MK

0.8 6.5 14h9 29 38 With arm/MKl -llN 12 16 M R Q P O N S Model MKB12-llN MKB16-llN 18.5 M3 X 0.5 4 20 29 8 8 21.5 M4 X 0.7 5 25 36 11 11 20, 25 Both ends tapped/MKA U S R K L Oh9 Q F E C B Model MKB20 MKB20 A 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52 40 16 8 23 Note 1) Above figure is for D-A73, A80.

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 0.05 0.05 0.06 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Modular Type Regulator Series AR

Metric thread (M5) Rc NPT G Nil N F Port size Accessories Body size Port size Symbol Nil B E Symbol Applicable model AR10 to 60 AR20 to 60 AR10 AR20 to 60 AR10 to 40 Description With bracket 10 20 25 30 40 50 60 M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 With square embedded type pressure gauge (with limit indicator) With round pressure gauge (without limit indicator) With round pressure

Shock Absorbers and Rate Controls

(SMAII BORE} UFM10 x t ) UF r/220 uF s/16 18 + UF I-72 [ ' Dtr_ C l' I j rIl l l T F I r H o .L 8 a.22 & _l -! g.3t g 1 R r I -1 .2( 20 F G (otolog llo.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Bore (mm) H I OA OB E F M N K L Q RA RB T Inch Inch Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 25 29 36 40 5 5 5.5 5.5 #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 15.5 20 25.5 28 3.5 3.5 5.4 5.4 32 38 47 52 #8-32UNC #8-32UNC #10-32UNF 1/4-28 UNF 3.5 3.5 4.5 5 5.2 6.2 8.2 10.2 12 16 20 25 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 For the following

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

Mounting style B L F 12 mm equivalent S 1 pc.

CHKD/CHKG

e CH2 H E h + Stroke C B + Stroke 4 x K through 8 x L counter bore CHA J A + Stroke M Rod end male thread Related Products D(mm) A B C D E F G H J K L M P Q R S Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 11.5 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 12 32 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 19.5

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

240

side) Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18 5.5 12 Note 5)

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle 1 2 3 4 !1 q i !

VK3000

ported (A, B port top ported) How to Order Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) VK VK A port: Rc 1/8, M5 x 0.8 A, B port: Rc 1/8, M5 x 0.8 VV5K3 21 05 VT VK3120 Valve stations Thread type VK332 Q CE-compliant Nil CE-compliant 01 1 station Nil Rc Applicable blanking plate assembly VK3000-7-1A F N T G 20 20 stations R1 port: M5 x 0.8 R2 port:

ZX

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) (1) Rear flange style Note1) Integral clevis style Note1) Single clevis style Note1) Note 3) Double clevis style (1)Note2) Front trunnion style (1)Note2) Rear trunnion style (1) Boss-cut basic style (1) Boss-cut flange style (1) Boss-cut trunnion style Note 1) Mounting nuts are not attached to the integral clevis, single

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Grease pack GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) (1) Rear flange style Note1) Integral clevis style Note1) Single clevis style Note1) Note 3) Double clevis style (1)Note2) Front trunnion style (1)Note2) Rear trunnion style (1) Boss-cut basic style (1) Boss-cut flange style (1) Boss-cut trunnion style Note 1) Mounting nuts are not attached to the integral clevis, single

Basic Type/Direct Mount Type

43 54 64 82 94 Q 68 84 95 105 116 134 159 171 QW 14 18 17 20 26 34 48 60 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CY1H CY1F CYP P (Piping port) Model TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

F G 2 pcs. 1 pc.