Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

stroke MA A K F GA GB H + Q + l 2-RcP R J MM RR TDe9 D E e Width across flats G Air release TT C Air release Air release l 10 f NA T B TX TY 0.3 TY 0.3 NB SS + Q + l + Stroke S + Stroke M H ZZ + Stroke ZZ + Q + l + Stroke TZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B C F GA GB M NA NB P R S T RR SS TD TT TX TY TZ e f Q 1 1 2 32 M10 x 1.25 58 38 16 32 15 11 37 31 3/8 39 141

smcmaintenancepartslist

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J Drain AD27-C Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C2SF-CJ C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 OUT IN C2SF-6C AD27-6 AD37-6 AD38-6 Nylon AD27-6C C2SF-6J C3SF-6J w C3SF-6W C2SF-6CJ r C2SF-2 C3SF-2 AD27-2 AD37-2 e Metal AD38-2 t C3SF-2J C2SF-2J C3LF-

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Rc(PT)1/8 Width across flats 13 Width across flats 8 M5 x 0.8 M14 x 1 6.2 Width across flats 19 M10 x 1 5 5 D C Width across flats 14 3 I I K 3 D C J J H F M5 x 0.8 Width across flats 8 Width across flats 12 M8 x 1.25 H F Width across flats 10 Width across flats 2 Y 2 A Y B 2.5 A B With a stroke of 10mm Dimensions/10mm stroke (mm) Model A B C D F Y H I J K K Q:4 Q:6 ZPT10F10-0-A10 88.5

RSQ

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Vacuum Pad: Ball Joint Type

(mm) Model A B C D F Y H I J K K Q: 4 Q: 6 ZPT10F10-0-A10 12 12.5 27 10 10 38.5 74.5 88.5 89.5 1.5 ZPT13F10-0-A10 39 23 Hexagon width across flats 13 15 13 1/8 (Rc, NPT, NPTF) 10.5 13 27.5 75 89 90 2 ZPT16F10-0-A10 18 16 M14 x 1 Additional Dimensions by Stroke (mm) Hexagon width across flats 19 H I J K Stroke 20 +38 +10 5 5 D C +28 30 +48 +20 I 40 +84 +30 +54 50 +94 +40 J H F Width across

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

FV 2-FD RS Q G RS H A 2-O (Special cap bolt) FL FX FZ RZQ Head side flange style: MI W S CE1G Bore size Stroke CEP1 CE1 FV CE2 2-FD ML2B 2-O (Special cap bolt) A + Stroke FL FX FZ C J G5-S CV Double clevis style: CE1D Bore size Stroke MVGQ CX + 0.4 + 0.2 CC CZ 0.1 0.3 RB J 2-O (Special cap bolt) CD hole H10 Shaft dg RR CU CW DCL + Stroke A + Stroke -X 20Data Foot style Rod side flange, Head

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

ZP

Note 2) The symbol "" indicates buffer type "J" or "K". Note 2) The symbol "" indicates buffer type "J" or "K".

0.4

VQ1000/2000 Series VQ1000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P

CRB2/CRBU2/CRB1

-XA31 to XA47 Shaft Pattern Sequencing 2 Applicable shaft types: J, K, S, T, Y Shaft type J K Refer to page 4.

1

Dimensions 32 to 50 63 to 100 Front mounting flange Front mounting flange X Q Y + Stroke X Q Y + Stroke 2-Rc 1/8 (Both sides) 2-Rc 1/8 (Both sides) CL CL Q X Y CL Bore size (mm) 32 40 50 63 80 100 ( ): Denotes the dimensions for long stroke. Specifications other than above are the same as standard type.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

E D C ZL 3 2 ZY Dimensions: 10 mm Stroke A B (mm) J H F D C E A B I Model ZQ ZPR10F10-0-A10 10 12.5 39.5 10 12 23.4 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15 23 ZF 10.5 13 40 23.9 51 85 ZPR16F10-0-A10 16 18 ZP S (mm) M14 x 1 ZCU Q: 4 Q: 6 Y Model R S R S Hexagon width across flats 19 AMJ ZPR10F10-0-A10 1.5 I 5 ZPR13F10-0-A10 10.4 20.6 12.8 21.6 Misc. 2 ZPR16F10-0-A10 Additional

C85

1 y q r e i !2 o !

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

MGP

P (Plug) Q J K GA GB S MGQ G FB 2-P PA+Stroke FA C+Stroke MGG E B+Stroke A+Stroke MGC *Intermediate strokes, except standard stroke, can be manufactured by using a spacer.

Title not found

d l6:j rod .@S&S$S4i&eS'i8 32,a4 o r o o q q e .(Ni-n. A 6J 6 80' 100 , , 1 a ! Douoe b, : u rod -4t&S4+-&*--s-32,ao il])l]QA{ 50 63 80, i00 \ vunipte ,,,---] auto switch mounting options i Spr s _ E _ rlu'r, _s,S$$__-g'4-4_g-4i___ o.r' g " e n d ' ' " a ' . a o ; iN)co2 Non.rclating rod Sngle f0ll lN)crl2K 1 2 . 1 6 --*r-*-++---e-*-e-e+--?! i!