Example) 5-station manifold with pressure sensors 0.035 (16) Weight Ibs (g) 0.049 (22) 0.062 (28) 0.075 (34) 0.09 (41) 0.104 (47) 0.117 (53) 0.132 (60) 0.146 (66) 0.159 (72) 0.174 (79) 0.187 (85) 0.088 Ibs x 5 pcs. + 0.011Ibs x 5 pcs. + 0.09 Ibs = 0.585 Ibs (40 g x 5 pcs. + 5 g x 5 pcs. + 41 g = 266 g ) 4 Series ZB Ejector Exhaust Characteristics/Flow-rate Characteristics K J Nozzle Size
3 8 1 Common (2) ( ) 1 4 3 8 1 4 Base (Side) Base (Side) Base (Side) VV317-02-053-02 3 Individual 1 4 1 4 1 4 Individual exhaust Note 1) For more than 3 stations, supply air both sides of P port.
3) 1 (2/V) 1 (G) 40 ) (3/E) 40 ) [Nm] G Rc1/8,G1/8,NPT1/8 35 Rc1/2,G1/2,NPT1/2 2830 (2/V) Rc3/4,G3/4,NPT3/4 2830 (3/E) Rc1,G1,NPT1 3638 10 No.ZL3-OM00801-A 3.4.3 1/P 0.20.6MPa 2/V 1 3/E G 3.4.4 1/P 1) 2) 3) 4) 1) 2) 3) 1) 0.1 2) 0.1 3) +0.15 -0.2 3.4.5 1) 2), 3) 4) 5) URL http://www.smcworld.com& 11 No.ZL3-OM00801-A 3.5 3.5.1 1) . 30N 35N 20N 2) 6 33
02 Connection Rc(PT) 3/8 03 Connection Rc(PT) 1/2 04 Bracket B Accessories Pressure gauge G Pressure gauge reverse mounted R Connection NPT1/8 N01 Series IR2000 Connection NPT1/4 N02 Connection NPT3/8 N03 Connection NPT1/2 N04 Connection G(PF) 1/8 F01 Connection G(PF) 1/4 F02 Connection G(PF) 3/8 F03 Connection G(PF) 1/2 F04 Series IR1000 Modular Products and Accessory Combinations
) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.
Note 5) When VA or VB is specified for (1), the check valve is already built in. 2 4 (Straight) 3 6 (Straight) 4 3.2 (Elbow) 5 4 (Elbow) 23 - Doc. No.
Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch
-20Station 1(Mounting hole) Grommet (G), (H) VK VZ VF Manual override (Non-locking) G: 300 mm H: 600 mm (Lead wire length) (3 port valve) VFR (A port) VP4 VZS VFS (Pitch) (Mounting hole) VS4 4-Rc 1/8 (P , R port) (A, B port) VQ7 EVS VFN 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) (mm) Stations 2 3 53 40 69 56 4 85 72 5 101 88 6 117 104 7 133 120 8 149 136 9 165 152 10 181 168 11 197 184
Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2
Effective area (mm) Weight g A
Effective area (mm) Weight g A
Piping Specifications Model M5 M5R 01 N01 M5 x 0.8 (Rear ported) NPT1/8 (Side ported) M5 x 0.8 (Side ported) R1/8 (Side ported) Port size Sensor pressure receiving area Sensor pressure receiving area: Silicon Wetted part material C3604 (Electroless nickel plated) O-ring: HNBR Piping port With lead wire with connector (5 cores, 2 m) 55 g 63 g Mass Without lead wire with connector 15 g 23 g
20 (Mounting thread) 48 112 56 70 80 58 17 +0.4 +0.1 4 44 40 52 52H9 +0.074 depth 5 0 66 4 x M10 x 1.5 through (Thread for mounting attachment) Rc 1/4 (G1/4, NPT1/4) (Finger closing port) Auto Switch Mounting Groove Dimensions 58.6 30 38 85 13 13 Rc 1/4 (G1/4, NPT1/4) (Finger opening port) 16 22 5 6.45 MHW2-50D1 6 Right angle finger type 78 37 24 30 39 12 58 85 52 4 x M10 x 1.5 through (
M5 M5R 01 N01 Port size M50.8 M50.8 R1/8 NPT1/8 M5(0.8) M5(0.8) Wetted parts Pressure sensing part Silicone Material of Piping port C3602 (Electro less nickel plating) O-ring: HNBR With lead wire and connector attached (5-core, 2 m) 55 g 63 g Weight Without lead wire and connector 15 g 23 g Analogue output Voltage output Range Rated pressure range A B C Vacuum 0.0 to -101.0 kPa 0 -101 kPa
ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.
18 90 21 4(depth 4) 4(depth 4) 4 50 8.5 114 42 33 n QL Model 50 100 150 200 250 200 250 300 350 400 50 300 350 400 100 150 Stroke MXY6 2 3 3 4 54 39 34 59 MXY8 2 44 2 3 4 5 5 39 64 54 34 59 MXY12 2 2 67 3 3 4 4 5 5 37 62 42 47 72 52 77 224 Series MXY Air Slide Table Long Stroke Type Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch D-A90(V), D-A93
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket), CE Compliance: Q (CE Marked)
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: CE Marked
Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate