ZL3-OM00801

H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1 1 Rc F G N NP 7 ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(0.760.84Nm) (ZL3-SE1-A) 1 2 8.2 ZL6 ZL6 P6 8.3 1) 2) 3)2 4) 5kPa 5)

Digital Pressure Switch

Normal output Reversed output P_1 = A-(A-B)/4 n_1 = B+(A-B)/4 A = Max. pressure H_1 = (A-B)/2 H_1 = (A-B)/2 B = Min. pressure The set values of OUT2 become as follows "_", i.e. "P_2", "n_2" and "H_2".

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

Note 4) Not available for piping specifications of M5R, 01 and N01. Note 5) The DIN rail needs to be prepared by the customer.

100

4 Component Parts No.

3M/SMseries

size Cv factor Weioht(3) lbs(kst) %NPTF %NPTF %NPTF 0.8 1.0 0.46(0.21) NVF3l3G.OO-017 2/Single NVF3230-OO-orT 2yDouble 0.8 1.0 .291 NVF3330-OO-0tT 3lolosed centel u,oJ 0.8 o.97(O.44 NVF3430-OO-0tT 3/Exhaust center 0.8 '1 .0 0.97(0.44) Body ported (May be mounted on 30 type manitold) % ' V . t NPTF NVF3530-OO-0173/Pressure center 0.8 0.55(4) 0.9 0.6(4) 0.97(0.,14) Nole (1) lf exhaust lor main

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

VFS4000-OMY0001

) JIS B8419 : 2010(0.5MPa) 3) 0.5kg0.43kg 4) 1)2) 4 No.VFS4000-OMY0001 2

Electro-Pneumatic Proportional Valve

) 0.6mm ( for PVQ13) 0.8mm ( for PVQ13) 1.6mm ( for PVQ31, 33) 2.3mm ( for PVQ31, 33) 4.0mm ( for PVQ31, 33) M G Flow rate characteristics PVQ13-5-04 (24VDC type) at 0.45MPa PVQ3-5G-23 (24VDC type) at 0.35MPa 140 8 7 120 6 100 Flow rate (Lit/min) Flow rate (Lit/min) 5 80 4 60 3 40 2 20 1 0 0 30 40 50 60 70 80 75 85 95 105 115 125 135 145 155 165 65 Current (mA) Current (mA) Dimensions

This is a legacy product, and replaced bySYJ514M-5G-01, VALVE, SOL BASE MOUNTED *LQA, VALVE, VZ300 SOL VALVE 3-PORT, NA, VZ300 BASE MT 1/8, .20412 lb

Super Compact Direct Acting 2/3 Port Solenoid Valve Series S070

Body ported Base mounted Body ported Bar stock type Stacking type Meeting miniaturisation needs of analysers, medical equipment and semiconductor manufacturing equipment Series S070 Extremely light weight 5g (Valve single unit) Coming out in May, 2002 Operation noise 38dB(A) or less Easy to increase or decrease the number of stations.

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)]

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)]

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: -, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: -, Material: -, Option: -, CE Compliance: -

2 Port Solenoid Valve for Water, FOOT BRACKET, VDW350 *LQA, VALVE, VC* VALVE, 2-PORT SOLENOID, 21, VC* NO SIZE RATING, 0.03608 lb

IDX-OM-W016

. 3 2 3 6 Precautions for long-term non-operation . 3 2 Chapter 4 Checks and Maintenance 4 1 Daily Check Points . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of Auto Drain Strainer . 4 1 Chapter 5 Troubleshooting . 5 1 IDFA Series Table of Contents 1 IDX-OM-W016 Air dryer Table of Contents Chapter

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Net weight Part no. 5g GR-L-005 10g GR-L-010 150g GR-L-150 23 Revision history Revised by reviewing the description. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights

Air Slide Table Series MXP

4 each MXP6-PS GR-L-005 (5g) GR-L-010 (10g) Cylinder unit GR-L-020 (20g) GR-L-050 (50g) MXPJ6 No. Description Material Note Component Parts u q w i o y !3 !2 !

MHx-OMY0005

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D