Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

90

No. 3 4 5 6 7 8 9 Note) When ordering a manifold ZZK2---A on page 3, q to e are delivered as a set.

ZQ-OM01301

class is 2:6:3 of ISO08573-1:2010JISB83921:2012 .

VCW

Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.

VCL

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Port size 1/8 (6A) 1/4 (8A) All IN ports are 3/8.

ZL3-OM00601

3/E) port Rc1,G1,NPT1 3638 10 Doc.

ZL3-OM00801

H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1 1 Rc F G N NP 7 ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(0.760.84Nm) (ZL3-SE1-A) 1 2 8.2 ZL6 ZL6 P6 8.3 1) 2) 3)2 4) 5kPa 5)

Digital Pressure Switch

Description Part number Remarks Panel mount adapter ZS-39-B Panel mount adapter + Front protective cover ZS-39-D Front protective cover ZS-39-01 Lead wire with connector + connector cover ZS-39-5G 5 cores, 2 m R1/8 conversion adapter ZS-39-N1 NPT1/8 conversion adapter ZS-39-N2 DIN rail mounting adapter ZS-39-R : Made to Order -10No.PS-OMM0005-J Summary of Product parts Names of individual

Series ZSE10(F)/ISE10 Digital Pressure Switch ®

adapter + Front protective cover M5 female thread/Rear ported D Note 3) M5R Piping port R1/8/Side ported 01 DIN rail adapter Note 5) R1/8 Piping adapter R Note 4) NPT1/8/Side ported N01 Note 3) Not available for piping specifications of 01 and N01.

100

3 !

3M/SMseries

Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h

lVFl 10

{8) o.2a 17l o.47 (12) o32 (8) o.12 (3) Miuimebas in Peenthe66s World Wide QS\E Support...

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

.Osrrc NVFI 10 seies 3 WaY'3 Port Direct Solenoid Operated Cv 0.055 (0-100 PSI); 0.05 (0 -150 PSI) Port Size 1/8" NPTF (Standard) High Speed Response Time 8mSec.

VFS4000-OMY0001

20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3 , 12 12 12 12 2 Nm M5 1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc

Super Compact Direct Acting 2/3 Port Solenoid Valve Series S070

NPP-01-21 Super Compact Direct Acting 2/3 Port Solenoid Valve Super Compact Direct Acting 2/3 Port Solenoid Valve Valve width 7mm Valve width 7mm Power consumption 0.35W(standard) Power consumption 0.35W(standard) 0.1W(with power saving circuit) 0.1W(with power saving circuit) Sonic conductance:C 0.042 [dm3/(s bar)] Sonic conductance:C 0.042 [dm3/(s bar)] Single unit Manifold Base mounted

Electro-Pneumatic Proportional Valve

) 0.6mm ( for PVQ13) 0.8mm ( for PVQ13) 1.6mm ( for PVQ31, 33) 2.3mm ( for PVQ31, 33) 4.0mm ( for PVQ31, 33) M G Flow rate characteristics PVQ13-5-04 (24VDC type) at 0.45MPa PVQ3-5G-23 (24VDC type) at 0.35MPa 140 8 7 120 6 100 Flow rate (Lit/min) Flow rate (Lit/min) 5 80 4 60 3 40 2 20 1 0 0 30 40 50 60 70 80 75 85 95 105 115 125 135 145 155 165 65 Current (mA) Current (mA) Dimensions

This is a legacy product, and replaced bySYJ514M-5G-01, VALVE, SOL BASE MOUNTED *LQA, VALVE, VZ300 SOL VALVE 3-PORT, NA, VZ300 BASE MT 1/8, .20412 lb

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)]

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)]