VCW

Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.

VCL

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Port size 1/8 (6A) 1/4 (8A) All IN ports are 3/8.

3 Port Solenoid Valve Series SYJ300/500/700

Features 1 Series SYJ300/500/700 Manifold Variations A port size With one-touch fitting Valve series A port location P, R ports size M3 M5 1/8 Applicable tubing O.D. 6 4 N3 N7 N9 8 Note 1) M5 x 0.8 SYJ300 Top Note 2) Body ported Base mounted 1/8 SYJ500 Top 1/8 Note 1) 1/8 SYJ700 Top 1/4 Note 1) M5 x 0.8 SYJ300 Side 1/8 Bottom SYJ500 1/8 Side Note 1) 1/8 Bottom SYJ700 1/4 Side 1/4 Note 1)

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Vacuum Unit

12.3 Suction filter 38.5 16.5 A 15 4 Vacuum (V) port 78.8 V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 4 Refer to page 38 for dimensions with a mounting bracket.

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

ZQ-OM01301

Note 5) When VA or VB is specified for (1), the check valve is already built in. 2 4 (Straight) 3 6 (Straight) 4 3.2 (Elbow) 5 4 (Elbow) 23 - Doc. No.

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

VZ1000

2 3 1 2 4 3 0.6 1.5 1.0 0.9 M5 x 0.8 90 2 position single solenoid VZ1120-M5 3-3-10 4 Port Solenoid Valve Body Ported Series VZ1000 Use as a guide for selection.

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Manifold Specifications

Series VZ1000 Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP)/R(EXH) Valve stations A, B port location VK VZ VF 1(P), 3(R) port 4(A), 2(B) port Port size Valve Note) effective area (mm2) VFR VZ1120 1 4: 0.48, 4 3: 0.85 VP4 Note) Value at manifold base mounted

90

size: 4 Inch size: 5/32" 3.5 38.5 A 16.5 1 Suction filter 15 Vacuum (V) port 78.8 A C V port type 06 08 07 09 6 8 1/4" 5/16" 8.25 11.4 10.8 11.4 4 6 4.76 6 1 Refer to page 22 for dimensions with a bracket mounted.

Compact Vacuum Unit

None Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (3) (3) Release valve (4) K1 J1 Q1 Q2 VQ110 Rated voltage (4) ZB1 (4) (4) 5 6 24 VDC 12 VDC Connector assembly Table 2 Connector entry direction Note 1) AXT661 L LO M MO L-type plug connector, with lead

3M/SMseries

/NVF323O-OD,NVF3330-OD,NVF343O-OD NVF3530-OD ( ) :3 position ( ):3 pcition X:with indicator light and surge voltage supfressor f]:with indicator light and surge voltage suppressor @ Series NVF3OO inch (mm) ( vF3r22-OG-02-F) Series Manifold B Mount Type/Dimensions inch(mm) Cornmoi ExhausVNWsF3-30-O01 (c) (D) < ):3 pqsilion f]:with indicator light and surge voltage suppressor 4 7 a 10 l l 12

CG1-OM0227

P4 2-1. 2-2. 2-3. 2-4. 2-5. 2-6. 2-7. 2-8. 3. P18 3-1. 3-2. 3-3. 3-4. 4. (XC85,X446) P25 4-1. 4-2. PTFE 5. P26 6.

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.