NCQ2/CQ2

C 3 9 2 X W 2 Q The same dimensions as the CQ1W 12, 20 12, 20 (With auto switch) 32 to 100 Auto switch 2 x H thread depth C 2 x H thread depth C 2 x H thread depth C B + Stroke B + Stroke B + Stroke S + 2 (Stroke) L L L S + 2 (Stroke) A + 2 (Stroke) S + 2 (Stroke) A + 2 (Stroke) A + 2 (Stroke) Without Auto Switch 12 20 5 10 20 33 26 3.5 29.5 32 40 5, 10 20, 30 40 46.5 40 3.5 43 M6 x 1 9 50

Compact Cylinder

x 4 x O counterbore depth R With rod end lock RF WL Manual release non-lock type DM I HR D M E Z 2 x P Q L F K M E J (Port size) L Q Q B + Stroke B + Stroke A + Stroke A + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

Table of Contents

0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

Modular Design with Uniform Body Style

OUT q (Port size) OUT q (Port size) Port size IN OUT OUT q e OUT w 1/8 Port size IN OUT OUT q e OUT w e Standard Specifications Fluid Air Ambient and fluid temperatures 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Dimensions Body type: Standard Body type: Front and back port selectable 2 x P1 2 x P2 2 x P1 2 x P2 B B Center of F.R.L. body C Center of F.R.L

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

connector 2 to 15 Plug-in type VV5FR2-01(-Q) VFR200-F(-Q) 2 to 8 VFR2 10-G VFR210-E VFR210-T VFR210-D(-Q) VFR210-L VFR210-M Note) Side/Bottom 1 4 1 4 1 8, C6, C8 Non plug-in type VV5FR2-10(-Q) 2 to 15 Note) Side ported and bottom ported cannot be taken at the same time.

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2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

2/3 Port Valve

) Calculation by Cv factor Q=1972.8Cv(P1+0.1013)l/min(ANR) Calculation by effective area Q=109.6S(P1+0.1013) l/min(ANR) Water How to Read the Graph In case of a flow of 2 l/min.

ZP

Model A B C D E F 2 G H J K L M N P Q Vacuum inlet direction q Pad dia.

Modular F.R.L. Units

1 2 1 L L AF40-A AF20-A How to Order AF10-A AF A 30 q 03 e BD Option/Semi-standard: Select one each for a to f.

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capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.

Table of Contents

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG

Compact Hydraulic Cylinder

stroke MA A K F GA GB H + Q + l 2 x Rc P R J MM RR TDe9 D E e Width across flats G Air release TT mC Air release Air release 10 f l NA T mB TX TY0.3 TY0.3 NB SS + Q + l + 1/2 stroke S + Stroke M H ZZ + Stroke ZZ + Q + l + Stroke TZ (mm) With rod boot Stroke range (mm) Bore size (mm) J e RR B C F GA GB M NA NB P R S T SS TD TT TX TY TZ l f Q B-rod C-rod B-rod C-rod 1 32 M10 x 1.25 25 to

Made to Order

Through-hole/Both ends tapped (Standard): MK2TB MK2T-XC89 Lube-retainer Coil scraper 2 x P Cylinder port M A C G thread length H L N C A KA I KK 2 x J 4 x J K D 0.07 0.15 4 x F counterbore C S T AB AA MM KB Q R 2 x E through 2 x FF counterbore (mm) MM KB KK FF AB AA I N M L K J H G F E D C A KA Bore size 32 40 50 63 0.07 0.15 14 50 9 depth 11 9 depth 7 M10 x 1.5 8 4 46 45 34 6 M6 x 1.0 21

CQ2

Bolt M3 X 40 l 2 pcs.

Modular F.R.L. Unit

Note 2) Without a valve function. Note 3) For thread types M5 and NPT. Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

smcmaintenancepartslist

(Fig. 4) Port Seal holder Rod seal A Retaining ring L is nearly equal to 100 mm or stroke by 1/2. Rod seal B Rod seal A L q t y r t w t e Bush shape thickness Fig. 1 Fig. 3 Grease application points 2-2. Piston seal Wipe off grease around piston seal first to make removal easier.

Battery-less

2 u r q !7 y Component Parts No.