Rotary Actuator/Vane Type

Size: 40 Size: 10, 15 Size: 20, 30 A port B port q e t e !2 q o !0 !0 !2 !3 o r !3 w !4 r w !5 !4 !1 !1 y u i D-M9m !6 Component Parts No. Description Material No.

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Q I>A F ' F Flat "" ,,"OD with rib G :M5 xO.8 G:M6Xl y " p Q I>A ~ . F Fiat A. ,,"OD withn b Modol M I>B e 0 E Modol M ',B . e 0 ' El ZPY4Ol! 40 43 1 8.5 :!as .as 6.5 3.3 itt,ion' ZPY1Ol! 10 12 12 22 38 3 1.7 H4{~1 14.5 5 1.8 ZPYSOl! 50 53 19.5 29.5 <7.5 6 8 7.5 3.8 N6 (~,1 16.5 7 2.5 ., 1~ 15 12 22 38 5 6 3 1.8 ZPY~ 16 18 12.\ 22.5 :!

Compact 5-Port Solenoid Valve

Product Precautions 14 JSY1000/3000/5000 Series Valve Construction Rubber Seal 2-position double 2-position single q e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position

Table of Contents

3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3 !4 !5 !6 !7 No. q w e r t y u i o !

REA/REB

8 @0 @2 @1 o q !4 !3 y i #1 !5 #2 !9 !7 !1 !2 !0 #0 r t u @9 !6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Component Parts No. Description Body No. Description Material Note Hard anodized Material Aluminum alloy Note Aluminum alloy Plate B q !

REA/REB

3 !2 #4 e #1 !8 @3 #5 !7 #3 MK(2) @5 @6 @7 @8 RS Q G RS H A RZQ MI W S CEP1 N@4 @9 CE1 Component Parts CE2 No. Description Body No. Description Note Hard anodized Material Aluminum alloy Material Note Hard anodized Aluminum alloy Plate A q !

C85

7 q !4 !1 w e !3 !

High Vacuum Angle Valve

100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

1

9, @0, @1, @2, @3, @6, @9, #0, #1, #3, #4, #5, #6, #7 20, 25, 32, 40, 50 !9 is type L only. -XC6A r, !0, !5, !6, !7, !8, !9, @0, @1, @3, @4, @7, @8, @9, #1, #2, #3, #4, #5, #9, $0 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. Dr, !1, !7, @0, @1, @2, @3, #1, #5 CQ2 20, 25, 32, 40, 50 #1 is rod side only.

Vacuum

, f l e 5 0 l 2 3 5 Fressure characteristics Flow characteristics Suppypress!

Vacuum

, f l e 5 0 l 2 3 5 Fressure characteristics Flow characteristics Suppypress!

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

MXS Series Air Slide Table

Q Q Q Q Q Q Q Q Q Q Q Q Q 41 Q MXS Series 6, 8, 12, 16, 20,25 The MXS series air slide table is ideal when precise load transfer/ assembling is required. Shock absorber type and Symmetric type are now available.

MGG

9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Proposals for Energy Saving

OUT(2) Rc G NPT NPTF Nil F N T 1 IN(1) Port size Fluid Port size 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Symbol 02 03 04 06 Class 3 Class 2 Class 4 Nil A General air Dry air Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size Orifice size (mm ) Symbol 3 4 5 7 10 Class 4 Class 3 Class 2 3 4 5 7 10 Consult SMC regarding other voltages.

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F O T I D G 3 7 I D G E L 3 H F O T I D G 3 H1 E N 4 0 0 U l e s e t T u b e c o n n e c t i o n D o r t for purse air e]-!-q-U.!-! a m e t e r : 8 m m I D G E L 5 F O T I D G 5 I I D G E L 5 H F O T I D G s H t D e w ( 0 p t i o n : S ) 4 5 1 3 3 5 N / C C o r p . I 6 4 , 1 C h o m e , 5 h i m b a s n i , M i n a t o k u T o k v o 1 0 5 0 0 0 4 , J a p a n T E L . 0 3 3 5 0 2 B ?

Thermo-chiller

Q: Heat generation amount I: Current Users equipment q Derive the heat generation amount from the power consumption.

Stopper Cylinder

QA [mm] F 13 Tubing O.D. 6 B + Stroke R R 8 QB Stroke Q Bore size QA F Q QB QU QW 1.8 Stroke 20 Tubing O.D. QA F 13 KA KB Tubing O.D. 6 8 QB Stroke Q QU 32 6 7.5 20 13 38 60.5 40 6 8 24.5 13 42 68 50 8 9.5 26 16 50 82 29 1.8 Stroke 20 QW Tubing O.D. QA F 13 Tubing O.D. 6 QU 8 QB Stroke Q 29 1.8 Stroke 20 QW 32 to 50 20 Tubing O.D.