gn SLD SLD 4 4 3 D B D B CCLi nk I N CCLi nk O U T 3 2 5 D G D G D A 1 2 D A N . C.

ITV-E

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

O

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

O

Lock keys ( ref er t o P11) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 100% 100% 50% 0% 10% 0% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 0 t o 50% of t he rat ed val ue. ( N ot e 2) : F_2 i s adj ust abl e i n a range f rom 10 t o 100% of t he rat ed

DeviceNet-E

Pi n assi gn of I TV si de connect or I t em Pi n assi g W i re co l o r (N o te 1) +24[ V] Brow n 4 3 N . C. Pow er suppl y connect or G N D Bl ue 2 N . C. D RAI N 4 V Red 3 Com m uni cat i on connect or V Bl ack 1 5 CAN _H W hi t e 2 CAN _L Bl ue N ot e1) W i re col or w hen t he opt i on cabl e i s used.

LUBRICATOR

AL-OMQ0006-C PRODUCT NAME LUBRICATOR MODEL / Series / Product Number AL10-M5(-2,3,6,R,Z)-A AL20-(F,N)01(F,N)02(B)(-2,3,6,C,R,Z)-A AL30-(F,N)02(F,N)03(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)02(F,N)04(B)(-2,3,6,8,R,3W,Z)-A AL40-(F,N)06(B)(-2,3,6,8,R,3W,Z)-A AL50-(F,N)06(F,N)10(B)(-2,3,6,8,R,3W,Z)-A AL60-(F,N)10(B)(-2,3,6,8,R,3W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3.

AIR FILTER

AF-OMQ0004-C PRODUCT NAME AIR FILTER MODEL / Series / Product Number AF10-M5(C)(-2,6,R,Z)-A AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A AF50-(F,N)06(F,N)10(B)(-2,6,8,J,R,W,Z)-A AF60-(F,N)10(B)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2.

Profi-E

I TV connect or pi n assi gnm ent I t em Pi n assi gnm ent W i re col or ( N ot e 1) +24[ V] Brow n 4 3 N . C. Pow er suppl y G N D Bl ue connect or ( Pl ug) 2 N . C. N . C. 3 Com m uni cat i on connect or ( Socket ) ( N ot e 2) RXD /TXD _N A G reen 4 5 N . C. 2 RXD /TXD _PB Red N . C. N ot e 1. W i re col or w hen SM C cabl e i s used. N ot e 2.

E-ITV-STD-RF-A

Lock keys ( ref er t o P8) M i ni m um pressure ( F_1) adj ust i ng range M axi m um pressure ( F_2) adj ust i ng range 90% 100% 120% 100% 0% 0% 10% 20% 20m A 20m A 5V 10V 20m A 20m A 5V 10V 4 0 0 0 12 10 2. 5 5 4 0 0 0 12 10 2. 5 5 ( N ot e 1) : F_1 i s adj ust abl e i n a range f rom 20% t o 90% of t he rat ed val ue. ( D EFAU LT VALU E: 0% ) ( N ot e 2) : The pressure of l ess t han 0%

MICRO MIST SEPARATOR

AF-OMR0021-C PRODUCT NAME MICRO MIST SEPARATOR MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.

MIST SEPARATOR

AF-OMR0020-C PRODUCT NAME MIST SEPARATOR MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,R,Z)-A AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,R,W,Z)-A AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-A Contents Page 1. SAFETY INSTRUCTIONS 1-5 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6.

IZx-OMP0064

(n: Integer from 1 to 34) (For 2, 3, 6, 11, 14, 19, 24, 31 and 34 for n, use a standard model.)

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Order Output specifications T V OUT1 OUT2 With panel mount adapter (For without flow adjustment valve) With panel mount adapter (For with flow adjustment valve) A B C D NPN PNP NPN NPN PNP PNP NPN PNP NPN PNP ZS-33-J ZS-33-JS Panel mount Panel mount adapter A adapter A Analog 1 to 5 V Panel mount Analog 4 to 20 mA Panel mount adapter B E Analog 1 to 5 V adapter B F Analog 4 to 20 mA External